Juco; Eller Y.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Juco; Eller Y..The latest application filed is for "closed-loop multiple-output radio frequency (rf) matching".

Company Profile

4.10.15

Juco; Eller Y. - Tualatin OR
Juco; Eller Y. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Semiconductor wafer processing apparatus Grant D962,881 - Juco September 6, 2	2022-09-06
Closed-loop Multiple-output Radio Frequency (rf) Matching App 20220190854 - Juco; Eller Y. ; et al.	2022-06-16
Semiconductor wafer processing tool Grant D935,424 - Juco November 9, 2	2021-11-09
Radio Frequency (rf) Signal Source Supplying Rf Plasma Generator And Remote Plasma Generator App 20210257188 - JUCO; Eller Y. ; et al.	2021-08-19
Modular Recipe Controlled Calibration (mrcc) Apparatus Used To Balance Plasma In Multiple Station System App 20210202208 - Juco; Eller Y. ; et al.	2021-07-01
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system Grant 10,991,550 - Juco , et al. April 27, 2	2021-04-27
Tunable ground planes in plasma chambers Grant 10,774,423 - Janakiraman , et al. September 15, 2	2020-09-15
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System App 20200075289 - Juco; Eller Y. ; et al.	2020-03-05
Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof Grant 10,217,610 - Juco , et al. Feb	2019-02-26
Tunable Ground Planes In Plasma Chambers App 20180073142 - Janakiraman; Karthik ; et al.	2018-03-15
Tunable Ground Planes In Plasma Chambers App 20160145742 - Janakiraman; Karthik ; et al.	2016-05-26
Apparatus and method for substrate clamping in a plasma chamber Grant 9,337,072 - Balasubramanian , et al. May 10, 2	2016-05-10
Arrangements for Manipulating Plasma Confinement Within a Plasma Processing System and Methods Thereof App 20160126070 - Juco; Eller Y. ; et al.	2016-05-05
Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof Grant 9,275,838 - Juco , et al. March 1, 2	2016-03-01
Tunable Ground Planes In Plasma Chambers App 20120205046 - Janakiraman; Karthik ; et al.	2012-08-16
Apparatus And Method For Substrate Clamping In A Plasma Chamber App 20110090613 - Balasubramanian; Ganesh ; et al.	2011-04-21
Arrangements For Manipulating Plasma Confinement Within A Plasma Processing System And Methods Thereof App 20110049101 - Juco; Eller Y. ; et al.	2011-03-03
Tunable Ground Planes In Plasma Chambers App 20090236214 - Janakiraman; Karthik ; et al.	2009-09-24
Apparatus And Method For Substrate Clamping In A Plasma Chamber App 20080084650 - Balasubramanian; Ganesh ; et al.	2008-04-10
Universal mid-frequency matching network Grant 7,094,313 - Juco , et al. August 22, 2	2006-08-22
Universal mid-frquency matching network App 20050235916 - Juco, Eller Y. ; et al.	2005-10-27
Stress-tuned, single-layer silicon nitride film App 20050170104 - Jung, KeeBum ; et al.	2005-08-04

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