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Patent applications and USPTO patent grants for Juffermans; Casparus A. H..The latest application filed is for "method of detecting aberrations of an optical imaging system".
Patent | Date |
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Method of detecting aberrations of an optical imaging system Grant 6,368,763 - Dirksen , et al. April 9, 2 | 2002-04-09 |
Method of detecting aberrations of an optical imaging system App 20010053489 - Dirksen, Peter ;   et al. | 2001-12-20 |
Test object for detecting aberrations of an optical imaging system App 20010023042 - Dirksen, Peter ;   et al. | 2001-09-20 |
Method of manufacturing a semiconductor device Grant 6,291,352 - Woerlee , et al. September 18, 2 | 2001-09-18 |
Method of detecting aberrations of an optical imaging system Grant 6,248,486 - Dirksen , et al. June 19, 2 | 2001-06-19 |
Method of monitoring a photolithographic process through utilization of fractional radiant energy test pattern Grant 5,866,283 - Zandbergen , et al. February 2, 1 | 1999-02-02 |
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