Juffermans; Casparus Anthonius Henricus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Juffermans; Casparus Anthonius Henricus.The latest application filed is for "sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus".

Company Profile

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Juffermans; Casparus Anthonius Henricus - Leuven BE
Juffermans; Casparus Anthonius Henricus - Valkenswaard NL
Juffermans; Casparus Anthonius Henricus - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic method of manufacturing a device Grant 7,659,041 - Dirksen , et al. February 9, 2	2010-02-09
Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus Grant 7,599,811 - Van Hout , et al. October 6, 2	2009-10-06
Method of and system for determining the aberration of an imaging system test object and detector for use with the method Grant 7,423,739 - Dirksen , et al. September 9, 2	2008-09-09
Sensor for Lithographic Apparatus and Method of Obtaining Measurements of Lithographic Apparatus App 20070273869 - Van Hout; Frits Jurgen ; et al.	2007-11-29
Lithography system using a programmable electro-wetting mask App 20070134560 - Dirksen; Peter ; et al.	2007-06-14
Determning lithographic parameters to optimise a process window App 20060206851 - Van Wingerden; Johannes ; et al.	2006-09-14
Lithographic method of manufacturing a device App 20060160029 - Dirksen; Peter ; et al.	2006-07-20
Lithographic method of manufacturing a device Grant 7,037,626 - Dirksen , et al. May 2, 2	2006-05-02
Method of measuring the performance of a scanning electron microscope Grant 6,960,764 - Dirksen , et al. November 1, 2	2005-11-01
Method of and system for determining the aberration of an imaging system test object and detector for use with the method App 20050117148 - Dirksen, Peter ; et al.	2005-06-02
Lithographic method of manufacturing a device App 20040146808 - Dirksen, Peter ; et al.	2004-07-29
Method of manufacturing a device by means of a mask phase-shifting mask for use in said method Grant 6,544,694 - Dirksen , et al. April 8, 2	2003-04-08
Method of manufacturing a device by means of a mask phase-shifiting mask for use in said method App 20010021477 - Dirksen, Peter ; et al.	2001-09-13

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