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Apparatus for analyte sampling, method of analyte sampling and analyte sampling analysis system Grant 10,048,173 - Jun , et al. August 14, 2 | 2018-08-14 |
Apparatus for providing sample gas and related methods Grant 9,638,609 - Jeong , et al. May 2, 2 | 2017-05-02 |
Methods of detecting inhomogeneity of a layer and apparatus for performing the same Grant 9,528,949 - Kim , et al. December 27, 2 | 2016-12-27 |
Apparatus for Analyte Sampling, Method of Analyte Sampling and Analyte Sampling Analysis System App 20160109335 - Jun; Pil-kwon ;   et al. | 2016-04-21 |
Methods of Detecting Inhomogeneity of a Layer and Apparatus for Performing the Same App 20140270078 - Kim; Jung-Hoon ;   et al. | 2014-09-18 |
Apparatus for Providing Sample Gas and Related Methods App 20140206097 - Jeong; Jong-Cheol ;   et al. | 2014-07-24 |
Semiconductor devices and methods of manufacturing the same Grant 8,455,359 - Kim , et al. June 4, 2 | 2013-06-04 |
Semiconductor Devices And Methods Of Manufacturing The Same App 20120196439 - KIM; Kook-Joo ;   et al. | 2012-08-02 |
Plating Method Using Analysis Photoresist Residue In Plating Solution App 20120183696 - Park; Jung-Dae ;   et al. | 2012-07-19 |
Method of cleaning a quartz part Grant 7,985,297 - Park , et al. July 26, 2 | 2011-07-26 |
Methods Of Manufacturing A Semiconductor Device Using Compositions For Etching Copper App 20110130000 - PARK; Jung-Dae ;   et al. | 2011-06-02 |
Methods of manufacturing a semiconductor device using compositions for etching copper Grant 7,951,653 - Park , et al. May 31, 2 | 2011-05-31 |
Composition for etching silicon oxide and method of forming a contact hole using the same App 20110073801 - Hwang; Dong-Won ;   et al. | 2011-03-31 |
Composition for etching silicon oxide and method of forming a contact hole using the same Grant 7,879,736 - Hwang , et al. February 1, 2 | 2011-02-01 |
Methods of manufacturing reference sample substrates for analyzing metal contamination levels Grant 7,811,836 - Lee , et al. October 12, 2 | 2010-10-12 |
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition Grant 7,687,448 - Park , et al. March 30, 2 | 2010-03-30 |
Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same Grant 7,678,751 - Park , et al. March 16, 2 | 2010-03-16 |
Method Of Cleaning A Quartz Part App 20100009883 - PARK; Jung-Dae ;   et al. | 2010-01-14 |
Composition For Removing A Photoresist, Method Of Preparing The Composition, Method Of Removing A Photoresist And Method Of Manufacturing A Semiconductor Device Using The Composition App 20100009885 - PARK; Jung-Dae ;   et al. | 2010-01-14 |
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition Grant 7,608,540 - Park , et al. October 27, 2 | 2009-10-27 |
Composition For Etching Silicon Oxide And Method Of Forming A Contact Hole Using The Same App 20080121622 - HWANG; Dong-Won ;   et al. | 2008-05-29 |
Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device Grant 7,311,857 - Ko , et al. December 25, 2 | 2007-12-25 |
Methods of manufacturing reference sample substrates for analyzing metal contamination levels App 20070172952 - Lee; Jae-Seok ;   et al. | 2007-07-26 |
Resist and etching by-product removing composition and resist removing method using the same Grant 7,223,721 - Park , et al. May 29, 2 | 2007-05-29 |
Cleaning solution for removing anti-reflective coating composition Grant 7,208,454 - Park , et al. April 24, 2 | 2007-04-24 |
Composition for removing photoresist and method of forming a bump electrode in a semiconductor device using the composition Grant 7,183,192 - Park , et al. February 27, 2 | 2007-02-27 |
Cleaning composition and related methods App 20070000523 - Kim; Se-Yeon ;   et al. | 2007-01-04 |
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition App 20060287207 - Park; Jung-Dae ;   et al. | 2006-12-21 |
Wafer guides for processing semiconductor substrates App 20060260149 - Jun; Pil-Kwon ;   et al. | 2006-11-23 |
Cleaning Apparatus And Method App 20060237033 - Yi; Hun-Jung ;   et al. | 2006-10-26 |
Wafer guides for processing semiconductor substrates Grant 7,100,306 - Jun , et al. September 5, 2 | 2006-09-05 |
Method of measuring a level of contamination in a chemical solution and systems thereof App 20060160239 - Lee; Sung-Jae ;   et al. | 2006-07-20 |
Method of removing a low-k layer and method of recycling a wafer using the same App 20060154484 - Hwang; Dong-Won ;   et al. | 2006-07-13 |
Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same App 20060122084 - Park; Jung-Dae ;   et al. | 2006-06-08 |
Composition for stripping photoresist and method of preparing the same Grant 7,037,852 - Park , et al. May 2, 2 | 2006-05-02 |
Wafer guides for processing semiconductor substrates App 20060027513 - Jun; Pil-Kwon ;   et al. | 2006-02-09 |
Wafer guides for processing semiconductor substrates Grant 6,959,823 - Jun , et al. November 1, 2 | 2005-11-01 |
Methods of monitoring rinsing solutions and related systems and reagents App 20050227363 - Hwang, Dong-won ;   et al. | 2005-10-13 |
Apparatus for manufacturing integrated circuit device Grant 6,905,570 - Lim , et al. June 14, 2 | 2005-06-14 |
Apparatus for drying a substrate using an isopropyl alcohol vapor Grant 6,883,248 - Ko , et al. April 26, 2 | 2005-04-26 |
Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device App 20050081883 - Ko, Yong-Kyun ;   et al. | 2005-04-21 |
Composition for removing photoresist and method of forming a bump electrode in a semiconductor device using the composition App 20050032658 - Park, Dong-Jin ;   et al. | 2005-02-10 |
Cleaning solution and method of cleaning anti-reflective coating composition using the same App 20040238012 - Park, Dong-Jin ;   et al. | 2004-12-02 |
Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatus App 20040226186 - Chon, Sang-Mun ;   et al. | 2004-11-18 |
Cleaning solution and method of cleaning anti-reflective coating composition using the same Grant 6,777,379 - Park , et al. August 17, 2 | 2004-08-17 |
Resist and etching by-product removing composition and resist removing method using the same App 20040142836 - Park, Dong-Jin ;   et al. | 2004-07-22 |
Cleaning solution and method for cleaning ceramic parts using the same App 20040060579 - Kim, Jaung-Joo ;   et al. | 2004-04-01 |
Resist and etching by-product removing composition and resist removing method using the same Grant 6,713,440 - Park , et al. March 30, 2 | 2004-03-30 |
Apparatus for drying a substrate using an isopropyl alcohol vapor App 20040045188 - Ko, Yong-Kyun ;   et al. | 2004-03-11 |
Wafer guides for processing semiconductor substrates App 20040045865 - Jun, Pil-Kwon ;   et al. | 2004-03-11 |
Apparatus for manufacturing integrated circuit device App 20040022607 - Lim, Kwang-Shin ;   et al. | 2004-02-05 |
Apparatus for drying semiconductor substrates using azeotrope effect and drying method using the apparatus App 20040010932 - Chon, Sang-Mun ;   et al. | 2004-01-22 |
System and method for drying semiconductor substrate Grant 6,655,042 - Yi , et al. December 2, 2 | 2003-12-02 |
System and method for drying semiconductor substrate App 20030106239 - Yi, Hun-jung ;   et al. | 2003-06-12 |
Method of detecting etching process end point in semiconductor fabricating equipment and detector therefor App 20030085198 - Yi, Hun Jung ;   et al. | 2003-05-08 |
Resist and etching by-product removing composition and resist removing method using the same App 20030078174 - Park, Dong-Jin ;   et al. | 2003-04-24 |
Cleaning solution and method of cleaning anti-reflective coating composition using the same App 20020166568 - Park, Dong-Jin ;   et al. | 2002-11-14 |
Photoresist stripper composition and method for stripping photoresist using the same App 20020127500 - Moon, Sang-Sik ;   et al. | 2002-09-12 |
Methods of employing aqueous cleaning compositions in manufacturing microelectronic devices Grant 6,100,203 - Kil , et al. August 8, 2 | 2000-08-08 |