loadpatents
Patent applications and USPTO patent grants for Jingu; Takahiro.The latest application filed is for "charged particle beam device".
Patent | Date |
---|---|
Charged particle beam device Grant 10,818,471 - Jingu October 27, 2 | 2020-10-27 |
Charged Particle Beam Device App 20200266027 - JINGU; Takahiro | 2020-08-20 |
Sample for coordinates calibration and method for fabricating the same Grant 10,444,011 - Jingu Oc | 2019-10-15 |
Defect inspection method, low light detecting method, and low light detector Grant 10,261,026 - Urano , et al. | 2019-04-16 |
Inspection apparatus and adjusting method Grant 9,885,670 - Jingu February 6, 2 | 2018-02-06 |
Surface measurement apparatus Grant 9,823,065 - Kondo , et al. November 21, 2 | 2017-11-21 |
Inspection device and image capture element Grant 9,791,380 - Jingu October 17, 2 | 2017-10-17 |
Inspection device and measurement device Grant 9,779,912 - Makuuchi , et al. October 3, 2 | 2017-10-03 |
Sample for Coordinates Calibration and Method for Fabricating the Same App 20170268870 - JINGU; Takahiro | 2017-09-21 |
Inspection device Grant 9,759,669 - Jingu September 12, 2 | 2017-09-12 |
Defect inspection device and defect inspection method Grant 9,645,094 - Honda , et al. May 9, 2 | 2017-05-09 |
Defect Inspection Method, Low Light Detecting Method, And Low Light Detector App 20170115231 - Urano; Yuta ;   et al. | 2017-04-27 |
Defect Inspection Device And Defect Inspection Method App 20170102339 - HONDA; Toshifumi ;   et al. | 2017-04-13 |
Apparatus for inspecting defect with time/spatial division optical system Grant 9,602,780 - Ito , et al. March 21, 2 | 2017-03-21 |
Defect inspection method, low light detecting method and low light detector Grant 9,588,054 - Urano , et al. March 7, 2 | 2017-03-07 |
Inspection device Grant 9,568,437 - Matsumoto , et al. February 14, 2 | 2017-02-14 |
Defect inspection device and defect inspection method Grant 9,568,439 - Honda , et al. February 14, 2 | 2017-02-14 |
Inspection system Grant 9,535,009 - Ohtsubo , et al. January 3, 2 | 2017-01-03 |
Inspection Device and Measurement Device App 20160322193 - MAKUUCHI; Masami ;   et al. | 2016-11-03 |
Defect Inspection Device And Defect Inspection Method App 20160216217 - Honda; Toshifumi ;   et al. | 2016-07-28 |
Surface Shape Measuring Apparatus App 20160178360 - ITO; Masaaki ;   et al. | 2016-06-23 |
Surface measurement device Grant 9,366,625 - Ito , et al. June 14, 2 | 2016-06-14 |
Inspection Device App 20160139059 - MATSUMOTO; Shunichi ;   et al. | 2016-05-19 |
Defect inspection device and defect inspection method Grant 9,329,136 - Honda , et al. May 3, 2 | 2016-05-03 |
Surface shape measuring apparatus Grant 9,310,190 - Ito , et al. April 12, 2 | 2016-04-12 |
Surface Measurement Apparatus App 20150354947 - KONDO; Takanori ;   et al. | 2015-12-10 |
Inspection Apparatus and Adjusting Method App 20150346112 - JINGU; Takahiro | 2015-12-03 |
Inspection Device And Inspection Method App 20150293034 - Makuuchi; Masami ;   et al. | 2015-10-15 |
Inspection Device App 20150177161 - Jingu; Takahiro | 2015-06-25 |
Defect Inspection Device And Defect Inspection Method App 20150146200 - Honda; Toshifumi ;   et al. | 2015-05-28 |
Inspection System App 20150131087 - Ohtsubo; Kenshiro ;   et al. | 2015-05-14 |
Defect Inspection Method And Defect Inspection Device App 20150116702 - Matsumoto; Shunichi ;   et al. | 2015-04-30 |
Surface-defect inspection device Grant 9,019,490 - Suzuki , et al. April 28, 2 | 2015-04-28 |
Inspection Device And Image Capture Element App 20150109434 - Jingu; Takahiro | 2015-04-23 |
Inspection method and inspection device Grant 9,007,581 - Horai , et al. April 14, 2 | 2015-04-14 |
Surface shape measuring apparatus Grant 8,958,076 - Takahashi , et al. February 17, 2 | 2015-02-17 |
Surface Measurement Device App 20140375988 - Ito; Masaaki ;   et al. | 2014-12-25 |
Defect inspection method and defect inspection device Grant 8,908,171 - Makuuchi , et al. December 9, 2 | 2014-12-09 |
Inspection apparatus Grant 8,902,417 - Hirose , et al. December 2, 2 | 2014-12-02 |
Photoelectric conversion element, defect inspecting apparatus, and defect inspecting method Grant 8,884,207 - Kawaguchi , et al. November 11, 2 | 2014-11-11 |
Inspecting apparatus and an inspecting method Grant 8,831,899 - Nemoto , et al. September 9, 2 | 2014-09-09 |
Surface Shape Measuring Apparatus App 20140198321 - Ito; Masaaki ;   et al. | 2014-07-17 |
Defect Inspection Method, Low Light Detecting Method And Low Light Detector App 20130321798 - Urano; Yuta ;   et al. | 2013-12-05 |
Surface-defect Inspection Device App 20130314700 - SUZUKI; Katsuya ;   et al. | 2013-11-28 |
Examination method and examination device Grant 8,587,777 - Jingu , et al. November 19, 2 | 2013-11-19 |
Defect Inspection Method And Defect Inspection Device App 20130286387 - Makuuchi; Masami ;   et al. | 2013-10-31 |
Inspection Apparatus App 20130286191 - Ito; Masaaki ;   et al. | 2013-10-31 |
Inspection Apparatus App 20130286385 - Miyazaki; Yusuke ;   et al. | 2013-10-31 |
Measuring Apparatus App 20130278926 - Takahashi; Kazuo ;   et al. | 2013-10-24 |
Inspection apparatus and inspection method Grant 8,563,958 - Takahashi , et al. October 22, 2 | 2013-10-22 |
Inspection Apparatus App 20130271754 - Hirose; Nobuaki ;   et al. | 2013-10-17 |
Inspection Tool and Image Pickup Device App 20130258093 - JINGU; Takahiro | 2013-10-03 |
Surface-defect inspection device Grant 8,547,546 - Suzuki , et al. October 1, 2 | 2013-10-01 |
Defects inspecting apparatus and defects inspecting method Grant 8,508,727 - Uto , et al. August 13, 2 | 2013-08-13 |
Photoelectric Conversion Element, Defect Inspecting Apparatus, And Defect Inspecting Method App 20130161490 - Kawaguchi; Hiroshi ;   et al. | 2013-06-27 |
Surface Inspection Device And Surface Inspection Method App 20130010290 - Takahashi; Kazuo ;   et al. | 2013-01-10 |
Inspection Method And Inspection Device App 20130010281 - Horai; Izuo ;   et al. | 2013-01-10 |
Defects Inspecting Apparatus And Defects Inspecting Method App 20120262709 - Uto; Sachio ;   et al. | 2012-10-18 |
Method of apparatus for detecting particles on a specimen Grant 8,289,507 - Hamamatsu , et al. October 16, 2 | 2012-10-16 |
Inspection method and inspection apparatus Grant 8,269,959 - Hamamatsu , et al. September 18, 2 | 2012-09-18 |
Defects inspecting apparatus and defects inspecting method Grant 8,228,495 - Uto , et al. July 24, 2 | 2012-07-24 |
Inspection Apparatus And Inspection Method App 20120154797 - Takahashi; Kazuo ;   et al. | 2012-06-21 |
Surface-defect Inspection Device App 20120147363 - Suzuki; Katsuya ;   et al. | 2012-06-14 |
Inspection Method And Inspection Apparatus App 20120133929 - HAMAMATSU; Akira ;   et al. | 2012-05-31 |
Method and Its Apparatus for Inspecting Particles or Defects of a Semiconductor Device App 20120062890 - Nishiyama; Hidetoshi ;   et al. | 2012-03-15 |
Inspection apparatus and inspection method Grant 8,101,935 - Takahashi , et al. January 24, 2 | 2012-01-24 |
Inspection method and inspection apparatus Grant 8,094,295 - Hamamatsu , et al. January 10, 2 | 2012-01-10 |
Defects Inspecting Apparatus And Defects Inspecting Method App 20110310382 - UTO; Sachio ;   et al. | 2011-12-22 |
Examination Method And Examination Device App 20110299088 - Jingu; Takahiro ;   et al. | 2011-12-08 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 8,072,597 - Nishiyama , et al. December 6, 2 | 2011-12-06 |
Reference Wafer For Calibration Of Dark-field Inspection Apparatus,method Of Manufacturing Reference Wafer For Calibration Of Dark-field Inspection Apparatus, Method Of Calibrating Dark-field Inspection Apparatus, Dark-field Inspection Apparatus, And A Wafer Inspection Method App 20110276299 - Nemoto; Kazunori ;   et al. | 2011-11-10 |
Contamination-inspecting apparatus and detection circuit Grant 8,035,071 - Makuuchi , et al. October 11, 2 | 2011-10-11 |
Method Of Apparatus For Detecting Particles On A Specimen App 20110228258 - HAMAMATSU; Akira ;   et al. | 2011-09-22 |
Defects inspecting apparatus and defects inspecting method Grant 8,013,989 - Uto , et al. September 6, 2 | 2011-09-06 |
Detection circuit and foreign matter inspection apparatus for semiconductor wafer Grant 7,990,529 - Makuuchi , et al. August 2, 2 | 2011-08-02 |
Mini Environment Apparatus, Inspection Apparatus, Manufacturing Apparatus and Cleaning Method of Space App 20110153114 - JINGU; Takahiro ;   et al. | 2011-06-23 |
Method of apparatus for detecting particles on a specimen Grant 7,952,700 - Hamamatsu , et al. May 31, 2 | 2011-05-31 |
Method of detecting defects on an object Grant 7,940,383 - Noguchi , et al. May 10, 2 | 2011-05-10 |
Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space Grant 7,925,390 - Jingu , et al. April 12, 2 | 2011-04-12 |
Method for inspecting defect and apparatus for inspecting defect Grant 7,903,244 - Hamamatsu , et al. March 8, 2 | 2011-03-08 |
Method Of Apparatus For Detecting Particles On A Specimen App 20110032515 - HAMAMATSU; Akira ;   et al. | 2011-02-10 |
Inspection Method And Inspection Device App 20100271626 - HORAI; Izuo ;   et al. | 2010-10-28 |
Method of apparatus for detecting particles on a specimen Grant 7,817,261 - Hamamatsu , et al. October 19, 2 | 2010-10-19 |
Defects Inspecting Apparatus And Defects Inspecting Method App 20100259751 - UTO; Sachio ;   et al. | 2010-10-14 |
Surface Inspection With Variable Digital Filtering App 20100225907 - Takahashi; Kazuo ;   et al. | 2010-09-09 |
Surface inspection with variable digital filtering Grant 7,791,721 - Takahashi , et al. September 7, 2 | 2010-09-07 |
Inspection method and inspection device Grant 7,777,876 - Horai , et al. August 17, 2 | 2010-08-17 |
Defects inspecting apparatus and defects inspecting method Grant 7,768,634 - Uto , et al. August 3, 2 | 2010-08-03 |
Apparatus And Method For Testing Defects App 20100088042 - NOGUCHI; Minori ;   et al. | 2010-04-08 |
Apparatus and method for testing defects Grant 7,692,779 - Noguchi , et al. April 6, 2 | 2010-04-06 |
Inspection Method And Inspection Apparatus App 20100002227 - HAMAMATSU; Akira ;   et al. | 2010-01-07 |
Method For Inspecting Defect And Apparatus For Inspecting Defect App 20090323054 - HAMAMATSU; Akira ;   et al. | 2009-12-31 |
Apparatus and method for testing defects Grant 7,639,350 - Noguchi , et al. December 29, 2 | 2009-12-29 |
Inspection method and inspection apparatus Grant 7,586,593 - Hamamatsu , et al. September 8, 2 | 2009-09-08 |
Method for inspecting defect and apparatus for inspecting defect Grant 7,586,594 - Hamamatsu , et al. September 8, 2 | 2009-09-08 |
Inspection Apparatus And Inspection Method App 20090140180 - Takahashi; Kazuo ;   et al. | 2009-06-04 |
Detection Circuit And Foreign Matter Inspection Apparatus For Semiconductor Wafer App 20090122305 - MAKUUCHI; Masami ;   et al. | 2009-05-14 |
Defects Inspecting Apparatus And Defects Inspecting Method App 20090033924 - Uto; Sachio ;   et al. | 2009-02-05 |
Inspection Method And Inspection Device App 20090009753 - Horai; Izuo ;   et al. | 2009-01-08 |
Contamination-inspecting Apparatus And Detection Circuit App 20080278717 - Makuuchi; Masami ;   et al. | 2008-11-13 |
Apparatus and method for testing defects Grant 7,443,496 - Noguchi , et al. October 28, 2 | 2008-10-28 |
Method and Its Apparatus for Inspecting Particles or Defects of a Semiconductor Device App 20080246964 - NISHIYAMA; Hidetoshi ;   et al. | 2008-10-09 |
Method Of Apparatus For Detecting Particles On A Specimen App 20080204724 - Hamamatsu; Akira ;   et al. | 2008-08-28 |
Defect detector and defect detecting method Grant 7,417,721 - Uto , et al. August 26, 2 | 2008-08-26 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,411,207 - Nishiyama , et al. August 12, 2 | 2008-08-12 |
Method of apparatus for detecting particles on a specimen Grant 7,369,223 - Hamamatsu , et al. May 6, 2 | 2008-05-06 |
Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space App 20080046133 - Jingu; Takahiro ;   et al. | 2008-02-21 |
Surface inspection apparatus and surface inspection method App 20080027665 - Takahashi; Kazuo ;   et al. | 2008-01-31 |
Surface inspection apparatus and surface inspection method App 20080024773 - Miyazaki; Yusuke ;   et al. | 2008-01-31 |
Inspection method and inspection apparatus Grant 7,315,363 - Hamamatsu , et al. January 1, 2 | 2008-01-01 |
Method And Its Apparatus For Inspecting Particles Or Defects Of A Semiconductor Device App 20070265797 - Nishiyama; Hidetoshi ;   et al. | 2007-11-15 |
Method and apparatus for inspecting particles or defects of a semiconductor device App 20070257214 - Nishiyama; Hidetoshi ;   et al. | 2007-11-08 |
Method For Inspecting Defect And Apparatus For Inspecting Defect App 20070247616 - HAMAMATSU; AKIRA ;   et al. | 2007-10-25 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,262,425 - Nishiyama , et al. August 28, 2 | 2007-08-28 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,256,412 - Nishiyama , et al. August 14, 2 | 2007-08-14 |
Apparatus And Method For Wafer Surface Defect Inspection App 20070182958 - Manabe; Yuji ;   et al. | 2007-08-09 |
Method for inspecting defect and apparatus for inspecting defect Grant 7,248,352 - Hamamatsu , et al. July 24, 2 | 2007-07-24 |
Apparatus And Method For Testing Defects App 20070146697 - Noguchi; Minori ;   et al. | 2007-06-28 |
Apparatus And Method For Testing Defects App 20070146696 - Noguchi; Minori ;   et al. | 2007-06-28 |
Inspection method and inspection apparatus App 20070070339 - Hamamatsu; Akira ;   et al. | 2007-03-29 |
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20070001132 - Nishiyama; Hidetoshi ;   et al. | 2007-01-04 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,115,892 - Nishiyama , et al. October 3, 2 | 2006-10-03 |
Apparatus and method for testing defects Grant 7,098,055 - Noguchi , et al. August 29, 2 | 2006-08-29 |
Defect detector and defect detecting method App 20060124874 - Uto; Sachio ;   et al. | 2006-06-15 |
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20060091332 - Nishiyama; Hidetoshi ;   et al. | 2006-05-04 |
Apparatus and method for testing defects Grant 7,037,735 - Noguchi , et al. May 2, 2 | 2006-05-02 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 6,998,630 - Nishiyama , et al. February 14, 2 | 2006-02-14 |
Apparatus and method for testing defects App 20060030059 - Noguchi; Minori ;   et al. | 2006-02-09 |
Apparatus and method for testing defects App 20060030060 - Noguchi; Minori ;   et al. | 2006-02-09 |
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20050264798 - Nishiyama, Hidetoshi ;   et al. | 2005-12-01 |
Method and apparatus for detecting defects App 20050264797 - Nakano, Hiroyuki ;   et al. | 2005-12-01 |
Method of apparatus for detecting particles on a specimen App 20050213086 - Hamamatsu, Akira ;   et al. | 2005-09-29 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 6,936,835 - Nishiyama , et al. August 30, 2 | 2005-08-30 |
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20050024633 - Nishiyama, Hidetoshi ;   et al. | 2005-02-03 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 6,797,975 - Nishiyama , et al. September 28, 2 | 2004-09-28 |
Method for inspecting defect and apparatus for inspecting defect App 20040160599 - Hamamatsu, Akira ;   et al. | 2004-08-19 |
Inspection method and inspection apparatus App 20040105093 - Hamamatsu, Akira ;   et al. | 2004-06-03 |
Apparatus and method of inspecting foreign particle or defect on a sample Grant 6,597,448 - Nishiyama , et al. July 22, 2 | 2003-07-22 |
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20030001120 - Nishiyama, Hidetoshi ;   et al. | 2003-01-02 |
Optical apparatus for defect and particle size inspection Grant 6,411,377 - Noguchi , et al. June 25, 2 | 2002-06-25 |
Method and its apparatus for inspecting particles or defects of a semiconductor device App 20020047097 - Nishiyama, Hidetoshi ;   et al. | 2002-04-25 |
System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value Grant 6,002,989 - Shiba , et al. December 14, 1 | 1999-12-14 |
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