| Patent | Date |
|---|
Sequential Application Of Cleaning Fluids For Improved Maintenance Of Chemical Mechanical Polishing Systems
App 20220118583 - OH; Jeonghoon ; et al. | 2022-04-21 |
Pedestal lift for semiconductor processing chambers
Grant 11,251,067 - West , et al. February 15, 2 | 2022-02-15 |
Apparatus for exhaust cooling
Grant 11,114,285 - Cox , et al. September 7, 2 | 2021-09-07 |
Smart chamber and smart chamber components
Grant 10,930,479 - Binns , et al. February 23, 2 | 2021-02-23 |
Pedestal Lift For Semiconductor Processing Chambers
App 20200343126 - WEST; Brian T. ; et al. | 2020-10-29 |
Chemical Mechanical Polishing System With Platen Temperature Control
App 20200246935 - Kind Code | 2020-08-06 |
Smart Chamber And Smart Chamber Components
App 20190096643 - BINNS; Simon Nicholas ; et al. | 2019-03-28 |
Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
Grant 10,176,973 - Cox , et al. J | 2019-01-08 |
Smart chamber and smart chamber components
Grant 10,153,143 - Binns , et al. Dec | 2018-12-11 |
Apparatus For Exhaust Cooling
App 20170301524 - COX; Michael S. ; et al. | 2017-10-19 |
Encapsulated magnetron
Grant 9,754,771 - West , et al. September 5, 2 | 2017-09-05 |
Hall Effect Enhanced Capacitively Coupled Plasma Source, An Abatement System, And Vacuum Processing System
App 20170133208 - COX; Michael S. ; et al. | 2017-05-11 |
Abatement system having a plasma source
Grant 9,552,967 - Cox , et al. January 24, 2 | 2017-01-24 |
Capacitively coupled plasma source for abating compounds produced in semiconductor processes
Grant 9,543,124 - Cox , et al. January 10, 2 | 2017-01-10 |
Hall Effect Enhanced Capacitively Coupled Plasma Source, An Abatement System, And Vacuum Processing
App 20160133442 - COX; Michael S. ; et al. | 2016-05-12 |
Hall Effect Enhanced Capacitively Coupled Plasma Source
App 20160118226 - Cox; Michael S. ; et al. | 2016-04-28 |
Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
Grant 9,240,308 - Cox , et al. January 19, 2 | 2016-01-19 |
Hall effect enhanced capacitively coupled plasma source
Grant 9,230,780 - Cox , et al. January 5, 2 | 2016-01-05 |
Smart Chamber And Smart Chamber Components
App 20150262798 - BINNS; Simon Nicholas ; et al. | 2015-09-17 |
Hall Effect Enhanced Capacitively Coupled Plasma Source, An Abatement System, And Vacuum Processing System
App 20150255256 - COX; Michael S. ; et al. | 2015-09-10 |
Hall Effect Enhanced Capacitively Coupled Plasma Source
App 20150255251 - COX; Michael S. ; et al. | 2015-09-10 |
Encapsulated Magnetron
App 20150048735 - WEST; Brian T. ; et al. | 2015-02-19 |
Methods and apparatus for assembling and operating electronic device manufacturing systems
Grant 8,455,368 - Chandler , et al. June 4, 2 | 2013-06-04 |
Methods And Apparatus For Assembling And Operating Electronic Device Manufacturing Systems
App 20080289167 - Chandler; Phil ; et al. | 2008-11-27 |
Synchronized zoom electronic camera system
Grant 5,329,325 - McClellan , et al. July 12, 1 | 1994-07-12 |
Identification system for automated film and order processing including machine and human readable code
Grant 5,294,950 - DuVall , et al. March 15, 1 | 1994-03-15 |
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