Patent | Date |
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2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt and method for producing the same Grant 8,748,672 - Hagiwara , et al. June 10, 2 | 2014-06-10 |
2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt and Method for Producing the Same App 20130317250 - HAGIWARA; Yuji ;   et al. | 2013-11-28 |
Polymerizable fluorine-containing compound Grant 8,592,622 - Isono , et al. November 26, 2 | 2013-11-26 |
2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt and method for producing the same Grant 8,581,009 - Hagiwara , et al. November 12, 2 | 2013-11-12 |
Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same Grant 8,513,457 - Isono , et al. August 20, 2 | 2013-08-20 |
Compound for Photoacid Generator, Resist Composition Using the Same, and Pattern-Forming Method App 20130130175 - HAGIWARA; Yuji ;   et al. | 2013-05-23 |
Compound for photoacid generator, resist composition using the same, and pattern-forming method Grant 8,435,717 - Hagiwara , et al. May 7, 2 | 2013-05-07 |
Fluorine-Containing Compound, Fluorine-Containing Polymer, Negative-Type Resist Composition, and Patterning Process Using Same App 20120226070 - ISONO; Yoshimi ;   et al. | 2012-09-06 |
Processes for production of 2-bromo-2,2-difluoroethanol and 2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt Grant 8,222,448 - Jodry , et al. July 17, 2 | 2012-07-17 |
Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same Grant 8,187,787 - Isono , et al. May 29, 2 | 2012-05-29 |
Processes for production of 2-bromo-2,2-difluoroethanol and 2-(alkylcarbonyloxy)-1,1-difluoroethanesulfonic acid salt Grant 8,110,711 - Jodry , et al. February 7, 2 | 2012-02-07 |
Processes for Production of 2-Bromo-2,2-Difluoroethanol and 2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt App 20110319652 - Jodry; Jonathan Joachim ;   et al. | 2011-12-29 |
Polymerizable sulfonic acid onium salt and resin Grant 7,956,142 - Nagai , et al. June 7, 2 | 2011-06-07 |
Polymerizable Fluorine-Containing Compound App 20110098500 - ISONO; Yoshimi ;   et al. | 2011-04-28 |
Positive-type resist composition Grant 7,906,269 - Isono , et al. March 15, 2 | 2011-03-15 |
Fluorine-containing compound, fluorine-containing polymer, postive-type resist composition, and patterning process using same Grant 7,887,990 - Isono , et al. February 15, 2 | 2011-02-15 |
2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt and Method for Producing the Same App 20110034721 - Hagiwara; Yuji ;   et al. | 2011-02-10 |
Processes for Production of 2-Bromo-2,2-Difluoroethanol and 2-(Alkylcarbonyloxy)-1,1-Difluoroethanesulfonic Acid Salt App 20110015431 - Jodry; Jonathan Joachim ;   et al. | 2011-01-20 |
Polymerizable Sulfonic Acid Onium Salt And Resin App 20100063232 - Nagai; Tomoki ;   et al. | 2010-03-11 |
Compound for Photoacid Generator, Resist Composition Using the Same, and Pattern-Forming Method App 20100035185 - Hagiwara; Yuji ;   et al. | 2010-02-11 |
Positive-Type Resist Composition App 20090061353 - ISONO; Yoshimi ;   et al. | 2009-03-05 |
Fluorine-Containing Compound, Fluorine-Containing Polymer, Negative-Type Resist Composition, and Patterning Process Using Same App 20090011199 - Isono; Yoshimi ;   et al. | 2009-01-08 |
Fluorine-Containing Compound, Fluorine-Containing Polymer, Postive-Type Resist Composition, And Patterning Process Using Same App 20080311507 - ISONO; Yoshimi ;   et al. | 2008-12-18 |
Process for producing alkoxycarbonylfluoroalkanesulfonates Grant 7,414,148 - Fujiwara , et al. August 19, 2 | 2008-08-19 |
Process For Producing Alkoxycarbonylfluoroalkanesulfonates App 20080108846 - FUJIWARA; Masaki ;   et al. | 2008-05-08 |