Jucha; Rhett B.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Jucha; Rhett B..The latest application filed is for "low particulate reliability enhanced remote microwave plasma discharge device".
- Jucha; Rhett B. - Celeste TX
| Patent | Date |
|---|---|
| Low particulate reliability enhanced remote microwave plasma discharge device Grant 5,262,610 - Huang , et al. November 16, 1 | 1993-11-16 |
| Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation Grant 5,248,636 - Davis , et al. September 28, 1 | 1993-09-28 |
| Wafer processing apparatus having independently controllable energy sources Grant 5,138,973 - Davis , et al. August 18, 1 | 1992-08-18 |
| Method for etching tungsten Grant 4,997,520 - Jucha , et al. March 5, 1 | 1991-03-05 |
| Method for etching semiconductor materials using a remote plasma generator Grant 4,988,644 - Jucha , et al. January 29, 1 | 1991-01-29 |
| Method for etching tungsten Grant 4,915,777 - Jucha , et al. April 10, 1 | 1990-04-10 |
| Processing apparatus and method Grant 4,911,103 - Davis , et al. March 27, 1 | 1990-03-27 |
| Isolation substrate ring for plasma reactor Grant 4,891,087 - Davis , et al. January 2, 1 | 1990-01-02 |
| Processing apparatus and method Grant 4,891,488 - Davis , et al. January 2, 1 | 1990-01-02 |
| Processing apparatus and method Grant 4,886,570 - Davis , et al. December 12, 1 | 1989-12-12 |
| Method for etching titanium nitride local interconnects Grant 4,878,994 - Jucha , et al. November 7, 1 | 1989-11-07 |
| Selective etching of tungsten by remote and in situ plasma generation Grant 4,874,723 - Jucha , et al. October 17, 1 | 1989-10-17 |
| Method for etch of polysilicon film Grant 4,867,841 - Loewenstein , et al. September 19, 1 | 1989-09-19 |
| Method for etching tungsten Grant 4,849,067 - Jucha , et al. July 18, 1 | 1989-07-18 |
| Method for etching tungsten Grant 4,842,687 - Jucha , et al. June 27, 1 | 1989-06-27 |
| Process for etch of tungsten Grant 4,842,676 - Jucha , et al. June 27, 1 | 1989-06-27 |
| Wafer processing apparatus and method Grant 4,842,686 - Davis , et al. June 27, 1 | 1989-06-27 |
| Method for plasma etching tungsten Grant 4,838,990 - Jucha , et al. June 13, 1 | 1989-06-13 |
| Method for etching an aluminum film doped with silicon Grant 4,828,649 - Davis , et al. May 9, 1 | 1989-05-09 |
| Processing apparatus and method Grant 4,822,450 - Davis , et al. April 18, 1 | 1989-04-18 |
| Method for cleanup processing chamber and vacuum process module Grant 4,820,377 - Davis , et al. April 11, 1 | 1989-04-11 |
| Contact etch method Grant 4,758,305 - Bonifield , et al. July 19, 1 | 1988-07-19 |
| Apparatus for plasma assisted etching Grant 4,685,999 - Davis , et al. August 11, 1 | 1987-08-11 |
| Automated single slice cassette load lock plasma reactor Grant 4,659,413 - Davis , et al. April 21, 1 | 1987-04-21 |
| Two-step plasma process for selective anisotropic etching of polycrystalline silicon without leaving residue Grant 4,502,915 - Carter , et al. March 5, 1 | 1985-03-05 |
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