Patent | Date |
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Method of fabricating semiconductor device Grant 8,916,447 - Park , et al. December 23, 2 | 2014-12-23 |
Method of manufacturing a dynamic random access memory (DRAM) including forming contact pads of adjacent cells by laterally etching a contact opening of a cell therebetween Grant 8,906,763 - Park , et al. December 9, 2 | 2014-12-09 |
Method of forming semiconductor device having self-aligned plug Grant 8,790,976 - Oh , et al. July 29, 2 | 2014-07-29 |
Methods of manufacturing a DRAM device Grant 8,778,757 - Park , et al. July 15, 2 | 2014-07-15 |
Semiconductor devices Grant 8,704,283 - Kim , et al. April 22, 2 | 2014-04-22 |
Method of Forming Semiconductor Device Having Self-Aligned Plug App 20130302966 - Oh; Gyu-Hwan ;   et al. | 2013-11-14 |
Method of forming patterns for semiconductor device Grant 8,551,888 - Kang , et al. October 8, 2 | 2013-10-08 |
Method of forming semiconductor device having self-aligned plug Grant 8,507,353 - Oh , et al. August 13, 2 | 2013-08-13 |
Method of manufacturing semiconductor device Grant 8,445,379 - Park , et al. May 21, 2 | 2013-05-21 |
Methods Of Manufacturing A Dram Device App 20130011989 - Park; Jong-Chul ;   et al. | 2013-01-10 |
Dram Devices And Methods Of Manufacturing The Same App 20130009226 - Park; Jong-Chul ;   et al. | 2013-01-10 |
Method Of Manufacturing Semiconductor Device App 20120135601 - Park; Jong-chul ;   et al. | 2012-05-31 |
Method Of Fabricating Semiconductor Device App 20120135579 - Park; Jong-chul ;   et al. | 2012-05-31 |
Method Of Forming Patterns For Semiconductor Device App 20120129349 - Kang; Yun-seung ;   et al. | 2012-05-24 |
Method of Forming Semiconductor Device Having Self-Aligned Plug App 20120040508 - Oh; Gyu-Hwan ;   et al. | 2012-02-16 |
Methods of forming a conductive layer structure and methods of manufacturing a recessed channel transistor including the same Grant 8,067,285 - Park , et al. November 29, 2 | 2011-11-29 |
Methods of forming integrated circuit devices using contact hole spacers to improve contact isolation Grant 8,053,358 - Lee , et al. November 8, 2 | 2011-11-08 |
Methods of fabricating a semiconductor device Grant 8,017,485 - Cho , et al. September 13, 2 | 2011-09-13 |
Methods of manufacturing a semiconductor device using a layer suspended across a trench Grant 8,003,487 - Cho , et al. August 23, 2 | 2011-08-23 |
Methods Of Forming A Conductive Layer Structure And Methods Of Manufacturing A Recessed Channel Transistor Including The Same App 20110151633 - PARK; Jong-Chul ;   et al. | 2011-06-23 |
Methods of Forming Integrated Circuit Devices Using Contact Hole Spacers to Improve Contact Isolation App 20110104889 - Lee; Doo-young ;   et al. | 2011-05-05 |
Methods of forming integrated circuit devices using contact hole spacers to improve contact isolation Grant 7,875,551 - Lee , et al. January 25, 2 | 2011-01-25 |
Semiconductor device and method of fabricating the same Grant 7,863,677 - Park , et al. January 4, 2 | 2011-01-04 |
Semiconductor Devices App 20100237466 - Kim; Jong-Kyu ;   et al. | 2010-09-23 |
Methods of Forming Integrated Circuit Devices Using Contact Hole Spacers to Improve Contact Isolation App 20100112803 - Lee; Doo-young ;   et al. | 2010-05-06 |
Methods of fabricating a semiconductor device App 20100099248 - Cho; Du-Hyun ;   et al. | 2010-04-22 |
Method of manufacturing a semiconductor device Grant 7,572,711 - Park , et al. August 11, 2 | 2009-08-11 |
Contact structure and method of forming the same Grant 7,557,026 - Kim , et al. July 7, 2 | 2009-07-07 |
Methods Of Manufacturing A Semiconductor Device Using A Layer Suspended Across A Trench App 20090162989 - Cho; Du-Hyun ;   et al. | 2009-06-25 |
Methods of forming a conductive pattern in semiconductor devices and methods of manufacturing semiconductor devices having a conductive pattern App 20090117723 - Kim; Jong-Kyu ;   et al. | 2009-05-07 |
Semiconductor Device And Method Of Fabricating The Same App 20090079012 - PARK; JONG-Chul ;   et al. | 2009-03-26 |
Semiconductor Device And Method Of Fabricating The Same App 20090014833 - YOON; Kuk-Han ;   et al. | 2009-01-15 |
Adjustable shielding plate for adjusting an etching area of a semiconductor wafer and related apparatus and methods Grant 7,438,765 - Park , et al. October 21, 2 | 2008-10-21 |
Contact structure and method of forming the same App 20080096378 - Kim; Jong-Kyu ;   et al. | 2008-04-24 |
Semiconductor Device And Method Of Manufacturing The Same App 20080061352 - LEE; Doo-Young ;   et al. | 2008-03-13 |
Semiconductor device and method of manufacturing the same Grant 7,312,117 - Lee , et al. December 25, 2 | 2007-12-25 |
Semiconductor memory device with cylindrical storage electrode and method of manufacturing the same Grant 7,161,205 - Choi , et al. January 9, 2 | 2007-01-09 |
Method of forming capacitor over bitline contact Grant 7,109,080 - Lee , et al. September 19, 2 | 2006-09-19 |
Method of fabricating a semiconductor device Grant 7,091,117 - Kim , et al. August 15, 2 | 2006-08-15 |
Method of forming a recess structure, recessed channel type transistor and method of manufacturing the recessed channel type transistor App 20060113590 - Kim; Ji-Hae ;   et al. | 2006-06-01 |
Method of manufacturing a semiconductor device App 20060063324 - Park; Jong-Chul ;   et al. | 2006-03-23 |
Method of forming a capacitor for a semiconductor device App 20060046382 - Yoon; Kuk-Han ;   et al. | 2006-03-02 |
Semiconductor device and method of manufacturing the same App 20060022256 - Lee; Doo-Young ;   et al. | 2006-02-02 |
Adjustable shielding plate for adjusting an etching area of a semiconductor wafer and related apparatus and methods App 20050263484 - Park, Jong-Chul ;   et al. | 2005-12-01 |
Method of forming capacitor over bitline contact App 20050196921 - Lee, Yong-Woo ;   et al. | 2005-09-08 |
Semiconductor memory device with cylindrical storage electrode and method of manufacturing the same App 20050167724 - Choi, Sung-Gil ;   et al. | 2005-08-04 |
Method of fabricating a semiconductor device App 20040253800 - Kim, Jae-Woo ;   et al. | 2004-12-16 |
Method of etching a silicon nitride film and method of manufacturing a semiconductor device using the same App 20040171261 - Song, Jong-Heui ;   et al. | 2004-09-02 |
Semiconductor memory device having self-aligned contact and fabricating method thereof Grant 6,682,975 - Kim , et al. January 27, 2 | 2004-01-27 |
Plasma etching method using polymer deposition and method of forming contact hole using the plasma etching method Grant 6,617,253 - Chu , et al. September 9, 2 | 2003-09-09 |
Semiconductor memory device having self-aligned contact and fabricating method thereof Grant 6,573,551 - Kim , et al. June 3, 2 | 2003-06-03 |
Semiconductor memory device and fabricating method thereof Grant 6,461,911 - Ahn , et al. October 8, 2 | 2002-10-08 |
Semiconductor memory device having self-aligned contact and fabricating method thereof App 20020055222 - Kim, Myeong-Cheol ;   et al. | 2002-05-09 |
Method Of Manufacturing A Cylindrical Storage Node In A Semiconductor Device App 20020052089 - Choi, Sung-Gil ;   et al. | 2002-05-02 |
Bit line structure for semiconductor device App 20020027288 - Lee, Won-Seok ;   et al. | 2002-03-07 |
Semiconductor device with self-aligned contact structure employing dual spacers and method of manufacturing the same App 20020024093 - Ahn, Tae-Hyuk ;   et al. | 2002-02-28 |
Semiconductor memory device and fabricating method thereof App 20010046737 - Ahn, Tae-Hyuk ;   et al. | 2001-11-29 |
Method and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamber Grant 5,903,351 - Jeong , et al. May 11, 1 | 1999-05-11 |