Patent | Date |
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Multiple wavelength ellipsometer system and related method Grant 9,354,118 - Johs , et al. May 31, 2 | 2016-05-31 |
In line ellipsometer system and method of use Grant 9,347,768 - Pfeiffer , et al. May 24, 2 | 2016-05-24 |
Multiple Wavelength Ellipsometer System and Related Method App 20150219497 - Johs; Blaine D. ;   et al. | 2015-08-06 |
System and method of aligning a sample Grant 8,638,437 - Liphardt , et al. January 28, 2 | 2014-01-28 |
Ellipsometers and polarimeters comprising polarization state compensating beam directing sample wobble compensating system, and method of use Grant 8,467,057 - Johs , et al. June 18, 2 | 2013-06-18 |
Mounting for deviation angle self compensating substantially achromatic retarder Grant 8,462,341 - He , et al. June 11, 2 | 2013-06-11 |
Mapping ellipsometers and polarimeters comprising polarization state compensating beam directing means, and method of use Grant 8,339,603 - Liphardt , et al. December 25, 2 | 2012-12-25 |
Sample mapping in environmental chamber Grant 8,248,606 - Liphardt , et al. August 21, 2 | 2012-08-21 |
Empirical correction for spectroscopic ellipsometric measurements of rough or textured surfaces Grant 8,248,607 - Herzinger , et al. August 21, 2 | 2012-08-21 |
Method of improving ellipsometric and the like data Grant 8,223,334 - Johs , et al. July 17, 2 | 2012-07-17 |
System and method of aligning a sample App 20120092653 - Liphardt; Martin M. ;   et al. | 2012-04-19 |
Sample investigating system and method of use Grant 8,159,672 - Liphardt , et al. April 17, 2 | 2012-04-17 |
System and method of aligning a sample Grant 8,064,055 - Liphardt , et al. November 22, 2 | 2011-11-22 |
Spatial filter in sample investigation system Grant 8,013,996 - Liphardt , et al. September 6, 2 | 2011-09-06 |
Mounting for deviation angle self compensating substantially achromatic retarder App 20110188040 - He; Ping ;   et al. | 2011-08-04 |
Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation Grant 7,907,280 - Johs , et al. March 15, 2 | 2011-03-15 |
System and method of controlling intensity of an electromagnetic beam Grant 7,796,260 - Johs , et al. September 14, 2 | 2010-09-14 |
Automated ellipsometer and the like systems Grant 7,746,472 - Johs , et al. June 29, 2 | 2010-06-29 |
Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems Grant 7,746,471 - Johs , et al. June 29, 2 | 2010-06-29 |
Method of determining substrate etch depth Grant 7,705,995 - Johs , et al. April 27, 2 | 2010-04-27 |
Spectroscopic ellipsometer and polarimeter systems Grant 7,633,625 - Woollam , et al. December 15, 2 | 2009-12-15 |
Sample investigating system Grant 7,623,237 - Liphardt , et al. November 24, 2 | 2009-11-24 |
Spectroscopic ellipsometer and polarimeter systems Grant 7,616,319 - Woollam , et al. November 10, 2 | 2009-11-10 |
Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation Grant 7,554,662 - Liphardt , et al. June 30, 2 | 2009-06-30 |
Beam chromatic shifting and directing means Grant 7,535,566 - Johs , et al. May 19, 2 | 2009-05-19 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths Grant 7,522,279 - Liphardt , et al. April 21, 2 | 2009-04-21 |
Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation App 20090091758 - Johs; Blaine D. ;   et al. | 2009-04-09 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths Grant 7,508,510 - Pfeiffer , et al. March 24, 2 | 2009-03-24 |
Automated ellipsometer and the like systems Grant 7,505,134 - Johs , et al. March 17, 2 | 2009-03-17 |
Discrete polarization state spectroscopic ellipsometer system and method of use Grant 7,492,455 - Johs , et al. February 17, 2 | 2009-02-17 |
Ellipsometric investigation of very thin films Grant 7,483,148 - Johs January 27, 2 | 2009-01-27 |
Rotating compensator ellipsometer system with spatial filter equivalent Grant 7,468,794 - Liphardt , et al. December 23, 2 | 2008-12-23 |
Deviation angle self compensating substantially achromatic retarder Grant 7,460,230 - Johs , et al. December 2, 2 | 2008-12-02 |
Deviation angle self compensating substantially achromatic retarder Grant 7,450,231 - Johs , et al. November 11, 2 | 2008-11-11 |
Sample analysis methodology utilizing electromagnetic radiation Grant 7,385,697 - Woollam , et al. June 10, 2 | 2008-06-10 |
Deviation angle self compensating substantially achromatic retarder App 20080100842 - Johs; Blaine D. ;   et al. | 2008-05-01 |
Method of determining initial thickness value for sample surface layer, and use of splines for fitting ellipsometric data Grant 7,362,435 - Johs , et al. April 22, 2 | 2008-04-22 |
System for reducing stress induced effects during determination of fluid optical constants Grant 7,349,092 - Tiwald , et al. March 25, 2 | 2008-03-25 |
Control of beam spot size in ellipsometer and the like systems Grant 7,345,762 - Liphardt , et al. March 18, 2 | 2008-03-18 |
Spectroscopic ellipsometer and polarimeter systems Grant 7,336,361 - Liphardt , et al. February 26, 2 | 2008-02-26 |
Spectrophotometer, ellipsometer, polarimeter and the like systems Grant 7,327,456 - Woollam , et al. February 5, 2 | 2008-02-05 |
Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples Grant 7,317,529 - Liphardt , et al. January 8, 2 | 2008-01-08 |
Method of reducing the effect of noise in determining the value of a dependent variable Grant 7,307,724 - Liphardt , et al. December 11, 2 | 2007-12-11 |
Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence Grant 7,304,737 - Liphardt , et al. December 4, 2 | 2007-12-04 |
Control of uncertain angle of incidence of beam from Arc lamp Grant 7,301,631 - Johs , et al. November 27, 2 | 2007-11-27 |
Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters Grant 7,295,313 - Johs , et al. November 13, 2 | 2007-11-13 |
Deviation angle self compensating substantially achromatic retarder App 20070253059 - Johs; Blaine D. ;   et al. | 2007-11-01 |
Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface Grant 7,283,234 - Woollam , et al. October 16, 2 | 2007-10-16 |
Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems Grant 7,277,171 - Johs , et al. October 2, 2 | 2007-10-02 |
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems Grant 7,274,450 - Green , et al. September 25, 2 | 2007-09-25 |
General virtual interface algorithm for in-situ spectroscopic ellipsometric data analysis Grant 7,268,876 - Johs September 11, 2 | 2007-09-11 |
Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like Grant 7,265,838 - Johs , et al. September 4, 2 | 2007-09-04 |
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter Grant 7,245,376 - Liphardt , et al. July 17, 2 | 2007-07-17 |
Control of beam spot size in ellipsometer and the like systems Grant 7,215,423 - Liphardt , et al. May 8, 2 | 2007-05-08 |
Broadband ellipsometer or polarimeter system including at least one multiple element lens Grant 7,215,424 - Liphardt , et al. May 8, 2 | 2007-05-08 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths App 20070097373 - Pfeiffer; Galen L. ;   et al. | 2007-05-03 |
Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses Grant 7,193,710 - Johs , et al. March 20, 2 | 2007-03-20 |
Ellipsometric investigation of thin films Grant 7,193,709 - Johs , et al. March 20, 2 | 2007-03-20 |
Dielectric function of thin metal films determined by combined transmission spectroscopic ellipsometry and intensity measurements Grant 7,167,241 - Johs , et al. January 23, 2 | 2007-01-23 |
Spectroscopic ellipsometer and polarimeter systems Grant 7,158,231 - Woollam , et al. January 2, 2 | 2007-01-02 |
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter App 20060268272 - Liphardt; Martin M. ;   et al. | 2006-11-30 |
System and method for setting and compensating errors in AOI and POI of a beam of EM radiation Grant 7,136,172 - Johs , et al. November 14, 2 | 2006-11-14 |
Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means Grant 7,099,006 - Johs , et al. August 29, 2 | 2006-08-29 |
Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration Grant 7,075,649 - Johs , et al. July 11, 2 | 2006-07-11 |
Discrete polarization state spectroscopic ellipsometer system and method of use Grant 7,075,650 - Johs , et al. July 11, 2 | 2006-07-11 |
System for and method of investigating the exact same point on a sample substrate with at least two wavelengths Grant 7,057,717 - Liphardt , et al. June 6, 2 | 2006-06-06 |
Tracking temperature change in birefringent materials Grant 7,025,501 - Johs , et al. April 11, 2 | 2006-04-11 |
Spectrophotometer, ellipsometer, polarimeter and the like systems Grant 6,982,792 - Woollam , et al. January 3, 2 | 2006-01-03 |
Functional equivalent to spatial filter in ellipsometer and the like systems Grant 6,950,182 - Liphardt , et al. September 27, 2 | 2005-09-27 |
Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters Grant 6,940,595 - Johs , et al. September 6, 2 | 2005-09-06 |
System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation Grant 6,937,341 - Woollam , et al. August 30, 2 | 2005-08-30 |
Spatial filter source beam conditioning in ellipsometer and the like systems Grant 6,930,813 - Liphardt , et al. August 16, 2 | 2005-08-16 |
Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems Grant 6,859,278 - Johs , et al. February 22, 2 | 2005-02-22 |
Sample analysis methodology utilizing electromagnetic radiation App 20040257567 - Woollam, John A. ;   et al. | 2004-12-23 |
Tracking temperature change in birefringent materials App 20040258128 - Johs, Blaine D. ;   et al. | 2004-12-23 |
Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system Grant 6,822,738 - Johs , et al. November 23, 2 | 2004-11-23 |
Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry Grant 6,804,004 - Johs , et al. October 12, 2 | 2004-10-12 |
Odd bounce image rotation system in ellipsometer systems Grant 6,795,184 - Herzinger , et al. September 21, 2 | 2004-09-21 |
Spectroscopic ellipsometry analysis of object coatings during deposition Grant 6,741,353 - Johs May 25, 2 | 2004-05-25 |
Application of spectroscopic ellipsometry to in situ real time fabrication of multiple alternating high/low refractive index narrow bandpass optical filters Grant 6,636,309 - Johs , et al. October 21, 2 | 2003-10-21 |
System and method of improving electromagnetic radiation beam characteristics in ellipsometer and the like systems Grant 6,590,655 - Welch , et al. July 8, 2 | 2003-07-08 |
Rotating compensator ellipsometer system with spatial filter Grant 6,456,376 - Liphardt , et al. September 24, 2 | 2002-09-24 |
Spatial filter source beam conditioning in ellipsometer and the like systems App 20010046089 - Liphardt, Martin M. ;   et al. | 2001-11-29 |
System and method of improving electromagnetic radiation beam characteristics in ellipsometer and the like systems App 20010033377 - Welch, James D. ;   et al. | 2001-10-25 |
Combined polychromatic electromagnetic beam source system with application to ellipsometers, spectrophotometers and polarimeters Grant 6,268,917 - Johs July 31, 2 | 2001-07-31 |
Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and polarimeter systems Grant 6,118,537 - Johs , et al. September 12, 2 | 2000-09-12 |
Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems Grant 6,084,675 - Herzinger , et al. July 4, 2 | 2000-07-04 |
Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for window retardence, in ellipsometer and polarimeter systems Grant 6,034,777 - Johs , et al. March 7, 2 | 2000-03-07 |
Beam folding optics system and method of use with application in ellipsometry and polarimetry Grant 5,969,818 - Johs , et al. October 19, 1 | 1999-10-19 |
Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems Grant 5,963,327 - He , et al. October 5, 1 | 1999-10-05 |
Dual vertically oriented triangular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems Grant 5,963,325 - Johs , et al. October 5, 1 | 1999-10-05 |
System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems Grant 5,956,145 - Green , et al. September 21, 1 | 1999-09-21 |
Optical elements for use in spectroscopic ellipsometer and polarimeter systems Grant 5,946,098 - Johs , et al. August 31, 1 | 1999-08-31 |
Analysis of partially polarized electromagnetic radiation in ellipsometer and polarimeter systems Grant 5,936,734 - Johs , et al. August 10, 1 | 1999-08-10 |
Regression calibrated spectroscopic rotating compensator ellipsometer system with photo array detector Grant 5,872,630 - Johs , et al. February 16, 1 | 1999-02-16 |
Multiple order dispersive optics system and method of use Grant 5,805,285 - Johs , et al. September 8, 1 | 1998-09-08 |
System and method for improving data acquisition capability in spectroscopic ellipsometers Grant 5,757,494 - Green , et al. May 26, 1 | 1998-05-26 |
Infrared ellipsometer/polarimeter system, method of calibration, and use thereof Grant 5,706,212 - Thompson , et al. January 6, 1 | 1998-01-06 |
Multiple order dispersive optics system and method of use Grant 5,666,201 - Johs , et al. September 9, 1 | 1997-09-09 |
Ellipsometer Grant 5,657,126 - Ducharme , et al. August 12, 1 | 1997-08-12 |
Ellipsometer/polarimeter based process monitor and control system suitable for simultaneous retrofit on molecular beam epitaxy system RHEED/LEED interface system, and method of use Grant 5,582,646 - Woollam , et al. December 10, 1 | 1996-12-10 |
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system Grant 5,521,706 - Green , et al. May 28, 1 | 1996-05-28 |
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system Grant 5,504,582 - Johs , et al. April 2, 1 | 1996-04-02 |
Small modulation ellipsometry Grant 5,416,588 - Ducharme , et al. May 16, 1 | 1995-05-16 |
Ellipsometer Grant 5,373,359 - Woollam , et al. December 13, 1 | 1994-12-13 |