Patent | Date |
---|
Chemical Mechanical Polishing With Applied Magnetic Field App 20220193859 - WANG; Xingfeng ;   et al. | 2022-06-23 |
Slurry Distribution Device For Chemical Mechanical Polishing App 20210331288 - Yang; Yen-Chu ;   et al. | 2021-10-28 |
Slurry distribution device for chemical mechanical polishing Grant 11,077,536 - Yang , et al. August 3, 2 | 2021-08-03 |
Slurry Distribution Device For Chemical Mechanical Polishing App 20210205953 - Yang; Yen-Chu ;   et al. | 2021-07-08 |
Slurry distribution device for chemical mechanical polishing Grant 10,967,483 - Yang , et al. April 6, 2 | 2021-04-06 |
Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing Grant 10,589,397 - Duboust , et al. | 2020-03-17 |
Slurry Distribution Device For Chemical Mechanical Polishing App 20170368663 - Yang; Yen-Chu ;   et al. | 2017-12-28 |
Slurry Distribution Device For Chemical Mechanical Polishing App 20170368664 - Yang; Yen-Chu ;   et al. | 2017-12-28 |
Endpoint Control Of Multiple Substrate Zones Of Varying Thickness In Chemical Mechanical Polishing App 20170151647 - Duboust; Alain ;   et al. | 2017-06-01 |
Temperature control of chemical mechanical polishing Grant 9,005,999 - Xu , et al. April 14, 2 | 2015-04-14 |
Endpoint Control Of Multiple Substrates Of Varying Thickness On The Same Platen In Chemical Mechanical Polishing App 20140222188 - Duboust; Alain ;   et al. | 2014-08-07 |
Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing Grant 8,694,144 - Duboust , et al. April 8, 2 | 2014-04-08 |
Control Of Polishing Of Multiple Substrates On The Same Platen In Chemical Mechanical Polishing App 20140030956 - Zhang; Jimin ;   et al. | 2014-01-30 |
Control Of Overpolishing Of Multiple Substrates On the Same Platen In Chemical Mechanical Polishing App 20140024293 - Zhang; Jimin ;   et al. | 2014-01-23 |
Temperature Control Of Chemical Mechanical Polishing App 20140004626 - XU; KUN ;   et al. | 2014-01-02 |
Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishing Grant 08616935 - | 2013-12-31 |
Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishing Grant 8,616,935 - Zhang , et al. December 31, 2 | 2013-12-31 |
Use of pad conditioning in temperature controlled CMP Grant 8,292,691 - Xu , et al. October 23, 2 | 2012-10-23 |
Endpoint control of multiple-wafer chemical mechanical polishing Grant 8,295,967 - Zhang , et al. October 23, 2 | 2012-10-23 |
Endpoint Control Of Multiple Substrates Of Varying Thickness On The Same Platen In Chemical Mechanical Polishing App 20120053717 - Duboust; Alain ;   et al. | 2012-03-01 |
Tuning Of Polishing Process In Multi-carrier Head Per Platen Polishing Station App 20110300776 - Mai; David H. ;   et al. | 2011-12-08 |
Control of Overpolishing of Multiple Substrates on the Same Platen in Chemical Mechanical Polishing App 20110300775 - Zhang; Jimin ;   et al. | 2011-12-08 |
Substrate holder with liquid supporting surface Grant 8,021,211 - Chen , et al. September 20, 2 | 2011-09-20 |
Temperature Control Of Chemical Mechanical Polishing App 20100279435 - Xu; Kun ;   et al. | 2010-11-04 |
Endpoint Control Of Multiple-wafer Chemical Mechanical Polishing App 20100120330 - Zhang; Jimin ;   et al. | 2010-05-13 |
Endpoint Control Of Multiple-wafer Chemical Mechanical Polishing App 20100120331 - Carlsson; Ingemar ;   et al. | 2010-05-13 |
Use Of Pad Conditioning In Temperature Controlled Cmp App 20100081360 - Xu; Kun ;   et al. | 2010-04-01 |
Substrate Holder With Liquid Supporting Surface App 20090264056 - Chen; Hung Chih ;   et al. | 2009-10-22 |
High Throughput Low Topography Copper Cmp Process App 20090057264 - MAI; DAVID H. ;   et al. | 2009-03-05 |
Method Of Soft Pad Preparation To Reduce Removal Rate Ramp-up Effect And To Stabilize Defect Rate App 20090061743 - JEW; STEPHEN ;   et al. | 2009-03-05 |
Belt wiper for a chemical mechanical planarization system Grant 6,666,755 - Taylor , et al. December 23, 2 | 2003-12-23 |
Multi-step polishing system and process of using same App 20030060145 - Li, Youlin J. ;   et al. | 2003-03-27 |