Patent applications and USPTO patent grants for Jiang; Zhijun.The latest application filed is for "profile shaping for control gate recesses".
Patent | Date |
---|---|
Processing systems and methods to control process drift Grant 11,430,641 - Chua , et al. August 30, 2 | 2022-08-30 |
Systems And Methods Of Seasoning Electrostatic Chucks With Dielectric Seasoning Films App 20220122872 - Singhal; Akhil ;   et al. | 2022-04-21 |
Profile Shaping For Control Gate Recesses App 20220123114 - Singhal; Akhil ;   et al. | 2022-04-21 |
Switchable Delivery For Semiconductor Processing System App 20220020570 - Addepalli; Sai Susmita ;   et al. | 2022-01-20 |
Method of forming film stacks with reduced defects Grant 11,145,504 - Jiang , et al. October 12, 2 | 2021-10-12 |
Chamber Configurations For Controlled Deposition App 20210047730 - Addepalli; Sai Susmita ;   et al. | 2021-02-18 |
Pecvd Process App 20200399756 - RAJAGOPALAN; Nagarajan ;   et al. | 2020-12-24 |
PECVD process Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
Virtual sensor for chamber cleaning endpoint Grant 10,777,394 - Mungekar , et al. Sept | 2020-09-15 |
Method Of Forming Film Stacks With Reduced Defects App 20200227258 - JIANG; Zhijun ;   et al. | 2020-07-16 |
Low Dielectric Constant Oxide And Low Resistance Op Stack For 3d Nand Application App 20200126784 - HAN; Xinhai ;   et al. | 2020-04-23 |
Gas Distribution Assemblies And Operation Thereof App 20200098547 - DASH; Priyanka ;   et al. | 2020-03-26 |
System and method for substrate processing chambers Grant 10,600,624 - Ghosh , et al. | 2020-03-24 |
Low dielectric constant oxide and low resistance OP stack for 3D NAND application Grant 10,553,427 - Han , et al. Fe | 2020-02-04 |
Technique To Enable High Temperature Clean For Rapid Processing Of Wafers App 20190382889 - PARIMI; Venkata Sharat Chandra ;   et al. | 2019-12-19 |
Dual-channel showerhead for formation of film stacks Grant 10,276,353 - Alayavalli , et al. | 2019-04-30 |
System And Method For Substrate Processing Chambers App 20190122872 - GHOSH; Kalyanjit ;   et al. | 2019-04-25 |
Low Dielectric Constant Oxide And Low Resistance Op Stack For 3d Nand Application App 20180315592 - HAN; Xinhai ;   et al. | 2018-11-01 |
Pecvd Process App 20180258535 - RAJAGOPALAN; Nagarajan ;   et al. | 2018-09-13 |
PECVD process Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
PECVD apparatus and process Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
Virtual Sensor For Chamber Cleaning Endpoint App 20180166260 - MUNGEKAR; Hemant P. ;   et al. | 2018-06-14 |
Pecvd Process App 20180066364 - RAJAGOPALAN; Nagarajan ;   et al. | 2018-03-08 |
PECVD process Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
Pecvd Process App 20170016118 - RAJAGOPALAN; Nagarajan ;   et al. | 2017-01-19 |
Dual-channel Showerhead For Formation Of Film Stacks App 20160322200 - ALAYAVALLI; Kaushik ;   et al. | 2016-11-03 |
PECVD process Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
Pecvd Process App 20160017497 - RAJAGOPALAN; NAGARAJAN ;   et al. | 2016-01-21 |
PECVD process Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
Pecvd Apparatus And Process App 20150226540 - Rajagopalan; Nagarajan ;   et al. | 2015-08-13 |
High Throughput Multi-layer Stack Deposition App 20140287593 - HAN; Xinhai ;   et al. | 2014-09-25 |
Pecvd Process App 20140118751 - RAJAGOPALAN; Nagarajan ;   et al. | 2014-05-01 |
Surface-treated Modafinil Particles App 20120082726 - AHMED; Salah U. ;   et al. | 2012-04-05 |
Surface-treated Modafinil Particles App 20100112045 - AHMED; Salah U. ;   et al. | 2010-05-06 |
Surface-treated modafinil particles App 20040253308 - Ahmed, Salah U. ;   et al. | 2004-12-16 |
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