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Patent applications and USPTO patent grants for Jung; Claire Ching-Shan.The latest application filed is for "system and method for controlling a vapor dryer process".
Patent | Date |
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System and method for controlling a vapor dryer process Grant 6,643,952 - Murphy , et al. November 11, 2 | 2003-11-11 |
Application of ozonated DI water to scrubbers for resist strip and particle removal processes Grant 6,634,368 - Jung , et al. October 21, 2 | 2003-10-21 |
System and method for controlling a vapor dryer process App 20030056389 - Murphy, Neal T. ;   et al. | 2003-03-27 |
Application of an ozonated DI water spray to resist residue removal processes App 20020096256 - Murphy, Neal T. ;   et al. | 2002-07-25 |
Application of an ozonated DI water spray to resist residue removal processes Grant 6,387,822 - Murphy , et al. May 14, 2 | 2002-05-14 |
System and method for controlling a vapor dryer process App 20010029683 - Murphy, Neal T. ;   et al. | 2001-10-18 |
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