Ji; Chunhai

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ji; Chunhai.The latest application filed is for "chamber-accumulation extension via in-situ passivation".

Company Profile

1.7.8

Ji; Chunhai - Portland OR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chamber-accumulation Extension Via In-situ Passivation App 20220267900 - Fang; ZhiYuan ; et al.	2022-08-25
Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition Grant 10,475,627 - Qi , et al. Nov	2019-11-12
Image reversal with AHM gap fill for multiple patterning Grant 10,192,759 - Shamma , et al. Ja	2019-01-29
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication Grant 9,941,113 - Keil , et al. April 10, 2	2018-04-10
Systems and Methods for Using Electrical Asymmetry Effect to Control Plasma Process Space in Semiconductor Fabrication App 20170330744 - Keil; Douglas ; et al.	2017-11-16
Carrier Ring Wall For Reduction Of Back-diffusion Of Reactive Species And Suppression Of Local Parasitic Plasma Ignition App 20170278681 - Qi; Chengzhu ; et al.	2017-09-28
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication Grant 9,644,271 - Keil , et al. May 9, 2	2017-05-09
High selectivity and low stress carbon hardmask by pulsed low frequency RF power Grant 9,589,799 - Reddy , et al. March 7, 2	2017-03-07
Image Reversal With Ahm Gap Fill For Multiple Patterning App 20160254171 - Shamma; Nader ; et al.	2016-09-01
Method for forming a mask by etching conformal film on patterned ashable hardmask Grant 9,362,133 - Shamma , et al. June 7, 2	2016-06-07
Carbon deposition-etch-ash gap fill process Grant 9,023,731 - Ji , et al. May 5, 2	2015-05-05
High Selectivity And Low Stress Carbon Hardmask By Pulsed Low Frequency Rf Power App 20150093908 - Reddy; Sirish K. ; et al.	2015-04-02
Image Reversal With Ahm Gap Fill For Multiple Patterning App 20140170853 - Shamma; Nader ; et al.	2014-06-19
Carbon Deposition-etch-ash Gap Fill Process App 20140094035 - Ji; Chunhai ; et al.	2014-04-03
Increasing Etch Selectivity Of Carbon Films With Lower Absorption Co-efficient And Stress App 20120258261 - Reddy; Sirish ; et al.	2012-10-11

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