Patent | Date |
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Method of inspecting surface and method of manufacturing semiconductor device Grant 11,043,433 - Ryu , et al. June 22, 2 | 2021-06-22 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device App 20200203232 - RYU; Sung-yoon ;   et al. | 2020-06-25 |
Defect inspection method and defect inspection apparatus Grant 10,593,032 - Ryu , et al. | 2020-03-17 |
Scanning probe inspector Grant 10,585,115 - Oh , et al. | 2020-03-10 |
Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same Grant 10,527,556 - Rim , et al. J | 2020-01-07 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device App 20190214316 - RYU; Sung-yoon ;   et al. | 2019-07-11 |
Scanning Probe Inspector App 20190170788 - Oh; Duck Mahn ;   et al. | 2019-06-06 |
Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same Grant 10,281,410 - Rim , et al. | 2019-05-07 |
Method of inspecting surface and method of manufacturing semiconductor device Grant 10,249,544 - Ryu , et al. | 2019-04-02 |
Systems And Methods Of Testing Semiconductor Devices Using Simultaneously Scanning Of A Plurality Of Regions Therein And Methods Of Forming Semiconductor Devices Using The Same App 20180356349 - Rim; Min Ho ;   et al. | 2018-12-13 |
Optical Measuring Method And Apparatus, And Method Of Manufacturing Semiconductor Device Using The Same App 20180340894 - RIM; Min-Ho ;   et al. | 2018-11-29 |
Semiconductor Device Inspection Apparatus And Method Of Driving The Same App 20180106731 - RIM; MIN HO ;   et al. | 2018-04-19 |
Method Of Inspecting Surface And Method Of Manufacturing Semiconductor Device App 20180061718 - RYU; Sung-yoon ;   et al. | 2018-03-01 |
Defect Inspection Method And Defect Inspection Apparatus App 20180053295 - Ryu; Sung-Yoon ;   et al. | 2018-02-22 |
Wafer Inspection Apparatus Using Three-Dimensional Image App 20160261786 - Ahn; Jeong-ho ;   et al. | 2016-09-08 |
Method Of Inspecting A Substrate App 20100156446 - KIM; Chun-Yong ;   et al. | 2010-06-24 |
Wafer holder and wafer conveyor equipped with the same Grant 7,666,069 - Kim , et al. February 23, 2 | 2010-02-23 |
Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same Grant 7,428,328 - Jee , et al. September 23, 2 | 2008-09-23 |
Method and apparatus for inspecting a wafer surface Grant 7,310,140 - Eom , et al. December 18, 2 | 2007-12-18 |
Method of measuring critical dimension App 20070202615 - Lee; Byung-Sug ;   et al. | 2007-08-30 |
Wafer holder and wafer conveyor equipped with the same App 20070190904 - Kim; Tae-Kyoung ;   et al. | 2007-08-16 |
Method of inspecgin a leakage current characteristic of a dielectric layer App 20070188185 - Eom; Tae-Min ;   et al. | 2007-08-16 |
Wafer holder and wafer conveyor system equipped with the same Grant 7,220,173 - Kim , et al. May 22, 2 | 2007-05-22 |
Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method Grant 7,186,280 - Eom , et al. March 6, 2 | 2007-03-06 |
Method for monitoring a density profile of impurities Grant 7,186,577 - Jee , et al. March 6, 2 | 2007-03-06 |
Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method App 20060022698 - Eom; Tae-Min ;   et al. | 2006-02-02 |
Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same App 20060011837 - Jee; Yun-Jung ;   et al. | 2006-01-19 |
Wafer holder and wafer conveyor system equipped with the same App 20050221740 - Kim, Tae-Kyoung ;   et al. | 2005-10-06 |
Method and apparatus for inspecting a wafer surface App 20040263836 - Eom, Tae-Min ;   et al. | 2004-12-30 |
Method and apparatus for monitoring a density profile of impurities App 20040253750 - Jee, Yun-Jung ;   et al. | 2004-12-16 |