Jeon; Chan-Uk

Patent Applications and Registrations

Patent applications and USPTO patent grants for Jeon; Chan-Uk.The latest application filed is for "methods of manufacturing photomasks, methods of forming photoresist patterns and methods of manufacturing semiconductor devices".

Company Profile

0.17.13

Jeon; Chan-Uk - Seongnam-si KR
Jeon; Chan-Uk - SeongNam KR
Jeon; Chan-Uk - SeongNam-city KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods of manufacturing photomasks, methods of forming photoresist patterns and methods of manufacturing semiconductor devices Grant 9,798,241 - Kim , et al. October 24, 2	2017-10-24
Method of fabricating a pellicle frame Grant 9,436,077 - Kim , et al. September 6, 2	2016-09-06
Methods Of Manufacturing Photomasks, Methods Of Forming Photoresist Patterns And Methods Of Manufacturing Semiconductor Devices App 20160202611 - KIM; Sang-Hyun ; et al.	2016-07-14
Method of megasonic cleaning of an object Grant 9,370,805 - Choi , et al. June 21, 2	2016-06-21
Apparatus for cleaning photomask Grant 9,122,177 - Jeong , et al. September 1, 2	2015-09-01
Photomasks and methods of manufacturing the same Grant 8,784,672 - Oh , et al. July 22, 2	2014-07-22
Method of forming photomask using calibration pattern, and photomask having calibration pattern Grant 8,522,172 - Yoon , et al. August 27, 2	2013-08-27
Method Of Fabricating The Pellicle Frame App 20130202993 - KIM; Jung-jin ; et al.	2013-08-08
Apparatus For Cleaning Photomask App 20130186436 - JEONG; Yun-song ; et al.	2013-07-25
Method and apparatus for cleaning photomask Grant 8,414,708 - Jeong , et al. April 9, 2	2013-04-09
Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame Grant 8,404,405 - Kim , et al. March 26, 2	2013-03-26
Method Of Megasonic Cleaning Of An Object App 20130008476 - CHOI; Jae-Hyuck ; et al.	2013-01-10
Method of megasonic cleaning of an object Grant 8,293,020 - Choi , et al. October 23, 2	2012-10-23
Method Of Forming Photomask Using Calibration Pattern, And Photomask Having Calibration Pattern App 20120159405 - YOON; Young-keun ; et al.	2012-06-21
Photomasks And Methods Of Manufacturing The Same App 20120148944 - OH; Jong-Keun ; et al.	2012-06-14
Method Of Megasonic Cleaning Of An Object App 20110297182 - Choi; Jae-Hyuck ; et al.	2011-12-08
Pellicle Frame, Pellicle, Lithography Apparatus, And Method Of Fabricating The Pellicle Frame App 20110063601 - KIM; Jung-jin ; et al.	2011-03-17
Method And Apparatus For Cleaning Photomask App 20110023914 - Jeong; Yun-song ; et al.	2011-02-03
Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask Grant 7,812,929 - Lee , et al. October 12, 2	2010-10-12
Method of manufacturing rim type of photomask and photomask made by such method Grant 7,632,611 - Kim , et al. December 15, 2	2009-12-15
Method of manufacturing EUVL alternating phase-shift mask Grant 7,601,467 - Huh , et al. October 13, 2	2009-10-13
Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask App 20070069152 - Lee; Myoung-Soo ; et al.	2007-03-29
Method of manufacturing rim type of photomask and photomask made by such method App 20070020533 - Kim; Chang-hwan ; et al.	2007-01-25
Method of manufacturing EUVL alternating phase-shift mask App 20060240334 - Huh; Sung-min ; et al.	2006-10-26

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