| Patent | Date |
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Accelerometer With Translational Motion Of Masses
App 20220196699 - Jia; Kemiao ; et al. | 2022-06-23 |
3-axis Gyroscope With Rotational Vibration Rejection
App 20220057210 - Gregory; Jeffrey A. ; et al. | 2022-02-24 |
3-axis Gyroscope With Rotational Vibration Rejection
App 20210381834 - Gregory; Jeffrey A. ; et al. | 2021-12-09 |
3-axis gyroscope with rotational vibration rejection
Grant 11,193,771 - Gregory , et al. December 7, 2 | 2021-12-07 |
Laser Beam Control In A Lidar System
App 20210080584 - Jia; Kemiao | 2021-03-18 |
Stress isolation platform for MEMS devices
Grant 10,759,659 - Zhang , et al. Sep | 2020-09-01 |
Quad proof mass MEMS gyroscope with outer couplers and related methods
Grant 10,514,259 - Jia , et al. Dec | 2019-12-24 |
Stress Isolation Platform For Mems Devices
App 20190047846 - Zhang; Xin ; et al. | 2019-02-14 |
Stress isolation platform for MEMS devices
Grant 10,167,189 - Zhang , et al. J | 2019-01-01 |
Mechanically isolated MEMS device
Grant 10,131,538 - Kaanta , et al. November 20, 2 | 2018-11-20 |
Quad Proof Mass Mems Gyroscope With Outer Couplers And Related Methods
App 20180058853 - Jia; Kemiao ; et al. | 2018-03-01 |
Mechanically Isolated MEMS Device
App 20170073218 - Kaanta; Bradley C. ; et al. | 2017-03-16 |
Packaged Microchip with Patterned Interposer
App 20160229689 - Kaanta; Bradley C. ; et al. | 2016-08-11 |
Multiple sense axis MEMS gyroscope having a single drive mode
Grant 9,360,319 - Jia June 7, 2 | 2016-06-07 |
Estimation of sidewall skew angles of a structure
Grant 9,316,665 - Geisberger , et al. April 19, 2 | 2016-04-19 |
Stress Isolation Platform for MEMS Devices
App 20160090297 - Zhang; Xin ; et al. | 2016-03-31 |
Semiconductor device including accelerometer devices
Grant 9,233,836 - Karlin , et al. January 12, 2 | 2016-01-12 |
Active lateral force stiction self-recovery for microelectromechanical systems devices
Grant 9,213,045 - Jia , et al. December 15, 2 | 2015-12-15 |
Sensor With Combined Sense Elements For Multiple Axis Sensing
App 20150268269 - Jia; Kemiao ; et al. | 2015-09-24 |
Integrated Circuit Having Varying Substrate Depth And Method Of Forming Same
App 20150084138 - Karlin; Lisa H. ; et al. | 2015-03-26 |
Multiple Sense Axis Mems Gyroscope Having A Single Drive Mode
App 20150059473 - Jia; Kemiao | 2015-03-05 |
Method of forming an integrated circuit having varying substrate depth
Grant 8,921,203 - Karlin , et al. December 30, 2 | 2014-12-30 |
Active Lateral Force Stiction Self-recovery For Microelectromechanical Systems Devices
App 20140345380 - Jia; Kemiao ; et al. | 2014-11-27 |
Estimation Of Sidewall Skew Angles Of A Structure
App 20140311243 - Geisberger; Aaron A. ; et al. | 2014-10-23 |
Method and apparatus for providing high-fill-factor micromirror/micromirror arrays with surface mounting capability
Grant 8,743,449 - Xie , et al. June 3, 2 | 2014-06-03 |
Integrated Circuit Having Varying Substrate Depth And Method Of Forming Same
App 20130285161 - Karlin; Lisa H. ; et al. | 2013-10-31 |
Fully Decoupled Lateral Axis Gyroscope with Thickness-Insensitive Z-Axis Spring and Symmetric Teeter Totter Sensing Element
App 20130180332 - Jia; Kemiao ; et al. | 2013-07-18 |
Method And Apparatus For Providing High-fill-factor Micromirror/micromirror Arrays With Surface Mounting Capability
App 20110292490 - Xie; Huikai ; et al. | 2011-12-01 |
Micromirror And Fabrication Method For Producing Micromirror
App 20100033788 - Xie; Huikai ; et al. | 2010-02-11 |
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