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Patent applications and USPTO patent grants for Jones; Oliver David.The latest application filed is for "wafer drying apparatus and method".
Patent | Date |
---|---|
Integrated substrate processing system Grant 6,637,446 - Frost , et al. October 28, 2 | 2003-10-28 |
Disk cascade scrubber Grant 6,625,835 - Frost , et al. September 30, 2 | 2003-09-30 |
Wafer drying apparatus and method Grant 6,615,510 - Jones , et al. September 9, 2 | 2003-09-09 |
Method for performing two wafer preparation operations on vertically oriented semiconductor wafer in single enclosure Grant 6,616,509 - Frost , et al. September 9, 2 | 2003-09-09 |
Wafer drying apparatus and method App 20030000102 - Jones, Oliver David ;   et al. | 2003-01-02 |
Integrated substrate processing system App 20020184720 - Frost, David T. ;   et al. | 2002-12-12 |
Wafer preparation systems and methods for preparing wafers Grant 6,482,678 - Frost , et al. November 19, 2 | 2002-11-19 |
Apparatus for drying batches of disks Grant 6,477,786 - Jones , et al. November 12, 2 | 2002-11-12 |
Substrate processing in an immersion, scrub and dry system Grant 6,457,199 - Frost , et al. October 1, 2 | 2002-10-01 |
Disk drying apparatus and method Grant 6,446,355 - Jones , et al. September 10, 2 | 2002-09-10 |
Self-aligning cylindrical mandrel assembly and wafer preparation apparatus including the same Grant 6,427,566 - Jones , et al. August 6, 2 | 2002-08-06 |
Robot end-effector cleaner and dryer Grant 6,213,136 - Jones April 10, 2 | 2001-04-10 |
Method of cleaning semiconductor wafers and other substrates Grant 6,143,089 - Stephens , et al. November 7, 2 | 2000-11-07 |
Apparatus for cleaning robot end effector Grant 6,024,107 - Jones February 15, 2 | 2000-02-15 |
Method of drying a wafer Grant 6,012,470 - Jones January 11, 2 | 2000-01-11 |
Wafer spin dryer and method of drying a wafer Grant 5,778,554 - Jones | 1998-07-14 |
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