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Patent applications and USPTO patent grants for Joyce; Patrick Christopher.The latest application filed is for "method and apparatus to remove additives and contaminants from a supercritical processing solution".
Patent | Date |
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Method and apparatus to remove additives and contaminants from a supercritical processing solution Grant 6,805,801 - Humayun , et al. October 19, 2 | 2004-10-19 |
Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment Grant 6,800,142 - Tipton , et al. October 5, 2 | 2004-10-05 |
Method and apparatus for radiation enhanced supercritical fluid processing Grant 6,715,498 - Humayun , et al. April 6, 2 | 2004-04-06 |
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