| Patent | Date |
|---|
Systems and methods for a four-mass vibrating MEMS structure
Grant 10,371,521 - Johnson | 2019-08-06 |
Systems And Methods For A Tuned Mass Damper In Mems Resonators
App 20180231090 - Gnerlich; Markus Hans ; et al. | 2018-08-16 |
Systems And Methods For A Four-mass Vibrating Mems Structure
App 20180231384 - Johnson; Burgess R. | 2018-08-16 |
All-silicon electrode capacitive transducer on a glass substrate
Grant 9,837,935 - Johnson , et al. December 5, 2 | 2017-12-05 |
Hemitoroidal resonator gyroscope
Grant 9,534,925 - Horning , et al. January 3, 2 | 2017-01-03 |
Mass-loaded Coriolis Vibratory Gyroscope
App 20150330782 - Johnson; Burgess R. ; et al. | 2015-11-19 |
Two degree of freedom dithering platform for MEMS sensor calibration
Grant 9,061,891 - Supino , et al. June 23, 2 | 2015-06-23 |
All-silicon Electrode Capacitive Transducer On A Glass Substrate
App 20150115770 - Johnson; Burgess R. ; et al. | 2015-04-30 |
Two Degree Of Freedom Dithering Platform For Mems Sensor Calibration
App 20150024534 - Supino; Ryan ; et al. | 2015-01-22 |
Two degree of freedom dithering platform for MEMS sensor calibration
Grant 8,887,550 - Supino , et al. November 18, 2 | 2014-11-18 |
Systems and methods for an encoder and control scheme
Grant 8,847,143 - Cabuz , et al. September 30, 2 | 2014-09-30 |
Hemitoroidal Resonator Gyroscope
App 20140068931 - Horning; Robert D. ; et al. | 2014-03-13 |
MEMS gyroscope magnetic sensitivity reduction
Grant 8,664,951 - Johnson , et al. March 4, 2 | 2014-03-04 |
Hemitoroidal resonator gyroscope
Grant 8,631,702 - Horning , et al. January 21, 2 | 2014-01-21 |
Two Degree Of Freedom Dithering Platform For Mems Sensor Calibration
App 20120272731 - Supino; Ryan ; et al. | 2012-11-01 |
Systems And Methods For An Encoder And Control Scheme
App 20120272730 - Cabuz; Eugen ; et al. | 2012-11-01 |
Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
Grant 8,146,424 - Johnson , et al. April 3, 2 | 2012-04-03 |
Hemitoroidal Resonator Gyroscope
App 20110290021 - Horning; Robert D. ; et al. | 2011-12-01 |
Parametric amplification of a MEMS gyroscope by capacitance modulation
Grant 8,037,757 - Johnson October 18, 2 | 2011-10-18 |
Mems Gyroscope Magnetic Sensitivity Reduction
App 20100244819 - Johnson; Burgess R. ; et al. | 2010-09-30 |
Systems And Methods For An Inertial Sensor Suspension That Minimizes Proof Mass Rotation
App 20100147073 - Johnson; Burgess R. ; et al. | 2010-06-17 |
Parametric Amplification Of A Mems Gyroscope By Capacitance Modulation
App 20090320591 - Johnson; Burgess R. | 2009-12-31 |
Force rebalancing for MEMS inertial sensors using time-varying voltages
Grant 7,444,868 - Johnson November 4, 2 | 2008-11-04 |
Force rebalancing and parametric amplification of MEMS inertial sensors
Grant 7,444,869 - Johnson , et al. November 4, 2 | 2008-11-04 |
Force Rebalancing And Parametric Amplification Of Mems Inertial Sensors
App 20080236280 - Johnson; Burgess R. ; et al. | 2008-10-02 |
Force Rebalancing For Mems Inertial Sensors Using Time-varying Voltages
App 20080000296 - Johnson; Burgess R. | 2008-01-03 |
MEMS device with thinned comb fingers
Grant 7,258,010 - Horning , et al. August 21, 2 | 2007-08-21 |
MEMS device with thinned comb fingers
App 20060201249 - Horning; Robert D. ; et al. | 2006-09-14 |
MEMS gyroscope with horizontally oriented drive electrodes
Grant 7,036,373 - Johnson , et al. May 2, 2 | 2006-05-02 |
MEMS gyroscope with horizontally oriented drive electrodes
App 20050284222 - Johnson, Burgess R. ; et al. | 2005-12-29 |
Methods and systems for simultaneously fabricating multi-frequency MEMS devices
Grant 6,978,673 - Johnson , et al. December 27, 2 | 2005-12-27 |
Methods and systems for controlling movement within MEMS structures
Grant 6,860,151 - Platt , et al. March 1, 2 | 2005-03-01 |
Free piston piezoelectric generator
App 20040178702 - Bonne, Ulrich ; et al. | 2004-09-16 |
Methods and systems for controlling movement within MEMS structures
App 20040154397 - Platt, William P. ; et al. | 2004-08-12 |
Methods and systems for simultaneously fabricating multi-frequency MEMS devices
App 20040154400 - Johnson, Burgess R. ; et al. | 2004-08-12 |
MEMS gyroscope with parametric gain
Grant 6,715,353 - Johnson April 6, 2 | 2004-04-06 |
MEMS gyroscope with parametric gain
App 20030200804 - Johnson, Burgess R. | 2003-10-30 |
Three-dimensional micro-coils in planar substrates
Grant 6,498,557 - Johnson December 24, 2 | 2002-12-24 |
Cyrogenic inertial micro-electro-mechanical system (MEMS) device
Grant 6,487,864 - Platt , et al. December 3, 2 | 2002-12-03 |
Three-dimensional micro-coils in planar substrates
Grant 6,445,271 - Johnson September 3, 2 | 2002-09-03 |
Microcathode with integrated extractor
App 20020102753 - Johnson, Burgess R. ; et al. | 2002-08-01 |
Microcombustion engine/generator
Grant 6,397,793 - Yang , et al. June 4, 2 | 2002-06-04 |
Three-dimensional micro-coils in planar substrates
App 20020057173 - Johnson, Burgess R. | 2002-05-16 |
Efficient solid-state light emitting device with excited phosphors for producing a visible light output
Grant 6,373,188 - Johnson , et al. April 16, 2 | 2002-04-16 |
Microcombustion engine/generator
App 20010029911 - Yang, Wei ; et al. | 2001-10-18 |
Microcombustion engine/generator
Grant 6,276,313 - Yang , et al. August 21, 2 | 2001-08-21 |
Monolithic bi-directional microvalve with enclosed drive electric field
Grant 6,126,140 - Johnson , et al. October 3, 2 | 2000-10-03 |
Micro electro-mechanical systems relay
Grant 5,959,338 - Youngner , et al. September 28, 1 | 1999-09-28 |
Preparation of superconducting oxide films by reactive evaporation using ozone
Grant 5,039,657 - Goldman , et al. August 13, 1 | 1991-08-13 |
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