Patent | Date |
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Chemical sensor using metal nano-particles and method for manufacturing chemical sensor using metal nano-particles Grant 9,034,275 - Lee , et al. May 19, 2 | 2015-05-19 |
Apparatus for preventing stiction of MEMS microstructure Grant 8,613,287 - Je , et al. December 24, 2 | 2013-12-24 |
Chemical Sensor Using Metal Nano-particles And Method For Manufacturing Chemical Sensor Using Metal Nano-particles App 20130153113 - LEE; Myung Lae ;   et al. | 2013-06-20 |
Chemical sensor using metal nano-particles and method for manufacturing chemical sensor using metal nano-particles Grant 8,398,921 - Lee , et al. March 19, 2 | 2013-03-19 |
Micro piezoresistive pressure sensor and manufacturing method thereof Grant 8,261,617 - Choi , et al. September 11, 2 | 2012-09-11 |
Capacitive accelerometer Grant 8,113,054 - Je , et al. February 14, 2 | 2012-02-14 |
MEMS package and packaging method thereof Grant 8,035,176 - Jung , et al. October 11, 2 | 2011-10-11 |
Bidirectional readout circuit for detecting direction and amplitude of capacitive MEMS accelerometers Grant 7,997,137 - Lee , et al. August 16, 2 | 2011-08-16 |
Apparatus For Preventing Stiction Of Mems Microstructure App 20110186089 - Je; Chang Han ;   et al. | 2011-08-04 |
Micromachined sensor for measuring vibration Grant 7,975,550 - Lee , et al. July 12, 2 | 2011-07-12 |
Chemical Sensor Using Metal Nano-particles And Method For Manufacturing Chemical Sensor Using Metal Nano-particles App 20110150701 - LEE; Myung Lae ;   et al. | 2011-06-23 |
Micro Piezoresistive Pressure Sensor And Manufacturing Method Thereof App 20100251826 - Choi; Chang Auck ;   et al. | 2010-10-07 |
Mems Package And Packaging Method Thereof App 20100096713 - JUNG; Sung-Hae | 2010-04-22 |
Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same Grant 7,679,186 - Jung , et al. March 16, 2 | 2010-03-16 |
Capacitive Accelerometer App 20100050771 - Je; Chang-Han ;   et al. | 2010-03-04 |
Micromachined Sensor For Measuring Vibration App 20090320595 - LEE; Myung Lae ;   et al. | 2009-12-31 |
Bidirectional Readout Circuit For Detecting Direction And Amplitude Of Capacitive Mems Accelerometers App 20090056448 - LEE; Sung Sik ;   et al. | 2009-03-05 |
Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same App 20070132044 - Jung; Sung-Hae ;   et al. | 2007-06-14 |
Microelectromechanical device using resistive electromechanical contact Grant 6,963,117 - Yang , et al. November 8, 2 | 2005-11-08 |
Slot antenna having slots formed on both sides of dielectric substrate App 20050057412 - Hwang, Jung Hwan ;   et al. | 2005-03-17 |
Capacitive micro-electro-mechanical switch and method of manufacturing the same Grant 6,867,467 - Yang , et al. March 15, 2 | 2005-03-15 |
Radio frequency device using micro-electronic-mechanical system technology Grant 6,750,742 - Kang , et al. June 15, 2 | 2004-06-15 |
Radio Frequency Device Using Microelectronicmechanical System Technology App 20040085166 - Kang, Sung Weon ;   et al. | 2004-05-06 |
Microelectromechanical device using resistive electromechanical contact App 20030222321 - Yang, Woo-seok ;   et al. | 2003-12-04 |
Capacitive micro-electro-mechanical switch and method of manufacturing the same App 20030151879 - Yang, Woo Seok ;   et al. | 2003-08-14 |