Patent | Date |
---|
Method of processing discharge gas discharged from production process Grant 9,815,707 - Izaki , et al. November 14, 2 | 2017-11-14 |
Method for refining hydrogen Grant 9,809,454 - Komiya , et al. November 7, 2 | 2017-11-07 |
Oil removing device and ammonia purification apparatus using the same Grant 9,707,507 - Arakawa , et al. July 18, 2 | 2017-07-18 |
Oil Removing Device And Ammonia Purification Apparatus Using The Same App 20160339377 - ARAKAWA; Satoshi ;   et al. | 2016-11-24 |
Palladium alloy membrane unit, storage structure thereof, and method of purifying hydrogen by using the same Grant 9,433,889 - Komiya , et al. September 6, 2 | 2016-09-06 |
Method For Refining Hydrogen App 20160115022 - KOMIYA; Yoshinao ;   et al. | 2016-04-28 |
Method Of Processing Discharge Gas Discharged From Production Process App 20160101987 - IZAKI; Kansei ;   et al. | 2016-04-14 |
Palladium Alloy Membrane Unit, Storage Structure Thereof, And Method Of Purifying Hydrogen By Using The Same App 20150196871 - KOMIYA; Yoshinao ;   et al. | 2015-07-16 |
Method of recovering ammonia and method of recycling ammonia by using the same Grant 8,889,090 - Izaki , et al. November 18, 2 | 2014-11-18 |
Method Of Processing Discharge Gas Discharged From Production Process Of Gallium Nitride Compound Semiconductor App 20140322124 - IZAKI; Kansei ;   et al. | 2014-10-30 |
Vapor phase epitaxy apparatus of group III nitride semiconductor Grant 8,679,254 - Iso , et al. March 25, 2 | 2014-03-25 |
Method Of Recovering Ammonia And Method Of Recycling Ammonia By Using The Same App 20130312456 - IZAKI; Kansei ;   et al. | 2013-11-28 |
Cleaning Apparatus And Cleaning Method For Components Of Metal Organic Chemical Vapor Deposition Device App 20130074876 - AKIYAMA; Toshio ;   et al. | 2013-03-28 |
Chemical vapor deposition apparatus Grant 8,277,893 - Ohori , et al. October 2, 2 | 2012-10-02 |
Vapor Phase Epitaxy Apparatus Of Group Iii Nitride Semiconductor App 20110180001 - ISO; Kenji ;   et al. | 2011-07-28 |
Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process Grant 7,489,857 - Takamatsu , et al. February 10, 2 | 2009-02-10 |
Method for clarifying exhaust gas Grant 7,300,640 - Ohtsuka , et al. November 27, 2 | 2007-11-27 |
Method of recovering a cleaning agent Grant 7,297,315 - Otsuka , et al. November 20, 2 | 2007-11-20 |
Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process Grant 7,297,322 - Takamatsu , et al. November 20, 2 | 2007-11-20 |
Production Apparatus For Producing Gallium Nitride Film Semiconductor And Cleaning Apparatus For Exhaust Gas App 20070128359 - OTSUKA; Kenji ;   et al. | 2007-06-07 |
Material for forming insulation film and film-forming method with the use of the material Grant 7,195,795 - Takamatsu , et al. March 27, 2 | 2007-03-27 |
Production apparatus for producing gallium nitride semiconductor film and cleaning apparatus for exhaust gas Grant 7,195,022 - Otsuka , et al. March 27, 2 | 2007-03-27 |
Vaporizer and apparatus for vaporizing and supplying App 20060125129 - Takamatsu; Yukichi ;   et al. | 2006-06-15 |
Vaporizer and apparatus for vaporizing and supplying Grant 7,036,801 - Takamatsu , et al. May 2, 2 | 2006-05-02 |
Decompositionally treating agent and decompositionally treating method for fluorocarbons Grant 6,960,552 - Otsuka , et al. November 1, 2 | 2005-11-01 |
Production method for producing gallium nitride film semiconductor and method of cleaning an exhaust gas App 20050163928 - Otsuka, Kenji ;   et al. | 2005-07-28 |
Method for vaporizing and supplying Grant 6,767,402 - Takamatsu , et al. July 27, 2 | 2004-07-27 |
Process for purifying ammonia Grant 6,749,819 - Otsuka , et al. June 15, 2 | 2004-06-15 |
Method of recovering a cleaning agent Grant 6,716,403 - Otsuka , et al. April 6, 2 | 2004-04-06 |
Chemical vapor deposition apparatus and chemical vapor deposition method Grant 6,666,921 - Sakai , et al. December 23, 2 | 2003-12-23 |
Vaporizer and apparatus for vaporizing and supplying App 20030209201 - Takamatsu, Yukichi ;   et al. | 2003-11-13 |
Cleaning process and cleaning agent for harmful gas Grant 6,638,489 - Otsuka , et al. October 28, 2 | 2003-10-28 |
Method for vaporizing and supplying App 20030111007 - Takamatsu, Yukichi ;   et al. | 2003-06-19 |
Chemical vapor deposition apparatus and chemical vapor deposition method App 20030015137 - Sakai, Shiro ;   et al. | 2003-01-23 |
Chemical vapor deposition apparatus and chemical vapor deposition method App 20020160112 - Sakai, Shiro ;   et al. | 2002-10-31 |
Vaporizer and apparatus for vaporizing and supplying Grant 6,473,563 - Takamatsu , et al. October 29, 2 | 2002-10-29 |
Production apparatus for producing gallium nitride film semiconductor and cleaning apparatus for exhaust gas App 20020136671 - Otsuka, Kenji ;   et al. | 2002-09-26 |
Vaporizer and apparatus for vaporizing and supplying App 20020067917 - Takamatsu, Yukichi ;   et al. | 2002-06-06 |
Cleaning process and cleaning agent for harmful gas App 20020061272 - Otsuka, Kenji ;   et al. | 2002-05-23 |
Harmful gas purifying column and method App 20020044900 - Otsuka, Kenji ;   et al. | 2002-04-18 |
Chemical vapor deposition apparatus and chemical vapor deposition method App 20020042191 - Sakai, Shiro ;   et al. | 2002-04-11 |
Process for purifying ammonia App 20020034467 - Otsuka, Kenji ;   et al. | 2002-03-21 |
Chemical vapor deposition apparatus and chemical vapor deposition process App 20010021593 - Sakai, Shiro ;   et al. | 2001-09-13 |
Sheet shaped heat generating body and method of manufacturing same Grant 6,127,294 - Koiso , et al. October 3, 2 | 2000-10-03 |
Process for preparing nitride film Grant 6,106,898 - Takamatsu , et al. August 22, 2 | 2000-08-22 |
Sheet type heating element and method of manufacturing the same Grant 5,975,074 - Koiso , et al. November 2, 1 | 1999-11-02 |
Cleaning process for harmful gas Grant 5,935,540 - Otsuka , et al. August 10, 1 | 1999-08-10 |
Dust removing apparatus and dust removing method Grant 5,895,521 - Otsuka , et al. April 20, 1 | 1999-04-20 |
Cleaning agent and cleaning process for harmful gas Grant 5,882,615 - Fukuda , et al. March 16, 1 | 1999-03-16 |
Process for cleaning harmful gas Grant 5,597,540 - Akita , et al. January 28, 1 | 1997-01-28 |
Trigger for regenerative substances and regenerative body with the trigger Grant 5,588,304 - Koiso , et al. December 31, 1 | 1996-12-31 |
Process for purifying halogen-containing gas Grant 5,589,148 - Otsuka , et al. December 31, 1 | 1996-12-31 |
Process for purifying hydrogen gas Grant 5,489,327 - Otsuka , et al. February 6, 1 | 1996-02-06 |
Cooling agent Grant 5,429,762 - Kitahara , et al. July 4, 1 | 1995-07-04 |
Sheet-shaped heat-generating body Grant 5,425,975 - Koiso , et al. June 20, 1 | 1995-06-20 |
Process for cleaning harmful gas Grant 5,417,948 - Iwata , et al. May 23, 1 | 1995-05-23 |
Refrigerant Grant 5,261,241 - Kitahara , et al. November 16, 1 | 1993-11-16 |
Process for purification of rare gas Grant 5,194,233 - Kitahara , et al. March 16, 1 | 1993-03-16 |
Heat generating body Grant 4,516,564 - Koiso , et al. May 14, 1 | 1985-05-14 |