Johnson; Kenneth Carlisle
Patent Applications and Registrations
Patent applications and USPTO patent grants for Johnson; Kenneth Carlisle.The latest application filed is for "euv lithography system with diffraction optics".
- Johnson; Kenneth Carlisle - Santa Clara CA US
| Patent | Date |
|---|---|
| EUV Lithography System with Diffraction Optics App 20220107568 - Johnson; Kenneth Carlisle | 2022-04-07 |
| Actinic, spot-scanning microscope for EUV mask inspection and metrology Grant 10,025,079 - Johnson July 17, 2 | 2018-07-17 |
| Actinic, Spot-Scanning Microscope for EUV Mask Inspection and Metrology App 20170090172 - Johnson; Kenneth Carlisle | 2017-03-30 |
| Phase-measuring microlens microscopy Grant 6,392,752 - Johnson May 21, 2 | 2002-05-21 |
| Dual-flexure light valve Grant 6,301,000 - Johnson October 9, 2 | 2001-10-09 |
| Bigrating light valve Grant 6,188,519 - Johnson February 13, 2 | 2001-02-13 |
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