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Semiconductor device and method for manufacturing the same Grant 11,443,988 - Jeon September 13, 2 | 2022-09-13 |
Semiconductor Device And Method For Manufacturing The Same App 20210020523 - JEON; KYUNG YUB | 2021-01-21 |
Vertical tunneling field effect transistor and method for manufacturing the same Grant 10,892,347 - Jeon , et al. January 12, 2 | 2021-01-12 |
Semiconductor device and method for manufacturing the same Grant 10,840,150 - Jeon November 17, 2 | 2020-11-17 |
Semiconductor device and method of manufacturing the same Grant 10,804,160 - Jeon , et al. October 13, 2 | 2020-10-13 |
Semiconductor devices including a device isolation region in a substrate and/or fin Grant 10,566,326 - Kwak , et al. Feb | 2020-02-18 |
Semiconductor manufacturing methods for patterning line patterns to have reduced length variation Grant 10,566,207 - Kim , et al. Feb | 2020-02-18 |
Semiconductor Device And Method Of Manufacturing The Same App 20190333825 - Jeon; Kyung Yub ;   et al. | 2019-10-31 |
Semiconductor device and method of manufacturing the same Grant 10,373,878 - Jeon , et al. | 2019-08-06 |
Semiconductor Manufacturing Methods For Patterning Line Patterns To Have Reduced Length Variation App 20190198340 - KIM; Gyeongseop ;   et al. | 2019-06-27 |
Vertical Tunneling Field Effect Transistor And Method For Manufacturing The Same App 20190109214 - JEON; Kyung Yub ;   et al. | 2019-04-11 |
Vertical tunneling field effect transistor and method for manufacturing the same Grant 10,164,057 - Jeon , et al. Dec | 2018-12-25 |
Vertical Tunneling Field Effect Transistor And Method For Manufacturing The Same App 20180350952 - JEON; Kyung Yub ;   et al. | 2018-12-06 |
Semiconductor Device And Method Of Manufacturing The Same App 20180315662 - JEON; KYUNG YUB ;   et al. | 2018-11-01 |
Semiconductor Device And Method For Manufacturing The Same App 20180197790 - JEON; KYUNG YUB | 2018-07-12 |
Semiconductor Devices Including A Device Isolation Region In A Substrate And/or Fin App 20180090493 - Kwak; Dae Young ;   et al. | 2018-03-29 |
Method of fabricating semiconductor device Grant 9,899,497 - Kim , et al. February 20, 2 | 2018-02-20 |
Method and apparatus of diagnosing plasma in plasma space Grant 9,754,770 - Jeon , et al. September 5, 2 | 2017-09-05 |
Method Of Fabricating Semiconductor Device App 20170162674 - KIM; Jin Bum ;   et al. | 2017-06-08 |
Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method Grant 9,607,853 - Jeon , et al. March 28, 2 | 2017-03-28 |
Method Of Manufacturing Semiconductor Device App 20160293444 - PARK; Jae-hong ;   et al. | 2016-10-06 |
Patterning Method Using Metal Mask And Method Of Fabricating Semiconductor Device Including The Same Patterning Method App 20160013070 - JEON; Kyung-yub ;   et al. | 2016-01-14 |
Method of plasma processing and apparatuses using the method Grant 9,136,094 - Cho , et al. September 15, 2 | 2015-09-15 |
Etching apparatus and etching method Grant 9,105,452 - Jeon , et al. August 11, 2 | 2015-08-11 |
Method Of Fabricating Semiconductor Device App 20150079757 - JEON; Kyung-Yub ;   et al. | 2015-03-19 |
Inductively Coupled Plasma Processing Apparatus And Plasma Processing Method Using The Same App 20140273484 - LEE; JEONG-YUN ;   et al. | 2014-09-18 |
Etching Apparatus And Etching Method App 20140251956 - JEON; Kyung-Yub ;   et al. | 2014-09-11 |
Method And Apparatus Of Diagnosing Plasma In Plasma Space App 20140253092 - JEON; Kyung-Yub ;   et al. | 2014-09-11 |
Method Of Plasma Processing And Apparatuses Using The Method App 20140193978 - CHO; Jung Hyun ;   et al. | 2014-07-10 |
Method of forming semiconductor device Grant 8,563,371 - Jeon , et al. October 22, 2 | 2013-10-22 |
Method of fine patterning semiconductor device Grant 8,349,200 - Yi , et al. January 8, 2 | 2013-01-08 |
Method Of Forming Semiconductor Device App 20120064709 - JEON; Kyung-Yub ;   et al. | 2012-03-15 |
Method of Fine Patterning Semiconductor Device App 20110312183 - Yi; Shi-Yong ;   et al. | 2011-12-22 |
Methods of forming semiconductor devices Grant 8,039,345 - Jeon , et al. October 18, 2 | 2011-10-18 |
Method of fine patterning semiconductor device Grant 8,029,688 - Yi , et al. October 4, 2 | 2011-10-04 |
Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same Grant 7,998,874 - Lee , et al. August 16, 2 | 2011-08-16 |
Method of forming fine patterns of semiconductor devices using double patterning Grant 7,935,635 - Jeon , et al. May 3, 2 | 2011-05-03 |
Methods of Forming Semiconductor Devices App 20110059602 - Jeon; Kyung-yub ;   et al. | 2011-03-10 |
Method of forming fine patterns of semiconductor device using double patterning Grant 7,601,647 - Jeon , et al. October 13, 2 | 2009-10-13 |
Method of forming pattern using fine pitch hard mask Grant 7,576,010 - Lee , et al. August 18, 2 | 2009-08-18 |
Method of fine patterning semiconductor device App 20090176376 - Yi; Shi-Yong ;   et al. | 2009-07-09 |
Method for forming fine patterns of a semiconductor device using double patterning Grant 7,550,391 - Jeon , et al. June 23, 2 | 2009-06-23 |
Method of forming fine patterns of semiconductor devices using double patterning App 20080220611 - Jeon; Kyung-yub ;   et al. | 2008-09-11 |
Method of forming fine patterns of semiconductor device using double patterning App 20080188083 - Jeon; Kyung-yub ;   et al. | 2008-08-07 |
Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same App 20080131793 - Lee; Hak-sun ;   et al. | 2008-06-05 |
Method for forming fine patterns of a semiconductor device using double patterning App 20080090418 - Jeon; Kyung-yub ;   et al. | 2008-04-17 |
Method of forming pattern using fine pitch hard mask App 20070123037 - Lee; Ji-young ;   et al. | 2007-05-31 |