Patent | Date |
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Methods and apparatus for conserving electronic device manufacturing resources Grant 11,049,735 - Clark , et al. June 29, 2 | 2021-06-29 |
Methods And Apparatus For Conserving Electronic Device Manufacturing Resources App 20170256425 - Clark; Daniel O. ;   et al. | 2017-09-07 |
Apparatus for conserving electronic device manufacturing resources including ozone Grant 9,685,352 - Clark , et al. June 20, 2 | 2017-06-20 |
Method and apparatus for controlling a processing system Grant 9,080,576 - Loldj , et al. July 14, 2 | 2015-07-14 |
Energy savings and global gas emissions monitoring and display Grant 9,075,408 - Loldj , et al. July 7, 2 | 2015-07-07 |
Methods And Apparatus For Conserving Electronic Device Manufacturing Resources App 20150136239 - Clark; Daniel O. ;   et al. | 2015-05-21 |
Methods and apparatus for conserving electronic device manufacturing resources Grant 8,974,605 - Clark , et al. March 10, 2 | 2015-03-10 |
Methods and apparatus for smart abatement using an improved fuel circuit Grant 8,668,868 - Chiu , et al. March 11, 2 | 2014-03-11 |
Methods and apparatus for assembling and operating electronic device manufacturing systems Grant 8,455,368 - Chandler , et al. June 4, 2 | 2013-06-04 |
Method And Apparatus For Controlling A Processing System App 20120204965 - LOLDJ; YOUSSEF ;   et al. | 2012-08-16 |
Methods for starting and operating a thermal abatement system Grant 8,095,240 - Chiu , et al. January 10, 2 | 2012-01-10 |
Reactor design to reduce particle deposition during process abatement Grant 7,985,379 - Chiu , et al. July 26, 2 | 2011-07-26 |
Energy Savings And Global Gas Emissions Monitoring App 20110144791 - LOLDJ; YOUSSEF A. ;   et al. | 2011-06-16 |
Energy Savings Based On Power Factor Correction App 20110121649 - LOLDJ; Youssef A. ;   et al. | 2011-05-26 |
Methods And Apparatus For Treating Effluent App 20100258510 - HOOSHDARAN; FRANK F. ;   et al. | 2010-10-14 |
Abatement Apparatus With Scrubber Conduit App 20100192773 - Clark; Daniel O. ;   et al. | 2010-08-05 |
Reactor design to reduce particle deposition during process abatement Grant 7,736,599 - Chiu , et al. June 15, 2 | 2010-06-15 |
Safety, monitoring and control features for thermal abatement reactor Grant 7,682,574 - Chiu , et al. March 23, 2 | 2010-03-23 |
Methods And Apparatus For Conserving Electronic Device Manufacturing Resources App 20090246105 - Clark; Daniel O. ;   et al. | 2009-10-01 |
Methods And Apparatus For Using Reduced Purity Silane To Deposit Silicon App 20090238972 - Clark; Daniel O. ;   et al. | 2009-09-24 |
Methods And Apparatus For Operating An Electronic Device Manufacturing System App 20090222128 - Clark; Daniel O. ;   et al. | 2009-09-03 |
Methods And Apparatus For Smart Abatement Using An Improved Fuel Circuit App 20090110622 - Chiu; Ho-Man Rodney ;   et al. | 2009-04-30 |
Methods And Apparatus For Starting And Operating A Thermal Abatement System App 20090098492 - Chiu; Ho-Man Rodney ;   et al. | 2009-04-16 |
Methods And Apparatus For Reducing The Consumption Of Reagents In Electronic Device Manufacturing Processes App 20090017206 - Clark; Daniel O. ;   et al. | 2009-01-15 |
Methods And Apparatus For Assembling And Operating Electronic Device Manufacturing Systems App 20080289167 - Chandler; Phil ;   et al. | 2008-11-27 |
Reactor Design To Reduce Particle Deposition During Process Abatement App 20070274876 - Chiu; Ho-Man Rodney ;   et al. | 2007-11-29 |
Safety, monitoring and control features for thermal abatement reactor App 20060104878 - Chiu; Ho-Man Rodney ;   et al. | 2006-05-18 |
Reactor design to reduce particle deposition during process abatement App 20060104879 - Chiu; Ho-Man Rodney ;   et al. | 2006-05-18 |