Patent | Date |
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Interconnect structure including airgaps and substractively etched metal lines Grant 10,727,114 - Bruce , et al. | 2020-07-28 |
Thin film interconnects with large grains Grant 10,727,121 - Bruce , et al. | 2020-07-28 |
Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrication Grant 10,643,859 - Bruce , et al. | 2020-05-05 |
Nano deposition and ablation for the repair and fabrication of integrated circuits Grant 10,607,899 - Adderly , et al. | 2020-03-31 |
Directed self-assembly for copper patterning Grant 10,600,656 - Joseph , et al. | 2020-03-24 |
Method of integrated circuit (IC) chip fabrication Grant 10,529,633 - Engelmann , et al. J | 2020-01-07 |
Spin torque MRAM fabrication using negative tone lithography and ion beam etching Grant 10,388,857 - Annunziata , et al. A | 2019-08-20 |
Method Of Integrated Circuit (ic) Chip Fabrication App 20190172762 - Engelmann; Sebastian U. ;   et al. | 2019-06-06 |
Directed Self-assembly For Copper Patterning App 20190157106 - Joseph; Eric A. ;   et al. | 2019-05-23 |
Thin Film Interconnects With Large Grains App 20190096757 - Bruce; Robert L. ;   et al. | 2019-03-28 |
Hybrid subtractive etch/metal fill process for fabricating interconnects Grant 10,236,252 - Bruce , et al. | 2019-03-19 |
Hydrofluorocarbon Gas-assisted Plasma Etch For Interconnect Fabrication App 20190013209 - Bruce; Robert L. ;   et al. | 2019-01-10 |
Spin torque MRAM fabrication using negative tone lithography and ion beam etching Grant 10,170,698 - Annunziata , et al. J | 2019-01-01 |
Wet clean process for removing C.sub.xH.sub.yF.sub.z etch residue Grant 10,167,443 - Bruce , et al. J | 2019-01-01 |
Thin film interconnects with large grains Grant 10,170,361 - Bruce , et al. J | 2019-01-01 |
Hybrid subtractive etch/metal fill process for fabricating interconnects Grant 10,128,185 - Bruce , et al. November 13, 2 | 2018-11-13 |
Interconnects fabricated by hydrofluorocarbon gas-assisted plasma etch Grant 10,121,676 - Bruce , et al. November 6, 2 | 2018-11-06 |
Interconnect Structure Including Airgaps And Substractively Etched Metal Lines App 20180204759 - BRUCE; ROBERT L. ;   et al. | 2018-07-19 |
Hydrofluorocarbon Gas-assisted Plasma Etch For Interconnect Fabrication App 20180122649 - Bruce; Robert L. ;   et al. | 2018-05-03 |
Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrication Grant 9,934,984 - Bruce , et al. April 3, 2 | 2018-04-03 |
Interconnects based on subtractive etching of silver Grant 9,911,648 - Baker-O'Neal , et al. March 6, 2 | 2018-03-06 |
Low resistance metal contacts to interconnects Grant 9,799,552 - Gates , et al. October 24, 2 | 2017-10-24 |
Selective sputtering with light mass ions to sharpen sidewall of subtractively patterned conductive metal layer Grant 9,799,519 - Joseph , et al. October 24, 2 | 2017-10-24 |
Self-aligned pitch split for unidirectional metal wiring Grant 9,786,597 - Chang , et al. October 10, 2 | 2017-10-10 |
Low resistance metal contacts to interconnects Grant 9,786,550 - Gates , et al. October 10, 2 | 2017-10-10 |
Spin Torque Mram Fabrication Using Negative Tone Lithography And Ion Beam Etching App 20170244024 - Annunziata; Anthony J. ;   et al. | 2017-08-24 |
High aspect ratio patterning of hard mask materials by organic soft masks Grant 9,728,421 - Brink , et al. August 8, 2 | 2017-08-08 |
Etch rate enhancement for a silicon etch process through etch chamber pretreatment Grant 9,711,365 - Joseph , et al. July 18, 2 | 2017-07-18 |
Spin torque MRAM fabrication using negative tone lithography and ion beam etching Grant 9,705,077 - Annunziata , et al. July 11, 2 | 2017-07-11 |
High Aspect Ratio Patterning Of Hard Mask Materials By Organic Soft Masks App 20170194161 - Brink; Markus ;   et al. | 2017-07-06 |
Low temperature encapsulation for magnetic tunnel junction Grant 9,691,972 - Annunziata , et al. June 27, 2 | 2017-06-27 |
Hybrid Subtractive Etch/metal Fill Process For Fabricating Interconnects App 20170179023 - Bruce; Robert L. ;   et al. | 2017-06-22 |
Low Temperature Encapsulation For Magnetic Tunnel Junction App 20170179194 - Annunziata; Anthony J. ;   et al. | 2017-06-22 |
Hybrid Subtractive Etch/metal Fill Process For Fabricating Interconnects App 20170154815 - Bruce; Robert L. ;   et al. | 2017-06-01 |
Hybrid subtractive etch/metal fill process for fabricating interconnects Grant 9,653,395 - Bruce , et al. May 16, 2 | 2017-05-16 |
Hybrid subtractive etch/metal fill process for fabricating interconnects Grant 9,646,881 - Bruce , et al. May 9, 2 | 2017-05-09 |
Nano Deposition And Ablation For The Repair And Fabrication Of Integrated Circuits App 20170117195 - Adderly; Shawn A. ;   et al. | 2017-04-27 |
Hydrofluorocarbon Gas-assisted Plasma Etch For Interconnect Fabrication App 20170069508 - BRUCE; ROBERT L. ;   et al. | 2017-03-09 |
Spin Torque Mram Fabrication Using Negative Tone Lithography And Ion Beam Etching App 20170062707 - Annunziata; Anthony J. ;   et al. | 2017-03-02 |
Interconnects Based On Subtractive Etching Of Silver App 20170062274 - Baker-O'Neal; Brett C. ;   et al. | 2017-03-02 |
Spin Torque Mram Fabrication Using Negative Tone Lithography And Ion Beam Etching App 20170062708 - Annunziata; Anthony J. ;   et al. | 2017-03-02 |
Nano deposition and ablation for the repair and fabrication of integrated circuits Grant 9,583,401 - Adderly , et al. February 28, 2 | 2017-02-28 |
WET CLEAN PROCESS FOR REMOVING CxHyFz ETCH RESIDUE App 20170044470 - Bruce; Robert L. ;   et al. | 2017-02-16 |
Hybrid Subtractive Etch/metal Fill Process For Fabricating Interconnects App 20170040258 - Bruce; Robert L. ;   et al. | 2017-02-09 |
Hybrid Subtractive Etch/metal Fill Process For Fabricating Interconnects App 20170040213 - Bruce; Robert L. ;   et al. | 2017-02-09 |
Hybrid Subtractive Etch/metal Fill Process For Fabricating Interconnects App 20170040257 - Bruce; Robert L. ;   et al. | 2017-02-09 |
Interconnects based on subtractive etching of silver Grant 9,564,362 - Baker-O'Neal , et al. February 7, 2 | 2017-02-07 |
Wet clean process for removing C.sub.xH.sub.yF.sub.z etch residue Grant 9,536,731 - Bruce , et al. January 3, 2 | 2017-01-03 |
Low Resistance Metal Contacts To Interconnects App 20160379869 - Gates; Stephen M. ;   et al. | 2016-12-29 |
Low Resistance Metal Contacts To Interconnects App 20160379880 - Gates; Stephen M. ;   et al. | 2016-12-29 |
Sputter etch processing for heavy metal patterning in integrated circuits Grant 9,484,220 - Hoinkis , et al. November 1, 2 | 2016-11-01 |
Self-aligned pitch split for unidirectional metal wiring Grant 9,472,499 - Chang , et al. October 18, 2 | 2016-10-18 |
Interconnects Based On Subtractive Etching Of Silver App 20160233127 - Baker-O'Neal; Brett C. ;   et al. | 2016-08-11 |
Patterning transition metals in integrated circuits Grant 9,299,639 - Cabral, Jr. , et al. March 29, 2 | 2016-03-29 |
Patterning transition metals in integrated circuits Grant 9,299,638 - Cabral, Jr. , et al. March 29, 2 | 2016-03-29 |
Sputter and surface modification etch processing for metal patterning in integrated circuits Grant 9,263,393 - Cabral, Jr. , et al. February 16, 2 | 2016-02-16 |
Thin Film Interconnects With Large Grains App 20150348832 - Bruce; Robert L. ;   et al. | 2015-12-03 |
Etch Rate Enhancement For A Silicon Etch Process Throuh Etch Chamber Pretreatment App 20150318182 - Joseph; Eric A. ;   et al. | 2015-11-05 |
Sidewall image transfer for heavy metal patterning in integrated circuits Grant 9,171,796 - Brink , et al. October 27, 2 | 2015-10-27 |
Uniform critical dimension size pore for PCRAM application Grant 9,166,165 - Breitwisch , et al. October 20, 2 | 2015-10-20 |
Sputter And Surface Modification Etch Processing For Metal Patterning In Integrated Circuits App 20150243602 - Cabral, JR.; Cyril ;   et al. | 2015-08-27 |
Nano Deposition And Ablation For The Repair And Fabrication Of Integrated Circuits App 20150228548 - Adderly; Shawn A. ;   et al. | 2015-08-13 |
Catalytic etch with magnetic direction control Grant 9,105,583 - Joseph , et al. August 11, 2 | 2015-08-11 |
Sputter and surface modification etch processing for metal patterning in integrated circuits Grant 9,064,727 - Cabral, Jr. , et al. June 23, 2 | 2015-06-23 |
WET CLEAN PROCESS FOR REMOVING CxHyFz ETCH RESIDUE App 20150118839 - Bruce; Robert L. ;   et al. | 2015-04-30 |
Borderless self-aligned metal contact patterning using printable dielectric materials Grant 9,018,090 - Chang , et al. April 28, 2 | 2015-04-28 |
Nanopore sensor device Grant 9,013,010 - Chang , et al. April 21, 2 | 2015-04-21 |
Silicide micromechanical device and methods to fabricate same Grant 8,993,907 - Guillorn , et al. March 31, 2 | 2015-03-31 |
Fabricating a small-scale radiation detector Grant 8,987,031 - Gordon , et al. March 24, 2 | 2015-03-24 |
Catalytic Etch With Magnetic Direction Control App 20150044426 - Joseph; Eric A. ;   et al. | 2015-02-12 |
High aspect ratio and reduced undercut trench etch process for a semiconductor substrate Grant 8,928,124 - Fuller , et al. January 6, 2 | 2015-01-06 |
Nanopore sensor device Grant 8,900,975 - Chang , et al. December 2, 2 | 2014-12-02 |
Pillar-based interconnects for magnetoresistive random access memory Grant 8,884,387 - Assefa , et al. November 11, 2 | 2014-11-11 |
Fabricating A Small-scale Radiation Detector App 20140329351 - GORDON; MICHAEL S. ;   et al. | 2014-11-06 |
Subtractive plasma etching of a blanket layer of metal or metal alloy Grant 8,871,107 - Fuller , et al. October 28, 2 | 2014-10-28 |
Subtractive Plasma Etching Of A Blanket Layer Of Metal Or Metal Alloy App 20140273437 - Fuller; Nicholas C. M. ;   et al. | 2014-09-18 |
Sputter Etch Processing For Heavy Metal Patterning In Integrated Circuits App 20140264861 - HOINKIS; MARK D. ;   et al. | 2014-09-18 |
Self-Aligned Pitch Split For Unidirectional Metal Wiring App 20140252630 - Chang; Josephine B. ;   et al. | 2014-09-11 |
Self-Aligned Pitch Split for Unidirectional Metal Wiring App 20140252629 - Chang; Josephine B. ;   et al. | 2014-09-11 |
Small footprint phase change memory cell Grant 8,809,828 - Breitwisch , et al. August 19, 2 | 2014-08-19 |
Pillar-based interconnects for magnetoresistive random access memory Grant 8,796,041 - Assefa , et al. August 5, 2 | 2014-08-05 |
Catalytic Etch With Magnetic Direction Control App 20140191371 - Joseph; Eric A. ;   et al. | 2014-07-10 |
Thermally insulated phase change material cells Grant 8,772,906 - BrightSky , et al. July 8, 2 | 2014-07-08 |
Nanopore Sensor Device App 20140183668 - Chang; Josephine B. ;   et al. | 2014-07-03 |
Nanopore Sensor Device App 20140183667 - Chang; Josephine B. ;   et al. | 2014-07-03 |
Small Footprint Phase Change Memory Cell App 20140166967 - Breitwisch; Matthew J. ;   et al. | 2014-06-19 |
Patterning Transition Metals In Integrated Circuits App 20140159242 - Cabral, JR.; Cyril ;   et al. | 2014-06-12 |
Patterning Transition Metals In Integrated Circuits App 20140159227 - Cabral, JR.; Cyril ;   et al. | 2014-06-12 |
Uniform Critical Dimension Size Pore For Pcram Application App 20140154862 - Breitwisch; Matthew J. ;   et al. | 2014-06-05 |
Small footprint phase change memory cell Grant 8,728,859 - Breitwisch , et al. May 20, 2 | 2014-05-20 |
Sputter And Surface Modification Etch Processing For Metal Patterning In Integrated Circuits App 20140124870 - Cabral, JR.; Cyril ;   et al. | 2014-05-08 |
Sputter And Surface Modification Etch Processing For Metal Patterning In Integrated Circuits App 20140127906 - Cabral, JR.; Cyril ;   et al. | 2014-05-08 |
Sputter And Surface Modification Etch Processing For Metal Patterning In Integrated Circuits App 20140124935 - CABRAL, JR.; CYRIL ;   et al. | 2014-05-08 |
Pore phase change material cell fabricated from recessed pillar Grant 8,686,391 - Schrott , et al. April 1, 2 | 2014-04-01 |
High aspect ratio and reduced undercut trench etch process for a semiconductor substrate Grant 8,652,969 - Fuller , et al. February 18, 2 | 2014-02-18 |
In via formed phase change memory cell with recessed pillar heater Grant 8,633,464 - Breitwisch , et al. January 21, 2 | 2014-01-21 |
Sputter and surface modification etch processing for metal patterning in integrated circuits Grant 8,633,117 - Cabral , et al. January 21, 2 | 2014-01-21 |
High Aspect Ratio And Reduced Undercut Trench Etch Process For A Semiconductor Substrate App 20130328173 - Fuller; Nicholas C. M. ;   et al. | 2013-12-12 |
Thermally Insulated Phase Change Material Cells App 20130299768 - BrightSky; Matthew J. ;   et al. | 2013-11-14 |
Thermally insulated phase change material memory cells Grant 8,536,675 - Breitwisch , et al. September 17, 2 | 2013-09-17 |
Interconnect Structure For Improved Time Dependent Dielectric Breakdown App 20130234260 - Cabral, Jr.; Cyril ;   et al. | 2013-09-12 |
Magnetic spin shift register memory Grant 8,518,718 - Joseph , et al. August 27, 2 | 2013-08-27 |
Methods to fabricate silicide micromechanical device Grant 8,470,628 - Guillorn , et al. June 25, 2 | 2013-06-25 |
Flat lower bottom electrode for phase change memory cell Grant 8,471,236 - Breitwisch , et al. June 25, 2 | 2013-06-25 |
Magnetic spin shift register memory Grant 8,467,221 - Joseph , et al. June 18, 2 | 2013-06-18 |
Thermally insulated phase material cells Grant 8,466,006 - Breitwisch , et al. June 18, 2 | 2013-06-18 |
Method for forming a self-aligned bit line for PCRAM and self-aligned etch back process Grant 8,445,313 - Breitwisch , et al. May 21, 2 | 2013-05-21 |
High Aspect Ratio And Reduced Undercut Trench Etch Process For A Semiconductor Substrate App 20130105947 - Fuller; Nicholas C. M. ;   et al. | 2013-05-02 |
Interconnect structure for improved time dependent dielectric breakdown Grant 8,431,486 - Cabral, Jr. , et al. April 30, 2 | 2013-04-30 |
Borderless Self-aligned Metal Contact Patterning Using Printable Dielectric Materials App 20130087860 - Chang; Josephine B. ;   et al. | 2013-04-11 |
Heat Shield Liner In A Phase Change Memory Cell App 20130087756 - Joseph; Eric A. ;   et al. | 2013-04-11 |
Silicide Micromechanical Device and Methods to Fabricate Same App 20130020183 - Guillorn; Michael A. ;   et al. | 2013-01-24 |
Pore Phase Change Material Cell Fabricated From Recessed Pillar App 20130001500 - Schrott; Alejandro G. ;   et al. | 2013-01-03 |
Magnetic Spin Shift Register Memory App 20130005053 - Joseph; Eric A. ;   et al. | 2013-01-03 |
Phase change memory device with plated phase change material Grant 8,344,351 - Breitwisch , et al. January 1, 2 | 2013-01-01 |
Method to reduce a via area in a phase change memory cell Grant 8,338,225 - Breitwisch , et al. December 25, 2 | 2012-12-25 |
Silicide Micromechanical Device and Methods to Fabricate Same App 20120318649 - Guillorn; Michael A. ;   et al. | 2012-12-20 |
Pore phase change material cell fabricated from recessed pillar Grant 8,330,137 - Schrott , et al. December 11, 2 | 2012-12-11 |
Pillar-based Interconnects For Magnetoresistive Random Access Memory App 20120299136 - ASSEFA; Solomon ;   et al. | 2012-11-29 |
Flat Lower Bottom Electrode For Phase Change Memory Cell App 20120280197 - Breitwisch; Matthew J. ;   et al. | 2012-11-08 |
Method For Forming A Self-aligned Bit Line For Pcram And Self-aligned Etch Back Process App 20120276688 - Breitwisch; Matthew J. ;   et al. | 2012-11-01 |
Field effect transistor having nanostructure channel Grant 8,288,236 - Chang , et al. October 16, 2 | 2012-10-16 |
Flat lower bottom electrode for phase change memory cell Grant 8,283,650 - Breitwisch , et al. October 9, 2 | 2012-10-09 |
Method for forming a self-aligned bit line for PCRAM and self-aligned etch back process Grant 8,273,598 - Breitwisch , et al. September 25, 2 | 2012-09-25 |
Method For Forming A Self-aligned Bit Line For Pcram And Self-aligned Etch Back Process App 20120202333 - Breitwisch; Matthew J. ;   et al. | 2012-08-09 |
Thermally Insulated Phase Material Cells App 20120129313 - Breitwisch; Matthew J. ;   et al. | 2012-05-24 |
Thermally Insulated Phase Change Material Memory Cells App 20120126194 - Breitwisch; Matthew J. ;   et al. | 2012-05-24 |
Method To Reduce A Via Area In A Phase Change Memory Cell App 20120115302 - Breitwisch; Matthew J. ;   et al. | 2012-05-10 |
In Via Formed Phase Change Memory Cell With Recessed Pillar Heater App 20120112154 - Breitwisch; Matthew J. ;   et al. | 2012-05-10 |
Field Effect Transistor Having Nanostructure Channel App 20120108024 - Chang; Josephine B. ;   et al. | 2012-05-03 |
Thermally insulated phase change material memory cells with pillar structure Grant 8,138,056 - Breitwisch , et al. March 20, 2 | 2012-03-20 |
Nanoscale electrodes for phase change memory devices Grant 8,119,528 - Schrott , et al. February 21, 2 | 2012-02-21 |
Interconnect Structure For Improved Time Dependent Dielectric Breakdown App 20120038056 - Cabral, JR.; Cyril ;   et al. | 2012-02-16 |
One-mask Phase Change Memory Process Integration App 20120037877 - Breitwisch; Matthew J. ;   et al. | 2012-02-16 |
In via formed phase change memory cell with recessed pillar heater Grant 8,105,859 - Breitwisch , et al. January 31, 2 | 2012-01-31 |
Method to reduce a via area in a phase change memory cell Grant 8,101,456 - Breitwisch , et al. January 24, 2 | 2012-01-24 |
Magnetic Spin Shift Register Memory App 20120008362 - Joseph; Eric A. ;   et al. | 2012-01-12 |
Phase Change Memory Device With Plated Phase Change Material App 20110240944 - Breitwisch; Matthew J. ;   et al. | 2011-10-06 |
Phase change memory device with plated phase change material Grant 8,030,130 - Breitwisch , et al. October 4, 2 | 2011-10-04 |
Pore Phase Change Material Cell Fabricated From Recessed Pillar App 20110186800 - Schrott; Alejandro G. ;   et al. | 2011-08-04 |
Self aligned ring electrodes Grant 7,981,755 - Breitwisch , et al. July 19, 2 | 2011-07-19 |
Etching of tungsten selective to titanium nitride Grant 7,972,966 - Breitwisch , et al. July 5, 2 | 2011-07-05 |
Pore phase change material cell fabricated from recessed pillar Grant 7,960,203 - Schrott , et al. June 14, 2 | 2011-06-14 |
Field Effect Transistor Having Nanostructure Channel App 20110127492 - Chang; Josephine B. ;   et al. | 2011-06-02 |
Phase change memory with tapered heater Grant 7,910,911 - Breitwisch , et al. March 22, 2 | 2011-03-22 |
Phase change memory with tapered heater Grant 7,906,368 - Breitwisch , et al. March 15, 2 | 2011-03-15 |
In Via Formed Phase Change Memory Cell With Recessed Pillar Heater App 20110057162 - Breitwisch; Matthew J. ;   et al. | 2011-03-10 |
Flat Lower Bottom Electrode For Phase Change Memory Cell App 20110049462 - Breitwisch; Matthew J. ;   et al. | 2011-03-03 |
Pillar-based Interconnects For Magnetoresistive Random Access Memory App 20110049655 - Assefa; Solomon ;   et al. | 2011-03-03 |
Phase Change Memory Device With Plated Phase Change Material App 20110037042 - Breitwisch; Matthew J. ;   et al. | 2011-02-17 |
Thermally Insulated Phase Change Material Cells App 20110001111 - Breitwisch; Matthew J. ;   et al. | 2011-01-06 |
Phase change material with filament electrode Grant 7,851,323 - Breitwisch , et al. December 14, 2 | 2010-12-14 |
Etching Of Tungsten Selective To Titanium Nitride App 20100297848 - Breitwisch; Matthew J. ;   et al. | 2010-11-25 |
Programmable-resistance memory cell Grant 7,834,339 - Bednorz , et al. November 16, 2 | 2010-11-16 |
Method and apparatus for fabricating sub-lithography data tracks for use in magnetic shift register memory devices Grant 7,755,921 - Assefa , et al. July 13, 2 | 2010-07-13 |
Method of forming ring electrode Grant 7,709,325 - Joseph , et al. May 4, 2 | 2010-05-04 |
Method To Reduce A Via Area In A Phase Change Memory Cell App 20100078617 - Breitwisch; Matthew J. ;   et al. | 2010-04-01 |
Method To Reduce Reset Current Of Pcm Using Stress Liner Layers App 20100078621 - Breitwisch; Mathew J. ;   et al. | 2010-04-01 |
Nanoscale Electrodes for Phase Change Memory Devices App 20100048020 - Schrott; Alejandro G. ;   et al. | 2010-02-25 |
Phase Change Memory With Tapered Heater App 20090289242 - Breitwisch; Matthew ;   et al. | 2009-11-26 |
Phase Change Material With Filament Electrode App 20090275168 - Breitwisch; Matthew J. ;   et al. | 2009-11-05 |
Method Of Forming Ring Electrode App 20090227066 - Joseph; Eric A. ;   et al. | 2009-09-10 |
Pore Phase Change Material Cell Fabricated From Recessed Pillar App 20090189139 - Schrott; Alejandro G. ;   et al. | 2009-07-30 |
Method To Enhance Performance Of Complex Metal Oxide Programmable Memory App 20090186443 - Joseph; Eric A. ;   et al. | 2009-07-23 |
Phase change material with filament electrode Grant 7,560,721 - Breitwisch , et al. July 14, 2 | 2009-07-14 |
Self Aligned Ring Electrodes App 20090111228 - Breitwisch; Matthew J. ;   et al. | 2009-04-30 |
Method And Apparatus For Fabricating Sub-lithography Data Tracks For Use In Magnetic Shift Register Memory Devices App 20090046493 - ASSEFA; SOLOMON ;   et al. | 2009-02-19 |
Phase change memory cell with electrode Grant 7,485,487 - Breitwisch , et al. February 3, 2 | 2009-02-03 |
Phase Change Memory with Tapered Heater App 20090001341 - Breitwisch; Matthew ;   et al. | 2009-01-01 |
Programmable-resistance Memory Cell App 20080142925 - Bednorz; Johannes G. ;   et al. | 2008-06-19 |
Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography Grant 6,803,661 - Thakar , et al. October 12, 2 | 2004-10-12 |
Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography App 20040092089 - Thakar, Gautam V. ;   et al. | 2004-05-13 |
Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography Grant 6,624,068 - Thakar , et al. September 23, 2 | 2003-09-23 |
Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography App 20030040179 - Thakar, Gautam V. ;   et al. | 2003-02-27 |