loadpatents
Patent applications and USPTO patent grants for Jeng; Esther.The latest application filed is for "feature fill with nucleation inhibition".
Patent | Date |
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Tungsten feature fill with nucleation inhibition Grant 11,410,883 - Chandrashekar , et al. August 9, 2 | 2022-08-09 |
Feature Fill With Nucleation Inhibition App 20220102208 - Chandrashekar; Anand ;   et al. | 2022-03-31 |
Tungsten Feature Fill App 20210327754 - Chandrashekar; Anand ;   et al. | 2021-10-21 |
Tungsten feature fill Grant 11,075,115 - Chandrashekar , et al. July 27, 2 | 2021-07-27 |
Feature Fill With Nucleation Inhibition App 20200185273 - Chandrashekar; Anand ;   et al. | 2020-06-11 |
Feature fill with nucleation inhibition Grant 10,580,695 - Chandrashekar , et al. | 2020-03-03 |
Tungsten Feature Fill With Nucleation Inhibition App 20190206731 - Chandrashekar; Anand ;   et al. | 2019-07-04 |
Tungsten feature fill with nucleation inhibition Grant 10,256,142 - Chandrashekar , et al. | 2019-04-09 |
Tungsten Feature Fill App 20190019725 - Chandrashekar; Anand ;   et al. | 2019-01-17 |
Tungsten feature fill Grant 10,103,058 - Chandrashekar , et al. October 16, 2 | 2018-10-16 |
Feature Fill With Nucleation Inhibition App 20180277431 - Chandrashekar; Anand ;   et al. | 2018-09-27 |
Feature fill with nucleation inhibition Grant 9,997,405 - Chandrashekar , et al. June 12, 2 | 2018-06-12 |
Tungsten Feature Fill App 20170278749 - Chandrashekar; Anand ;   et al. | 2017-09-28 |
Tungsten feature fill Grant 9,653,353 - Chandrashekar , et al. May 16, 2 | 2017-05-16 |
Tungsten Feature Fill App 20160190008 - Chandrashekar; Anand ;   et al. | 2016-06-30 |
Feature Fill With Nucleation Inhibition App 20160093528 - Chandrashekar; Anand ;   et al. | 2016-03-31 |
Tungsten Feature Fill With Nucleation Inhibition App 20160071764 - Chandrashekar; Anand ;   et al. | 2016-03-10 |
Tungsten feature fill Grant 9,240,347 - Chandrashekar , et al. January 19, 2 | 2016-01-19 |
Tungsten Feature Fill App 20150056803 - Chandrashekar; Anand ;   et al. | 2015-02-26 |
Systems and methods for controlling etch selectivity of various materials Grant 8,883,637 - Jeng , et al. November 11, 2 | 2014-11-11 |
Tungsten Feature Fill App 20130302980 - Chandrashekar; Anand ;   et al. | 2013-11-14 |
Tungsten Feature Fill With Nucleation Inhibition App 20130171822 - Chandrashekar; Anand ;   et al. | 2013-07-04 |
Systems And Methods For Controlling Etch Selectivity Of Various Materials App 20130005140 - Jeng; Esther ;   et al. | 2013-01-03 |
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