| Patent | Date |
|---|
Method of inspecting surface and method of manufacturing semiconductor device
Grant 11,043,433 - Ryu , et al. June 22, 2 | 2021-06-22 |
Method of inspecting pattern defect
Grant 10,969,428 - Sohn , et al. April 6, 2 | 2021-04-06 |
Multilayer Structure Inspection Apparatus And Method, And Semiconductor Device Fabricating Method Using The Inspection Method
App 20210026152 - Ryu; Sung-yoon ; et al. | 2021-01-28 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device
App 20200203232 - RYU; Sung-yoon ; et al. | 2020-06-25 |
Defect inspection method and defect inspection apparatus
Grant 10,593,032 - Ryu , et al. | 2020-03-17 |
Scanning probe inspector
Grant 10,585,115 - Oh , et al. | 2020-03-10 |
Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same
Grant 10,527,556 - Rim , et al. J | 2020-01-07 |
Method of inspecting wafer using electron beam
Grant 10,373,796 - Kim , et al. | 2019-08-06 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device
App 20190214316 - RYU; Sung-yoon ; et al. | 2019-07-11 |
Scanning Probe Inspector
App 20190170788 - Oh; Duck Mahn ; et al. | 2019-06-06 |
Methods Of Manufacturing Vertical Semiconductor Devices
App 20190137776 - Ryu; Sung-yoon ; et al. | 2019-05-09 |
Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same
Grant 10,281,410 - Rim , et al. | 2019-05-07 |
Semiconductor Chip Inspection Device
App 20190114755 - LEE; Seong Sil ; et al. | 2019-04-18 |
Method of inspecting surface and method of manufacturing semiconductor device
Grant 10,249,544 - Ryu , et al. | 2019-04-02 |
Apparatus and method for exchanging probe
Grant 10,222,414 - Hong , et al. | 2019-03-05 |
Systems And Methods Of Testing Semiconductor Devices Using Simultaneously Scanning Of A Plurality Of Regions Therein And Methods Of Forming Semiconductor Devices Using The Same
App 20180356349 - Rim; Min Ho ; et al. | 2018-12-13 |
Optical Measuring Method And Apparatus, And Method Of Manufacturing Semiconductor Device Using The Same
App 20180340894 - RIM; Min-Ho ; et al. | 2018-11-29 |
3D profiling system of semiconductor chip and method for operating the same
Grant 10,068,324 - Kim , et al. September 4, 2 | 2018-09-04 |
Semiconductor Device Inspection Apparatus And Method Of Driving The Same
App 20180106731 - RIM; MIN HO ; et al. | 2018-04-19 |
Apparatus for inspecting wafer
Grant 9,939,388 - Leem , et al. April 10, 2 | 2018-04-10 |
Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof
Grant 9,934,939 - Kim , et al. April 3, 2 | 2018-04-03 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device
App 20180061718 - RYU; Sung-yoon ; et al. | 2018-03-01 |
Defect Inspection Method And Defect Inspection Apparatus
App 20180053295 - Ryu; Sung-Yoon ; et al. | 2018-02-22 |
Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system
Grant 9,897,552 - Kim , et al. February 20, 2 | 2018-02-20 |
Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same
Grant 9,892,983 - Kim , et al. February 13, 2 | 2018-02-13 |
Broadband light source and optical inspector having the same
Grant 9,831,626 - Ryu , et al. November 28, 2 | 2017-11-28 |
Spectral ellipsometry measurement and data analysis device and related systems and methods
Grant 9,733,178 - Ryu , et al. August 15, 2 | 2017-08-15 |
Method Of Inspecting Pattern Defect
App 20170192052 - SOHN; Young-hoon ; et al. | 2017-07-06 |
3d Profiling System Of Semiconductor Chip And Method For Operating The Same
App 20170169558 - KIM; Jung Soo ; et al. | 2017-06-15 |
Apparatus and method for inspection of substrate defect
Grant 9,678,020 - Song , et al. June 13, 2 | 2017-06-13 |
Structure Analysis Method Using A Scanning Electron Microscope
App 20170162363 - KIM; JIN KWAN ; et al. | 2017-06-08 |
Apparatus And Method For Exchanging Probe
App 20170160341 - HONG; JAE WAN ; et al. | 2017-06-08 |
Image creating method and imaging system for performing the same
Grant 9,659,743 - Kim , et al. May 23, 2 | 2017-05-23 |
Apparatus For Inspecting Wafer
App 20170115233 - LEEM; Choon-Shik ; et al. | 2017-04-27 |
Method of Inspecting Wafer Using Electron Beam
App 20160293379 - Kim; Souk ; et al. | 2016-10-06 |
Overlay measuring method and system, and method of manufacturing semiconductor device using the same
Grant 9,455,206 - Yun , et al. September 27, 2 | 2016-09-27 |
Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film
Grant 9,417,055 - Ryu , et al. August 16, 2 | 2016-08-16 |
Method And System For Detecting Defects
App 20160189369 - JUNG; Jae-Ouk ; et al. | 2016-06-30 |
Image Creating Method And Imaging System For Performing The Same
App 20160181061 - KIM; Jung-Hwan ; et al. | 2016-06-23 |
Apparatus For Forming A Thin Layer And Method Of Forming A Thin Layer On A Substrate Usnig The Same
App 20160181167 - KIM; Min-Kook ; et al. | 2016-06-23 |
Broadband Light Source And Optical Inspector Having The Same
App 20160097513 - RYU; Sung-Yoon ; et al. | 2016-04-07 |
Apparatus Of Inspecting Resistive Defects Of Semiconductor Devices And Inspecting Method Using The Same
App 20160084901 - PARK; Mi-Ra ; et al. | 2016-03-24 |
Apparatus For Measuring Thickness Of Thin Film, System Including The Apparatus, And Method For Measuring Thickness Of Thin Film
App 20160061583 - RYU; Sung-Yoon ; et al. | 2016-03-03 |
Conductive atomic force microscope and method of operating the same
Grant 9,261,532 - Kim , et al. February 16, 2 | 2016-02-16 |
Conductive Atomic Force Microscope And Method Of Operating The Same
App 20160033550 - KIM; Hyun-woo ; et al. | 2016-02-04 |
Apparatus And Method For Inspection Of Substrate Defect
App 20160025654 - SONG; Joon-Seo ; et al. | 2016-01-28 |
Spectral Ellipsometry Measurement and Data Analysis Device and Related Systems and Methods
App 20160025618 - Ryu; Sung-Yoon ; et al. | 2016-01-28 |
Optical Transformation Module And Optical Measurement System, And Method Of Manufacturing A Semiconductor Device Using Optical Transformation Module And Optical Measurement System
App 20160018328 - Kim; Tae-Joong ; et al. | 2016-01-21 |
Overlay Measuring Method And System, And Method Of Manufacturing Semiconductor Device Using The Same
App 20160013109 - YUN; Seong-Jin ; et al. | 2016-01-14 |
Process Management Systems Using Comparison Of Statistical Data To Process Parameters And Process Management Devices
App 20150248127 - Yang; Yu Sin ; et al. | 2015-09-03 |
Scanning Electron Microscope System Capable Of Measuring In-cell Overlay Offset Using High-energy Electron Beam And Method Thereof
App 20150115154 - Kim; Min Kook ; et al. | 2015-04-30 |
Method and apparatus to measure step height of device using scanning electron microscope
Grant 8,759,763 - Sohn , et al. June 24, 2 | 2014-06-24 |
Apparatus and method for manufacturing semiconductor devices through layer material dimension analysis
Grant 8,551,791 - Park , et al. October 8, 2 | 2013-10-08 |
Method And Apparatus To Measure Step Height Of Device Using Scanning Electron Microscope
App 20130234021 - Sohn; Young-Hoon ; et al. | 2013-09-12 |
Light focusing unit and spectrum measuring apparatus having the same
Grant 8,446,583 - Kim , et al. May 21, 2 | 2013-05-21 |
Method of detecting a defect on an object
Grant 8,184,899 - Yang , et al. May 22, 2 | 2012-05-22 |
Method of detecting defects in patterns on semiconductor substrate by comparing second image with reference image after acquiring second image from first image and apparatus for performing the same
Grant 8,126,258 - Yang , et al. February 28, 2 | 2012-02-28 |
Method of detecting defects of patterns on a semiconductor substrate and apparatus for performing the same
Grant 8,055,056 - Kim , et al. November 8, 2 | 2011-11-08 |
Method of analyzing a wafer sample
Grant 8,050,488 - Kim , et al. November 1, 2 | 2011-11-01 |
Method for inspection of defects on a substrate
Grant 8,034,641 - Ko , et al. October 11, 2 | 2011-10-11 |
Method For Inspection Of Defects On A Substrate
App 20110097829 - KO; Woo-seok ; et al. | 2011-04-28 |
Light focusing unit and spectrum measuring apparatus having the same
App 20100277729 - Kim; Hyun-Jong ; et al. | 2010-11-04 |
Method and apparatus for inspecting a substrate
Grant 7,747,063 - Lim , et al. June 29, 2 | 2010-06-29 |
Method Of Inspecting A Substrate
App 20100156446 - KIM; Chun-Yong ; et al. | 2010-06-24 |
Optical inspection tool having lens unit with multiple beam paths for detecting surface defects of a substrate and methods of using same
Grant 7,728,966 - Kim , et al. June 1, 2 | 2010-06-01 |
Apparatus and method for inspecting a surface of a wafer
Grant 7,697,130 - Ko , et al. April 13, 2 | 2010-04-13 |
Wafer holder and wafer conveyor equipped with the same
Grant 7,666,069 - Kim , et al. February 23, 2 | 2010-02-23 |
Apparatus and method for examining spectral characteristics of transmitted light through an object
Grant 7,646,478 - Shin , et al. January 12, 2 | 2010-01-12 |
Apparatus and method for manufacturing semiconductor devices through layer material dimension analysis
App 20090325326 - Park; Jang-Ik ; et al. | 2009-12-31 |
Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics
Grant 7,626,164 - Yoon , et al. December 1, 2 | 2009-12-01 |
Method of detecting a defect on an object
App 20090238445 - Yang; Yu-Sin ; et al. | 2009-09-24 |
Apparatus And Method For Inspecting A Surface Of A Wafer
App 20090219520 - Ko; Woo-Seok ; et al. | 2009-09-03 |
Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process
Grant 7,573,568 - Yang , et al. August 11, 2 | 2009-08-11 |
Method of inspecting a substrate using ultrasonic waves and apparatus for performing the same
Grant 7,526,959 - Kim , et al. May 5, 2 | 2009-05-05 |
Method of inspecting for defects and apparatus for performing the method
Grant 7,486,392 - Yang , et al. February 3, 2 | 2009-02-03 |
Method of classifying defects
Grant 7,446,865 - Chung , et al. November 4, 2 | 2008-11-04 |
Method and apparatus for inspecting defects in multiple regions with different parameters
Grant 7,433,032 - Kim , et al. October 7, 2 | 2008-10-07 |
Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same
Grant 7,428,328 - Jee , et al. September 23, 2 | 2008-09-23 |
Method and apparatus for inspecting target defects on a wafer
Grant 7,426,031 - Kim , et al. September 16, 2 | 2008-09-16 |
Method Of Analyzing A Wafer Sample
App 20080219547 - Kim; Jong-An ; et al. | 2008-09-11 |
Apparatus And Method For Inspecting A Wafer
App 20080186472 - Park; Jae-Woo ; et al. | 2008-08-07 |
Method and apparatus for classifying defects of an object
Grant 7,405,817 - Hyun , et al. July 29, 2 | 2008-07-29 |
Method of measuring a surface voltage of an insulating layer
Grant 7,394,279 - Lee , et al. July 1, 2 | 2008-07-01 |
Method and apparatus for inspecting substrate pattern
Grant 7,385,689 - Kim , et al. June 10, 2 | 2008-06-10 |
Method of detecting defects in patterns and apparatus for performing the same
App 20080112608 - Yang; Yu-Sin ; et al. | 2008-05-15 |
Method Of Detecting Defects Of Patterns On A Semiconductor Substrate And Apparatus For Performing The Same
App 20080107329 - Kim; Jong-An ; et al. | 2008-05-08 |
Apparatus and method for measuring a thickness of a substrate
Grant 7,355,729 - Park , et al. April 8, 2 | 2008-04-08 |
Method and apparatus for inspecting a wafer surface
Grant 7,310,140 - Eom , et al. December 18, 2 | 2007-12-18 |
Apparatus and method for inspecting a substrate
Grant 7,289,661 - Jun , et al. October 30, 2 | 2007-10-30 |
Method and apparatus for inspecting an edge exposure area of a wafer
Grant 7,280,233 - Shin , et al. October 9, 2 | 2007-10-09 |
Apparatus for monitoring a density profile of impurities
App 20070222999 - Lee; Yun-Jung ; et al. | 2007-09-27 |
Systems and methods for measuring distance of semiconductor patterns
Grant 7,274,471 - Shin , et al. September 25, 2 | 2007-09-25 |
Method and apparatus for inspecting defects
Grant 7,271,890 - Kim , et al. September 18, 2 | 2007-09-18 |
Method of measuring critical dimension
App 20070202615 - Lee; Byung-Sug ; et al. | 2007-08-30 |
Apparatus and method for examining spectral characteristics of an object
App 20070188748 - Shin; Koung-Su ; et al. | 2007-08-16 |
Method of inspecgin a leakage current characteristic of a dielectric layer
App 20070188185 - Eom; Tae-Min ; et al. | 2007-08-16 |
Method And Apparatus For Controlling Light Intensity And For Exposing A Semiconductor Substrate
App 20070190438 - KIM; Kye-Weon ; et al. | 2007-08-16 |
Wafer holder and wafer conveyor equipped with the same
App 20070190904 - Kim; Tae-Kyoung ; et al. | 2007-08-16 |
Test Pattern And Method For Measuring Silicon Etching Depth
App 20070184565 - PARK; Hwan-Shik ; et al. | 2007-08-09 |
Method Of Scanning A Substrate, And Method And Apparatus For Analyzing Crystal Characteristics
App 20070120054 - YOON; Young-Jee ; et al. | 2007-05-31 |
Wafer holder and wafer conveyor system equipped with the same
Grant 7,220,173 - Kim , et al. May 22, 2 | 2007-05-22 |
Method and apparatus for measuring thickness of metal layer
Grant 7,197,426 - Park , et al. March 27, 2 | 2007-03-27 |
Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method
Grant 7,186,280 - Eom , et al. March 6, 2 | 2007-03-06 |
Method for monitoring a density profile of impurities
Grant 7,186,577 - Jee , et al. March 6, 2 | 2007-03-06 |
Method Of Classifying Defects
App 20070041609 - CHUNG; Ki-Suk ; et al. | 2007-02-22 |
Adsorption apparatus, semiconductor device manufacturing facility comprising the same, and method of recycling perfulorocompounds
App 20070028771 - Shin; Ji-Young ; et al. | 2007-02-08 |
Method And Apparatus For Inspecting Target Defects On A Wafer
App 20070030478 - KIM; Moon-Kyung ; et al. | 2007-02-08 |
Method And Apparatus For Inspecting A Substrate
App 20070031025 - Lim; Jung-Taek ; et al. | 2007-02-08 |
Method Of Inspecting A Defect On A Substrate
App 20070030479 - PARK; Sung-Hong ; et al. | 2007-02-08 |
Method Of Inspecting A Substrate Using Ultrasonic Waves And Apparatus For Performing The Same
App 20070022815 - KIM; Kwang-Soo ; et al. | 2007-02-01 |
Method Of Measuring A Surface Voltage Of An Insulating Layer
App 20070023834 - LEE; Mi-Sung ; et al. | 2007-02-01 |
Optical Inspection Tool Having Lens Unit With Multiple Beam Paths For Detecting Surface Defects Of A Substrate And Methods Of Using Same
App 20070013901 - Kim; Jong-An ; et al. | 2007-01-18 |
Method of inspecting for defects and apparatus for performing the method
App 20070002317 - Yang; Yu-Sin ; et al. | 2007-01-04 |
Method and apparatus for inspecting a substrate
Grant 7,113,274 - Yang , et al. September 26, 2 | 2006-09-26 |
Method and apparatus for obtaining an image using a selective combination of wavelengths of light
Grant 7,081,952 - Kim , et al. July 25, 2 | 2006-07-25 |
Method of measuring and controlling concentration of dopants of a thin film
Grant 7,046,760 - Kim , et al. May 16, 2 | 2006-05-16 |
Method of inspecting defects and apparatus for performing the same
App 20060082766 - Kim; Joung-Soo ; et al. | 2006-04-20 |
Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same
Grant 7,027,638 - Jun , et al. April 11, 2 | 2006-04-11 |
Method and apparatus for measuring thickness of metal layer
App 20060052979 - Park; Jang-Ik ; et al. | 2006-03-09 |
Method and apparatus for inspecting substrate pattern
App 20060039598 - Kim; Kye-Weon ; et al. | 2006-02-23 |
Image processing method
App 20060029286 - Lim; Jung-Taek ; et al. | 2006-02-09 |
Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method
App 20060022698 - Eom; Tae-Min ; et al. | 2006-02-02 |
Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same
App 20060011837 - Jee; Yun-Jung ; et al. | 2006-01-19 |
Wafer holder and wafer conveyor system equipped with the same
App 20050221740 - Kim, Tae-Kyoung ; et al. | 2005-10-06 |
Apparatus and method for measuring substrates
App 20050191768 - Yoon, Young-Jee ; et al. | 2005-09-01 |
Method and apparatus for measuring contamination of a semiconductor substrate
Grant 6,927,077 - Eom , et al. August 9, 2 | 2005-08-09 |
Electron-beam inspection apparatus and methods of inspecting through-holes using clustered nanotube arrays
App 20050151456 - Yoon, Young-Jee ; et al. | 2005-07-14 |
Systems and methods for measuring distance of semiconductor patterns
App 20050134867 - Shin, Koung-Su ; et al. | 2005-06-23 |
Method and apparatus for inspecting defects
App 20050094137 - Kim, Joung-Soo ; et al. | 2005-05-05 |
Apparatus and method for measuring a thickness of a substrate
App 20050083539 - Park, Hwan-Shik ; et al. | 2005-04-21 |
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image
Grant 6,870,948 - Jun , et al. March 22, 2 | 2005-03-22 |
Method and apparatus for detecting contaminants in ion-implanted wafer
Grant 6,869,215 - Yang , et al. March 22, 2 | 2005-03-22 |
Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process
App 20050026054 - Yang, Yu-Sin ; et al. | 2005-02-03 |
Method for measuring step difference in a semiconductor device and apparatus for performing the same
Grant 6,850,332 - Jun , et al. February 1, 2 | 2005-02-01 |
Method and apparatus for classifying defects of an object
App 20050018182 - Hyun, Pil-Sik ; et al. | 2005-01-27 |
Method and apparatus for inspecting a wafer surface
App 20040263836 - Eom, Tae-Min ; et al. | 2004-12-30 |
Method and apparatus for monitoring a density profile of impurities
App 20040253750 - Jee, Yun-Jung ; et al. | 2004-12-16 |
Method of measuring and controlling concentration of dopants of a thin film
App 20040224428 - Kim, Tae-Kyoung ; et al. | 2004-11-11 |
Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device
Grant 6,815,236 - Kim , et al. November 9, 2 | 2004-11-09 |
Method of monitoring contact hole of integrated circuit using corona charges
Grant 6,803,241 - Eom , et al. October 12, 2 | 2004-10-12 |
Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same
Grant 6,800,863 - Jun , et al. October 5, 2 | 2004-10-05 |
Method and apparatus for inspecting an edge exposure area of a wafer
App 20040169869 - Shin, Koung-Su ; et al. | 2004-09-02 |
Method and apparatus for inspecting a substrate
App 20040169851 - Yang, Yu-Sin ; et al. | 2004-09-02 |
Method and apparatus for obtaining an image using a selective combination of wavelengths of light
App 20040109157 - Kim, Kye-Weon ; et al. | 2004-06-10 |
Method and apparatus for detecting contaminants in ion-implanted wafer
App 20040105486 - Yang, Yu-Sin ; et al. | 2004-06-03 |
Method and apparatus for measuring contamination of a semiconductor substrate
App 20040100298 - Eom, Tae-Min ; et al. | 2004-05-27 |
Method for monitoring an ion implanter and ion implanter having a shadow jig for performing the same
App 20040099818 - Jun, Chung-Sam ; et al. | 2004-05-27 |
Method of measuring a concentration of a material and method of measuring a concentration of a dopant of a semiconductor device
App 20040092046 - Kim, Tae-Kyoung ; et al. | 2004-05-13 |
Apparatus and method for inspecting a substrate
App 20040086171 - Jun, Chung-Sam ; et al. | 2004-05-06 |
Method and apparatus for analyzing a sample employing fast fourier transformation
App 20040086167 - Jun, Chung-Sam ; et al. | 2004-05-06 |
Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus
Grant 6,650,408 - Jun , et al. November 18, 2 | 2003-11-18 |
Method of monitoring contact hole of integrated circuit using corona charges
App 20030129776 - Eom, Tae-min ; et al. | 2003-07-10 |
Wafer inspection system and method for selectively inspecting conductive pattern defects
Grant 6,544,802 - Jun , et al. April 8, 2 | 2003-04-08 |
Method of and device for detecting micro-scratches
Grant 6,528,333 - Jun , et al. March 4, 2 | 2003-03-04 |
Method and apparatus for detecting thickness of thin layer formed on a wafer
Grant 6,515,293 - Jun , et al. February 4, 2 | 2003-02-04 |
Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same
App 20020172412 - Jun, Chung-sam ; et al. | 2002-11-21 |
Method of and device for detecting micro-scratches
Grant 6,449,037 - Jun , et al. September 10, 2 | 2002-09-10 |
Method for measuring step difference in a semiconductor device and apparatus for performing the same
App 20020074518 - Jun, Chung-Sam ; et al. | 2002-06-20 |
Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image
App 20020072133 - Jun, Chung-Sam ; et al. | 2002-06-13 |
Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus
App 20020063860 - Jun, Chung-Sam ; et al. | 2002-05-30 |
Apparatus and method for contact failure inspection in semiconductor devices
Grant 6,366,688 - Jun , et al. April 2, 2 | 2002-04-02 |
Method of and device for detecting micro-scratches
App 20010038448 - Jun, Chung-Sam ; et al. | 2001-11-08 |
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