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Patent applications and USPTO patent grants for Jin; Yansha.The latest application filed is for "amorphous carbon layer opening process".
Patent | Date |
---|---|
Amorphous carbon layer opening process Grant 11,037,784 - Qin , et al. June 15, 2 | 2021-06-15 |
Amorphous Carbon Layer Opening Process App 20210035796 - QIN; Ce ;   et al. | 2021-02-04 |
Edge Ring Focused Deposition During A Cleaning Process Of A Processing Chamber App 20190341275 - JIN; Yansha ;   et al. | 2019-11-07 |
Edge roughness reduction Grant 10,020,183 - Jin , et al. July 10, 2 | 2018-07-10 |
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