| Patent | Date |
|---|
High Resolution Electron Beam Apparatus With Dual-aperture Schemes
App 20220254667 - Jiang; Xinrong ; et al. | 2022-08-11 |
Electron beam system for inspection and review of 3D devices
Grant 11,335,608 - Jiang , et al. May 17, 2 | 2022-05-17 |
Electron Source With Magnetic Suppressor Electrode
App 20220108862 - Chubun; Nikolai ; et al. | 2022-04-07 |
Electron Beam System For Inspection And Review Of 3d Devices
App 20210327770 - Jiang; Xinrong ; et al. | 2021-10-21 |
Micro stigmator array for multi electron beam system
Grant 11,056,312 - Jiang , et al. July 6, 2 | 2021-07-06 |
High resolution electron energy analyzer
Grant 10,964,522 - Jiang , et al. March 30, 2 | 2021-03-30 |
Method and system for edge-of-wafer inspection and review
Grant 10,770,258 - Jiang , et al. Sep | 2020-09-08 |
Deflection array apparatus for multi-electron beam system
Grant 10,748,739 - Jiang , et al. A | 2020-08-18 |
Joint Electron-Optical Columns for Flood-Charging and Image-Forming in Voltage Contrast Wafer Inspections
App 20200194223 - Jiang; Xinrong ; et al. | 2020-06-18 |
Deflection Array Apparatus for Multi-Electron Beam System
App 20200118784 - Jiang; Xinrong ; et al. | 2020-04-16 |
High Resolution Electron Energy Analyzer
App 20190378705 - Jiang; Xinrong ; et al. | 2019-12-12 |
Method and system for aberration correction in an electron beam system
Grant 10,224,177 - Sears , et al. | 2019-03-05 |
Method and System for Edge-of-Wafer Inspection and Review
App 20190006143 - Jiang; Xinrong ; et al. | 2019-01-03 |
Electron beam apparatus with high resolutions
Grant 10,096,447 - Jiang , et al. October 9, 2 | 2018-10-09 |
Method and system for aberration correction in an electron beam system
Grant 10,090,131 - Jiang , et al. October 2, 2 | 2018-10-02 |
Method and system for edge-of-wafer inspection and review
Grant 10,056,224 - Jiang , et al. August 21, 2 | 2018-08-21 |
Method and System for Aberration Correction in an Electron Beam System
App 20180158644 - Jiang; Xinrong ; et al. | 2018-06-07 |
Transfer Of Particulate Material
App 20180141126 - BULLER; Benyamin ; et al. | 2018-05-24 |
Extractor electrode for electron source
Grant 9,934,933 - Hordon , et al. April 3, 2 | 2018-04-03 |
System and method for imaging a sample with an electron beam with a filtered energy spread
Grant 9,905,391 - Jiang February 27, 2 | 2018-02-27 |
Heat-spreading blanking system for high throughput electron beam apparatus
Grant 9,881,764 - Jiang , et al. January 30, 2 | 2018-01-30 |
Heat-spreading Blanking System For High Throughput Electron Beam Apparatus
App 20170200581 - Jiang; Xinrong ; et al. | 2017-07-13 |
Method and System for Edge-of-Wafer Inspection and Review
App 20170047193 - Jiang; Xinrong ; et al. | 2017-02-16 |
Method and System for Aberration Correction in an Electron Beam System
App 20160329189 - Sears; Christopher ; et al. | 2016-11-10 |
System and Method for Imaging a Sample with an Electron Beam with a Filtered Energy Spread
App 20160322190 - Jiang; Xinrong | 2016-11-03 |
Electron beam imaging with dual Wien-filter monochromator
Grant 9,443,696 - Jiang , et al. September 13, 2 | 2016-09-13 |
Electron Beam Imaging With Dual Wien-filter Monochromator
App 20150340200 - JIANG; Xinrong ; et al. | 2015-11-26 |
Apparatus and methods for high-resolution electron beam imaging
Grant 9,053,900 - Jiang , et al. June 9, 2 | 2015-06-09 |
Tilt-imaging scanning electron microscope
Grant 8,921,782 - Jiang , et al. December 30, 2 | 2014-12-30 |
Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents
Grant 8,859,982 - Jiang , et al. October 14, 2 | 2014-10-14 |
Tilt-imaging Scanning Electron Microscope
App 20140151552 - JIANG; Xinrong ; et al. | 2014-06-05 |
Dual-lens-gun Electron Beam Apparatus And Methods For High-resolution Imaging With Both High And Low Beam Currents
App 20140077077 - JIANG; Xinrong ; et al. | 2014-03-20 |
Electron-optical system for high-speed and high-sensitivity inspections
Grant 8,664,594 - Jiang , et al. March 4, 2 | 2014-03-04 |
Apparatus And Methods For High-resolution Electron Beam Imaging
App 20130256530 - JIANG; Xinrong ; et al. | 2013-10-03 |
Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments
Grant 8,536,538 - Jiang September 17, 2 | 2013-09-17 |
Electron beam column and methods of using same
Grant 8,461,526 - Mankos , et al. June 11, 2 | 2013-06-11 |
Multiple-beam system for high-speed electron-beam inspection
Grant 8,362,425 - Han , et al. January 29, 2 | 2013-01-29 |
High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture
Grant 8,294,125 - Han , et al. October 23, 2 | 2012-10-23 |
Multiple-beam System For High-speed Electron-beam Inspection
App 20120241606 - Han; Liqun ; et al. | 2012-09-27 |
Multiple-pole Electrostatic Deflector For Improving Throughput Of Focused Electron Beam Instruments
App 20120205537 - JIANG; Xinrong | 2012-08-16 |
Electron Beam Column And Methods Of Using Same
App 20120138791 - MANKOS; Marian ; et al. | 2012-06-07 |
High-Sensitivity and High-Throughput Electron Beam Inspection Column Enabled by Adjustable Beam-Limiting Aperture
App 20110114838 - HAN; Liqun ; et al. | 2011-05-19 |
Immersion gun equipped electron beam column
Grant 7,821,187 - Jiang , et al. October 26, 2 | 2010-10-26 |
Multi-function module for an electron beam column
Grant 7,800,075 - Buller , et al. September 21, 2 | 2010-09-21 |
Multi-function Module For An Electron Beam Column
App 20080308751 - Buller; Benyamin ; et al. | 2008-12-18 |
Electron beam column for writing shaped electron beams
Grant 7,427,765 - Buller , et al. September 23, 2 | 2008-09-23 |
Method and apparatus for multiple charged particle beams
Grant 7,262,418 - Lo , et al. August 28, 2 | 2007-08-28 |
Electron beam column for writing shaped electron beams
App 20070085033 - Buller; Benyamin ; et al. | 2007-04-19 |
Method and apparatus for multiple charged particle beams
Grant 7,067,809 - Lo , et al. June 27, 2 | 2006-06-27 |
Method and apparatus for multiple charged particle beams
App 20060108531 - Lo; Chiwoei Wayne ; et al. | 2006-05-25 |
Method and apparatus for multiple charged particle beams
App 20050230633 - Lo, Chiwoei Wayne ; et al. | 2005-10-20 |
Method and apparatus for multiple charged particle beams
Grant 6,750,455 - Lo , et al. June 15, 2 | 2004-06-15 |
Method and apparatus for multiple charged particle beams
App 20030001095 - Lo, Chiwoe Wayne ; et al. | 2003-01-02 |
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