| Patent | Date |
|---|
Sensor Configuration For Process Condition Measuring Devices
App 20220189803 - Quli; Farhat A. ; et al. | 2022-06-16 |
Instrumented Substrate Apparatus
App 20210262859 - Tas; Robert D. ; et al. | 2021-08-26 |
In-situ temperature sensing substrate, system, and method
Grant 10,900,843 - Jensen January 26, 2 | 2021-01-26 |
Process condition sensing device and method for plasma chamber
Grant 10,777,393 - Jensen , et al. Sept | 2020-09-15 |
Encapsulated Instrumented Substrate Apparatus for Acquiring Measurement Parameters in High Temperature Process Applications
App 20200203200 - Sun; Mei ; et al. | 2020-06-25 |
In-Situ Temperature Sensing Substrate, System, and Method
App 20190368944 - Jensen; Earl | 2019-12-05 |
Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
Grant 10,460,966 - Sun , et al. Oc | 2019-10-29 |
Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line
Grant 10,215,626 - Sun , et al. Feb | 2019-02-26 |
Process Condition Sensing Device And Method For Plasma Chamber
App 20180114681 - Jensen; Earl ; et al. | 2018-04-26 |
Method and System for Measuring Radiation and Temperature Exposure of Wafers Along a Fabrication Process Line
App 20180052045 - Sun; Mei ; et al. | 2018-02-22 |
Encapsulated Instrumented Substrate Apparatus for Acquiring Measurement Parameters in High Temperature Process Applications
App 20170365495 - Sun; Mei ; et al. | 2017-12-21 |
Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line
Grant 9,823,121 - Sun , et al. November 21, 2 | 2017-11-21 |
Method and system for measuring heat flux
Grant 9,719,867 - Sharratt , et al. August 1, 2 | 2017-08-01 |
Position sensitive substrate device
Grant 9,620,400 - Jensen , et al. April 11, 2 | 2017-04-11 |
Film thickness monitor
Grant 9,360,302 - Jensen , et al. June 7, 2 | 2016-06-07 |
Automated interface apparatus and method for use in semiconductor wafer handling systems
Grant 9,356,822 - Jensen May 31, 2 | 2016-05-31 |
Method and System for Measuring Radiation and Temperature Exposure of Wafers Along a Fabrication Process Line
App 20160138969 - Sun; Mei ; et al. | 2016-05-19 |
Thickness change monitor wafer for in situ film thickness monitoring
Grant 9,305,753 - Jensen , et al. April 5, 2 | 2016-04-05 |
Defect inspection apparatus, system, and method
Grant 9,304,160 - Jensen , et al. April 5, 2 | 2016-04-05 |
High temperature sensor wafer for in-situ measurements in active plasma
Grant 9,222,842 - Sun , et al. December 29, 2 | 2015-12-29 |
Wafer level spectrometer
Grant 9,140,604 - Jensen , et al. September 22, 2 | 2015-09-22 |
Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces
Grant 9,134,186 - Sun , et al. September 15, 2 | 2015-09-15 |
Position Sensitive Substrate Device
App 20150176980 - Jensen; Earl ; et al. | 2015-06-25 |
Process Condition Sensing Device And Method For Plasma Chamber
App 20150020972 - Jensen; Earl ; et al. | 2015-01-22 |
Method and System for Measuring Heat Flux
App 20140355643 - Sharratt; Stephen ; et al. | 2014-12-04 |
Process condition sensing device and method for plasma chamber
Grant 8,889,021 - Jensen , et al. November 18, 2 | 2014-11-18 |
Thickness Change Monitor Wafer For In Situ Film Thickness Monitoring
App 20140253928 - Jensen; Earl ; et al. | 2014-09-11 |
High Temperature Sensor Wafer For In-situ Measurements In Active Plasma
App 20140192840 - Sun; Mei ; et al. | 2014-07-10 |
Automated Interface Apparatus And Method For Use In Semiconductor Wafer Handling Systems
App 20140122654 - Jensen; Earl | 2014-05-01 |
Film Thickness Monitor
App 20130155390 - Jensen; Earl ; et al. | 2013-06-20 |
Wafer Level Spectrometer
App 20120318966 - Jensen; Earl ; et al. | 2012-12-20 |
Process Condition Measuring Device (pcmd) And Method For Measuring Process Conditions In A Workpiece Processing Tool Configured To Process Production Workpieces
App 20120203495 - Sun; Mei ; et al. | 2012-08-09 |
Process Condition Sensing Device And Method For Plasma Chamber
App 20110174777 - Jensen; Earl ; et al. | 2011-07-21 |
Non-contact Interface System
App 20110074341 - Jensen; Earl ; et al. | 2011-03-31 |
Integrated process condition sensing wafer and data analysis system
Grant 7,151,366 - Renken , et al. December 19, 2 | 2006-12-19 |
Integrated process condition sensing wafer and data analysis system
Grant 7,149,643 - Renken , et al. December 12, 2 | 2006-12-12 |
Integrated process condition sensing wafer and data analysis system
App 20050246127 - Renken, Wayne Glenn ; et al. | 2005-11-03 |
Integrated process condition sensing wafer and data analysis system
App 20040154417 - Renken, Wayne Glenn ; et al. | 2004-08-12 |
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