Patent | Date |
---|
Methods of inspecting samples with multiple beams of charged particles Grant 11,430,631 - Liu , et al. August 30, 2 | 2022-08-30 |
Inspection Method And System App 20220245780 - FANG; Wei ;   et al. | 2022-08-04 |
Inspection method and system Grant 11,250,559 - Fang , et al. February 15, 2 | 2022-02-15 |
Apparatus of plural charged-particle beams Grant 11,217,423 - Ren , et al. January 4, 2 | 2022-01-04 |
Local alignment point calibration method in die inspection Grant 11,043,356 - Fang , et al. June 22, 2 | 2021-06-22 |
Inspection Method And System App 20200302587 - FANG; Wei ;   et al. | 2020-09-24 |
Dynamic Determination Of A Sample Inspection Recipe Of Charged Particle Beam Inspection App 20200286710 - CHEN; Zhong-wei ;   et al. | 2020-09-10 |
Charged Particle Beam Apparatus App 20200251305 - Kind Code | 2020-08-06 |
Methods Of Inspecting Samples With Multiple Beams Of Charged Particles App 20200227233 - LIU; Kuo-Shih ;   et al. | 2020-07-16 |
Inspection method and system Grant 10,679,340 - Fang , et al. | 2020-06-09 |
Local Alignment Point Calibration Method in Die Inspection App 20200105497 - FANG; Wei ;   et al. | 2020-04-02 |
Charged particle beam apparatus Grant 10,586,681 - Chen , et al. | 2020-03-10 |
Local alignment point calibration method in die inspection Grant 10,497,538 - Fang , et al. De | 2019-12-03 |
Apparatus Of Plural Charged-particle Beams App 20190279842 - REN; Weiming ;   et al. | 2019-09-12 |
Method and system for fast inspecting defects Grant 10,380,731 - Fang , et al. A | 2019-08-13 |
Inspection Method And System App 20190147579 - FANG; Wei ;   et al. | 2019-05-16 |
Apparatus of plural charged-particle beams Grant 10,236,156 - Ren , et al. | 2019-03-19 |
Inspection method and system Grant 10,102,619 - Fang , et al. October 16, 2 | 2018-10-16 |
Local Alignment Point Calibration Method in Die Inspection App 20180247789 - FANG; Wei ;   et al. | 2018-08-30 |
Charged particle beam apparatus Grant 10,020,164 - Chen , et al. July 10, 2 | 2018-07-10 |
Inspection method and system Grant 9,965,844 - Fang , et al. May 8, 2 | 2018-05-08 |
Local alignment point calibration method in die inspection Grant 9,953,803 - Fang , et al. April 24, 2 | 2018-04-24 |
Method and system for fast inspecting defects Grant 9,541,824 - Fang , et al. January 10, 2 | 2017-01-10 |
Method and system for fast inspecting defects Grant 9,494,856 - Fang , et al. November 15, 2 | 2016-11-15 |
Apparatus of Plural Charged-Particle Beams App 20160284505 - Ren; Weiming ;   et al. | 2016-09-29 |
Method and system of classifying defects on a wafer Grant 9,436,988 - Fang , et al. September 6, 2 | 2016-09-06 |
Local Alignment Point Calibration Method in Die Inspection App 20160247660 - Fang; Wei ;   et al. | 2016-08-25 |
Dynamic focus adjustment with optical height detection apparatus in electron beam system Grant 9,400,176 - Wang , et al. July 26, 2 | 2016-07-26 |
Charged particle beam apparatus Grant 9,362,087 - Chen , et al. June 7, 2 | 2016-06-07 |
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 9,282,293 - Fang , et al. March 8, 2 | 2016-03-08 |
Charged Particle Beam Apparatus App 20150371820 - Chen; Zhongwei ;   et al. | 2015-12-24 |
Charged particle beam apparatus Grant 9,190,241 - Chen , et al. November 17, 2 | 2015-11-17 |
Charged particle beam apparatus Grant 9,177,758 - Chen , et al. November 3, 2 | 2015-11-03 |
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 9,100,553 - Fang , et al. August 4, 2 | 2015-08-04 |
Charged Particle Beam Apparatus App 20150155133 - Chen; Zhongwei ;   et al. | 2015-06-04 |
Charged Particle Beam Apparatus App 20150144788 - Chen; Zhongwei ;   et al. | 2015-05-28 |
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 9,041,795 - Fang , et al. May 26, 2 | 2015-05-26 |
Charged Particle Beam Apparatus App 20150083912 - Chen; Zhongwei ;   et al. | 2015-03-26 |
Method for examining a sample by using a charged particle beam Grant 8,937,281 - Zhao , et al. January 20, 2 | 2015-01-20 |
Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof Grant 8,923,601 - Fang , et al. December 30, 2 | 2014-12-30 |
Charged particle beam imaging assembly and imaging method thereof Grant 8,884,224 - Fang , et al. November 11, 2 | 2014-11-11 |
Method And System Of Classifying Defects On A Wafer App 20140321730 - FANG; WEI ;   et al. | 2014-10-30 |
Charged Particle Beam Apparatus App 20140291510 - Chen; Zhongwei ;   et al. | 2014-10-02 |
Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam System App 20140291517 - WANG; JOE ;   et al. | 2014-10-02 |
Method and system of classifying defects on a wafer Grant 8,805,054 - Fang , et al. August 12, 2 | 2014-08-12 |
Dynamic focus adjustment with optical height detection apparatus in electron beam system Grant 8,791,414 - Wang , et al. July 29, 2 | 2014-07-29 |
Structure for inspecting defects in word line array fabricated by SADP process and method thereof Grant 8,748,814 - Xiao , et al. June 10, 2 | 2014-06-10 |
Method and system for filtering noises in an image scanned by charged particles Grant 8,712,184 - Liao , et al. April 29, 2 | 2014-04-29 |
Charged particle beam inspection method Grant 8,692,214 - Zhao , et al. April 8, 2 | 2014-04-08 |
Method for inspecting localized image and system thereof Grant 8,606,017 - Fang , et al. December 10, 2 | 2013-12-10 |
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20130202186 - FANG; WEI ;   et al. | 2013-08-08 |
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20130188037 - FANG; WEI ;   et al. | 2013-07-25 |
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20130182939 - FANG; WEI ;   et al. | 2013-07-18 |
Method and system for measuring critical dimension and monitoring fabrication uniformity Grant 8,432,441 - Fang , et al. April 30, 2 | 2013-04-30 |
Method For Examining A Sample By Using A Charged Particle Beam App 20120273678 - Zhao; Yan ;   et al. | 2012-11-01 |
Method for examining a sample by using a charged particle beam Grant 8,299,431 - Zhao , et al. October 30, 2 | 2012-10-30 |
Method and apparatus for reducing substrate edge effect during inspection Grant 8,294,094 - Zhao , et al. October 23, 2 | 2012-10-23 |
Method And System For Measuring Critical Dimension And Monitoring Fabrication Uniformity App 20120212601 - FANG; WEI ;   et al. | 2012-08-23 |
Method for Inspecting Overlay Shift Defect during Semiconductor Manufacturing and Apparatus Thereof App 20120070067 - FANG; WEI ;   et al. | 2012-03-22 |
Method And System Of Classifying Defects On A Wafer App 20120027287 - FANG; Wei ;   et al. | 2012-02-02 |
E-beam defect review system Grant 8,094,924 - Jau , et al. January 10, 2 | 2012-01-10 |
Structure and method for determining a defect in integrated circuit manufacturing process Grant 8,089,297 - Xiao , et al. January 3, 2 | 2012-01-03 |
Method and system for determining a defect during charged particle beam inspection of a sample Grant 8,068,662 - Zhang , et al. November 29, 2 | 2011-11-29 |
Method and system for determining a defect during sample inspection involving charged particle beam imaging Grant 8,055,059 - Fang , et al. November 8, 2 | 2011-11-08 |
Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof Grant 8,050,490 - Xiao , et al. November 1, 2 | 2011-11-01 |
Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam system App 20110260055 - WANG; JOE ;   et al. | 2011-10-27 |
Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process Grant 7,973,283 - Wang , et al. July 5, 2 | 2011-07-05 |
Operation stage for wafer edge inspection and review Grant 7,919,760 - Jau , et al. April 5, 2 | 2011-04-05 |
Charged Particle Beam Inspection Method App 20110036981 - ZHAO; YAN ;   et al. | 2011-02-17 |
Charged particle beam imaging method and system thereof Grant 7,884,334 - Zhao , et al. February 8, 2 | 2011-02-08 |
Method For Examining A Sample By Using A Charged Particle Beam App 20100327160 - Zhao; Yan ;   et al. | 2010-12-30 |
Method for Inspecting Overlay Shift Defect during Semiconductor Manufacturing and Apparatus Thereof App 20100278416 - Xiao; Hong ;   et al. | 2010-11-04 |
Charged Particle Beam Imaging Assembly And Imaging Method Thereof App 20100258722 - Fang; Wei ;   et al. | 2010-10-14 |
Method And System For Determining A Defect During Charged Particle Beam Inspection Of A Sample App 20100246929 - ZHANG; ZHAO-LI ;   et al. | 2010-09-30 |
Charged Particle Beam Imaging Method And System Thereof App 20100181492 - ZHAO; Yan ;   et al. | 2010-07-22 |
Method And System Of Classifying Defects On A Wafer App 20100158346 - FANG; Wei ;   et al. | 2010-06-24 |
Method And System For Determining A Defect During Sample Inspection Involving Charged Particle Beam Imaging App 20100158317 - Fang; Wei ;   et al. | 2010-06-24 |
E-beam Defect Review System App 20100150429 - JAU; Jack ;   et al. | 2010-06-17 |
Operation Stage For Wafer Edge Inspection And Review App 20100140498 - JAU; JACK ;   et al. | 2010-06-10 |
Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process App 20100072364 - Wang; Joe ;   et al. | 2010-03-25 |
Cluster E-beam Lithography System App 20090121159 - HWANG; ARCHI ;   et al. | 2009-05-14 |
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Grant 7,474,001 - Zhao , et al. January 6, 2 | 2009-01-06 |
Method For Determining Abnormal Characteristics In Integrated Circuit Manufacturing Process App 20080267489 - Xiao; Hong ;   et al. | 2008-10-30 |
Password update systems and methods App 20070124807 - Jau; Jack | 2007-05-31 |
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing App 20060234496 - Zhao; Yan ;   et al. | 2006-10-19 |
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Grant 7,105,436 - Zhao , et al. September 12, 2 | 2006-09-12 |
Method and system for monitoring IC process App 20050152594 - Jau, Jack ;   et al. | 2005-07-14 |
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing App 20050026310 - Zhao, Yan ;   et al. | 2005-02-03 |
Using pure HTML to access database without refreshing page App 20040225633 - Jau, Jack | 2004-11-11 |
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Grant 6,815,345 - Zhao , et al. November 9, 2 | 2004-11-09 |
Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing App 20030136762 - Zhao, Yan ;   et al. | 2003-07-24 |