Jin; Xiao Liang
Patent Applications and Registrations
Patent applications and USPTO patent grants for Jin; Xiao Liang.The latest application filed is for "temperature controlled gas feedthrough".
- Jin; Xiao Liang - San Jose CA
- Jin; Xiao Liang - Sunnyvale CA
| Patent | Date |
|---|---|
| Temperature controlled gas feedthrough Grant 6,527,865 - Sajoto , et al. March 4, 2 | 2003-03-04 |
| High temperature, high flow rate chemical vapor deposition apparatus and related methods Grant 6,189,482 - Zhao , et al. February 20, 2 | 2001-02-20 |
| High temperature, high deposition rate process and apparatus for depositing titanium layers Grant 6,051,286 - Zhao , et al. April 18, 2 | 2000-04-18 |
| Method for substrate processing with improved throughput and yield Grant 5,993,916 - Zhao , et al. November 30, 1 | 1999-11-30 |
| Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment Grant 5,983,906 - Zhao , et al. November 16, 1 | 1999-11-16 |
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