loadpatents
name:-0.12686681747437
name:-0.10053491592407
name:-0.017186164855957
Jansen; Hans Patent Filings

Jansen; Hans

Patent Applications and Registrations

Patent applications and USPTO patent grants for Jansen; Hans.The latest application filed is for "lithographic apparatus and device manufacturing method".

Company Profile
23.152.141
  • Jansen; Hans - Eindhoven NL
  • Jansen; Hans - Velp NL
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Lithographic apparatus and device manufacturing method
Grant 10,962,891 - Lof , et al. March 30, 2
2021-03-30
Lithographic Apparatus And Device Manufacturing Method
App 20200225590 - LOF; Joeri ;   et al.
2020-07-16
Immersion liquid, exposure apparatus, and exposure process
Grant 10,712,675 - Jansen , et al.
2020-07-14
Lithographic apparatus and device manufacturing method
Grant 10,705,432 - Kolesnychenko , et al.
2020-07-07
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
Grant 10,620,546 - Verspay , et al.
2020-04-14
Lithographic apparatus and device manufacturing method
Grant 10,509,326 - Jansen , et al. Dec
2019-12-17
Lithographic apparatus and device manufacturing method
Grant 10,503,084 - Lof , et al. Dec
2019-12-10
Lithographic apparatus and device manufacturing method
Grant 10,488,759 - Streefkerk , et al. Nov
2019-11-26
Lithographic Apparatus And Device Manufacturing Method
App 20190324374 - STREEFKERK; Bob ;   et al.
2019-10-24
Lithographic apparatus and device manufacturing method
Grant 10,451,973 - Streefkerk , et al. Oc
2019-10-22
Lithographic apparatus and device manufacturing method
Grant 10,444,644 - Sengers , et al. Oc
2019-10-15
Lithographic Apparatus And Device Manufacturing Method
App 20190302631 - LOF; Joeri ;   et al.
2019-10-03
Lithographic apparatus and a method of operating the apparatus
Grant 10,429,741 - Bruijstens , et al. O
2019-10-01
Radiation source and lithographic apparatus
Grant 10,394,141 - Riepen , et al. A
2019-08-27
Lithographic Apparatus And Device Manufacturing Method Involving A Liquid Confinement Structure
App 20190258174 - VERSPAY; Jacobus Johannus Leonardus Hendricus ;   et al.
2019-08-22
Lithographic Apparatus And Device Manufacturing Method
App 20190212662 - KOLESNYCHENKO; Aleksey Yurievich ;   et al.
2019-07-11
Lithographic apparatus and device manufacturing method
Grant 10,345,712 - Streefkerk , et al. July 9, 2
2019-07-09
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
Grant 10,274,832 - Verspay , et al.
2019-04-30
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20190086814 - Bruijstens; Jeroen Peter Johannes ;   et al.
2019-03-21
Lithographic Apparatus And Device Manufacturing Method
App 20190086820 - SENGERS; Timotheus Franciscus ;   et al.
2019-03-21
Lithographic apparatus and device manufacturing method
Grant 10,234,768 - Kolesnychenko , et al.
2019-03-19
Lithographic apparatus and a method of operating the apparatus
Grant 10,175,585 - Watso , et al. J
2019-01-08
Lithographic Apparatus And Device Manufacturing Method Invovling A Liquid Confinement Structure
App 20180356735 - VERSPAY; Jacobus Johannus Leonardus Hendricus ;   et al.
2018-12-13
Lithographic apparatus and a method of operating the apparatus
Grant 10,151,984 - Bruijstens , et al. Dec
2018-12-11
Lithographic apparatus and device manufacturing method
Grant 10,146,143 - Sengers , et al. De
2018-12-04
Lithographic Apparatus And Device Manufacturing Method
App 20180246418 - Kolesnychenko; Aleksey Yurievich ;   et al.
2018-08-30
Lithographic Apparatus And Device Manufacturing Method
App 20180203364 - STREEFKERK; Bob ;   et al.
2018-07-19
Lithographic apparatus and device manufacturing method
Grant 9,989,861 - Kolesnychenko , et al. June 5, 2
2018-06-05
Lithographic Apparatus And Device Manufacturing Method
App 20180129143 - HOOGENDAM; Christiaan Alexander ;   et al.
2018-05-10
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
Grant 9,964,861 - Verspay , et al. May 8, 2
2018-05-08
Lithographic apparatus and device manufacturing method
Grant 9,952,515 - Streefkerk , et al. April 24, 2
2018-04-24
Lithographic Apparatus And Device Manufacturing Method
App 20180081282 - KOLESNYCHENKO; Aleksey Yurievich ;   et al.
2018-03-22
Lithographic Apparatus And Device Manufacturing Method Involving A Liquid Confinement Structure
App 20180046090 - VERSPAY; Jacobus Johannus Leonardus Hendricus ;   et al.
2018-02-15
Lithographic Apparatus And Device Manufacturing Method
App 20180046095 - SENGERS; Timotheus Franciscus ;   et al.
2018-02-15
Lithographic apparatus and device manufacturing method
Grant 9,885,965 - Hoogendam , et al. February 6, 2
2018-02-06
Immersion Liquid, Exposure Apparatus, And Exposure Process
App 20180004100 - Jansen; Hans ;   et al.
2018-01-04
Lithographic apparatus and device manufacturing method
Grant 9,829,799 - Kolesnychenko , et al. November 28, 2
2017-11-28
Radiation Source and Lithographic Apparatus
App 20170322499 - RIEPEN; Michel ;   et al.
2017-11-09
Lithographic apparatus and device manufacturing method
Grant 9,804,509 - Sengers , et al. October 31, 2
2017-10-31
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
Grant 9,798,247 - Verspay , et al. October 24, 2
2017-10-24
Lithographic apparatus and in-line cleaning apparatus
Grant 9,785,061 - De Graaf , et al. October 10, 2
2017-10-10
Lithographic Apparatus And Device Manufacturing Method
App 20170285488 - Jansen; Hans ;   et al.
2017-10-05
Immersion liquid, exposure apparatus, and exposure process
Grant 9,772,565 - Jansen , et al. September 26, 2
2017-09-26
Radiation source and lithographic apparatus
Grant 9,753,383 - Riepen , et al. September 5, 2
2017-09-05
Lithographic Apparatus And Device Manufacturing Method
App 20170242347 - HOOGENDAM; Christiaan Alexander ;   et al.
2017-08-24
Lithographic Apparatus And Device Manufacturing Method Involving A Liquid Confinement Structure
App 20170219938 - VERSPAY; Jacobus Johannus Leonardus Hendricus ;   et al.
2017-08-03
Lithographic Apparatus And Device Manufacturing Method
App 20170212422 - STREEFKERK; Bob ;   et al.
2017-07-27
Lithographic apparatus and device manufacturing method
Grant 9,703,210 - Jansen , et al. July 11, 2
2017-07-11
Lithographic Apparatus And Device Manufacturing Method
App 20170176876 - SENGERS; Timotheus Franciscus ;   et al.
2017-06-22
Lithographic Apparatus And Device Manufacturing Method
App 20170153557 - KOLESNYCHENKO; Aleksey Yurievich ;   et al.
2017-06-01
Lithographic Apparatus And Device Manufacturing Method
App 20170139333 - DIERICHS; Marcel Mathijs Theodore Marie ;   et al.
2017-05-18
Lithographic apparatus and device manufacturing method
Grant 9,645,507 - Verspay , et al. May 9, 2
2017-05-09
Lithographic apparatus and contamination removal or prevention method
Grant 9,599,908 - De Jong , et al. March 21, 2
2017-03-21
Lithographic apparatus and device manufacturing method
Grant 9,594,308 - Sengers , et al. March 14, 2
2017-03-14
Lithographic apparatus and device manufacturing method
Grant 9,588,442 - Hoogendam , et al. March 7, 2
2017-03-07
Lithographic apparatus and device manufacturing method
Grant 9,581,914 - Dierichs , et al. February 28, 2
2017-02-28
Lithographic apparatus and device manufacturing method
Grant 9,568,840 - Kolesnychenko , et al. February 14, 2
2017-02-14
Lithographic Apparatus And Device Manufacturing Method
App 20170010545 - LOF; Joeri ;   et al.
2017-01-12
Immersion Liquid, Exposure Apparatus, And Exposure Process
App 20160363873 - JANSEN; Hans ;   et al.
2016-12-15
Lithographic Apparatus And In-line Cleaning Apparatus
App 20160342098 - DE GRAAF; Roelof Frederik ;   et al.
2016-11-24
Lithographic apparatus and device manufacturing method
Grant 9,477,153 - Streefkerk , et al. October 25, 2
2016-10-25
Immersion liquid, exposure apparatus, and exposure process
Grant 9,454,088 - Jansen , et al. September 27, 2
2016-09-27
Lithographic Apparatus And Device Manufacturing Method
App 20160274473 - HOOGENDAM; Christiaan Alexander ;   et al.
2016-09-22
Lithographic apparatus and in-line cleaning apparatus
Grant 9,405,205 - De Graaf , et al. August 2, 2
2016-08-02
Lithographic apparatus and device manufacturing method
Grant 9,360,765 - Hoogendam , et al. June 7, 2
2016-06-07
Lithographic Apparatus And Device Manufacturing Method
App 20160124321 - Leonardus Hendricus VERSPAY; Jacobus Johannus ;   et al.
2016-05-05
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20160124319 - Bruijstens; Jeroen Peter Johannes ;   et al.
2016-05-05
Lithographic Apparatus And Device Manufacturing Method
App 20160085161 - KOLESNYCHENKO; Aleksey Yurievich ;   et al.
2016-03-24
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus
Grant 9,289,802 - De Jong , et al. March 22, 2
2016-03-22
Lithographic apparatus involving an immersion liquid supply system with an aperture
Grant 9,285,686 - Mertens , et al. March 15, 2
2016-03-15
Lithographic Apparatus And Device Manufacturing Method
App 20160070178 - SENGERS; Timotheus Franciscus ;   et al.
2016-03-10
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
Grant 9,261,797 - Verspay , et al. February 16, 2
2016-02-16
Immersion Liquid, Exposure Apparatus, And Exposure Process
App 20160033876 - JANSEN; Hans ;   et al.
2016-02-04
Lithographic Apparatus And Contamination Removal Or Prevention Method
App 20160033875 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al.
2016-02-04
Lithographic Apparatus And Device Manufacturing Method
App 20160026085 - STREEFKERK; Bob ;   et al.
2016-01-28
Lithographic Apparatus And Device Manufacturing Method
App 20160004171 - STREEFKERK; Bob ;   et al.
2016-01-07
Lithographic apparatus and device manufacturing method
Grant 9,213,247 - Sengers , et al. December 15, 2
2015-12-15
Lithographic apparatus and device manufacturing method involving a groove to collect liquid
Grant 9,207,543 - Kolesnychenko , et al. December 8, 2
2015-12-08
Lithographic Apparatus And Device Manufacturing Method
App 20150338748 - HOOGENDAM; Christiaan Alexander ;   et al.
2015-11-26
Radiation Source and Lithographic Apparatus
App 20150338753 - RIEPEN; Michel ;   et al.
2015-11-26
Lithographic Apparatus And In-line Cleaning Apparatus
App 20150323875 - DE GRAAF; Roelof Frederik ;   et al.
2015-11-12
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
Grant 9,176,371 - Bruijstens , et al. November 3, 2
2015-11-03
Immersion liquid, exposure apparatus, and exposure process
Grant 9,164,391 - Jansen , et al. October 20, 2
2015-10-20
Lithographic apparatus and contamination removal or prevention method
Grant 9,158,206 - De Jong , et al. October 13, 2
2015-10-13
Lithographic apparatus and device manufacturing method
Grant 9,134,622 - Streefkerk , et al. September 15, 2
2015-09-15
Lithographic apparatus and device manufacturing method
Grant 9,134,623 - Streefkerk , et al. September 15, 2
2015-09-15
Lithographic apparatus and device manufacturing method
Grant 9,097,987 - Hoogendam , et al. August 4, 2
2015-08-04
Lithographic Apparatus And Device Manufacturing Method
App 20150205214 - DIERICHS; Marcel Mathijs Theodore Marie ;   et al.
2015-07-23
Lithographic apparatus and in-line cleaning apparatus
Grant 9,036,128 - De Graaf , et al. May 19, 2
2015-05-19
Lithographic apparatus and device manufacturing method
Grant 9,025,127 - Dierichs , et al. May 5, 2
2015-05-05
Lithographic Apparatus And Device Manufacturing Method
App 20150116677 - Mertens; Jeroen Johannes Sophia Maria ;   et al.
2015-04-30
Lithographic Apparatus And Device Manufacturing Method
App 20150116675 - JANSEN; Hans ;   et al.
2015-04-30
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system
Grant 9,019,466 - Leenders , et al. April 28, 2
2015-04-28
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
Grant 9,013,672 - De Jong , et al. April 21, 2
2015-04-21
Immersion Liquid, Exposure Apparatus, And Exposure Process
App 20150056559 - JANSEN; Hans ;   et al.
2015-02-26
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20150055102 - WATSO; Robert Douglas ;   et al.
2015-02-26
Lithographic apparatus and device manufacturing method
Grant 8,953,144 - Dierichs , et al. February 10, 2
2015-02-10
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
Grant 8,947,629 - De Jong , et al. February 3, 2
2015-02-03
Lithographic apparatus and device manufacturing method
Grant 8,941,811 - Jansen , et al. January 27, 2
2015-01-27
Lithographic apparatus and device manufacturing method involving a resistivity sensor
Grant 8,937,704 - Mertens , et al. January 20, 2
2015-01-20
Lithographic Apparatus And Device Manufacturing Method
App 20140375973 - STREEFKERK; Bob ;   et al.
2014-12-25
Lithographic apparatus and device manufacturing method
Grant 8,902,404 - Stavenga , et al. December 2, 2
2014-12-02
Lithographic Apparatus And Device Manufacturing Method
App 20140335457 - VERSPAY; Jacobus Johannus Leonardus Hendricus ;   et al.
2014-11-13
Lithographic Apparatus And Device Manufacturing Method
App 20140313494 - SENGERS; Timotheus Franciscus ;   et al.
2014-10-23
Lithographic apparatus and device manufacturing method
Grant 8,860,924 - Streefkerk , et al. October 14, 2
2014-10-14
Immersion liquid, exposure apparatus, and exposure process
Grant 8,859,188 - Jansen , et al. October 14, 2
2014-10-14
Lithographic Apparatus And Device Manufacturing Method
App 20140253890 - KOLESNYCHENKO; Aleksey Yurievich ;   et al.
2014-09-11
Lithographic apparatus and a method of operating the apparatus
Grant 8,823,918 - Watso , et al. September 2, 2
2014-09-02
Immersion lithography apparatus
Grant 8,817,227 - Stavenga , et al. August 26, 2
2014-08-26
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
Grant 8,817,231 - Verspay , et al. August 26, 2
2014-08-26
Lithographic Apparatus And Device Manufacturing Method
App 20140233004 - Streefkerk; Bob ;   et al.
2014-08-21
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid
Grant 8,755,033 - Kolesnychenko , et al. June 17, 2
2014-06-17
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
Grant 8,730,447 - Bruijstens , et al. May 20, 2
2014-05-20
Lithographic apparatus and device manufacturing method
Grant 8,711,333 - Sengers , et al. April 29, 2
2014-04-29
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid
Grant 8,704,998 - Kolesnychenko , et al. April 22, 2
2014-04-22
Lithographic Apparatus And Device Manufacturing Method
App 20140098357 - STREEFKERK; Bob ;   et al.
2014-04-10
Lithographic apparatus and device manufacturing method
Grant 8,687,168 - De Graaf , et al. April 1, 2
2014-04-01
Lithographic apparatus and device manufacturing method
Grant 8,638,419 - Jansen , et al. January 28, 2
2014-01-28
Lithographic apparatus and device manufacturing method
Grant 8,634,056 - Streefkerk , et al. January 21, 2
2014-01-21
Lithographic apparatus and device manufacturing method
Grant 8,629,971 - Dierichs , et al. January 14, 2
2014-01-14
Lithographic apparatus and a method of operating the apparatus
Grant 8,564,757 - Jansen , et al. October 22, 2
2013-10-22
Lithographic apparatus and device manufacturing method
Grant 8,547,519 - Streefkerk , et al. October 1, 2
2013-10-01
Lithographic Apparatus And Device Manufacturing Method
App 20130235358 - HOOGENDAM; Christiaan Alexander ;   et al.
2013-09-12
Lithographic apparatus and device manufacturing method
Grant 8,481,978 - Jansen , et al. July 9, 2
2013-07-09
Lithographic apparatus and device manufacturing method
Grant 8,462,313 - Jacobs , et al. June 11, 2
2013-06-11
Lithographic apparatus and device manufacturing method
Grant 8,446,568 - Derksen , et al. May 21, 2
2013-05-21
Lithographic apparatus and a method of operating the apparatus
Grant 8,432,531 - Hoekerd , et al. April 30, 2
2013-04-30
Lithographic apparatus and methods
Grant 8,427,627 - Kivits , et al. April 23, 2
2013-04-23
Lithographic Apparatus And Device Manufacturing Method
App 20130070219 - STREEFKERK; Bob ;   et al.
2013-03-21
Lithographic Apparatus And In-line Cleaning Apparatus
App 20120281190 - DE GRAAF; Roelof Frederik ;   et al.
2012-11-08
Lithographic apparatus and device manufacturing method
Grant 8,248,577 - Streefkerk , et al. August 21, 2
2012-08-21
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
Grant 8,246,838 - Verhagen , et al. August 21, 2
2012-08-21
Lithographic apparatus and in-line cleaning apparatus
Grant 8,243,255 - De Graaf , et al. August 14, 2
2012-08-14
Lithographic apparatus and device manufacturing method
Grant 8,233,135 - Jansen , et al. July 31, 2
2012-07-31
Lithographic apparatus and device manufacturing method
Grant 8,142,852 - Mertens , et al. March 27, 2
2012-03-27
Lithographic apparatus and device manufacturing method
Grant 8,138,486 - Jansen , et al. March 20, 2
2012-03-20
Lithographic Apparatus And Device Manufacturing Method
App 20120048193 - MERTENS; Jeroen Johannes Sophia Maria ;   et al.
2012-03-01
Lithographic apparatus and device manufacturing method
Grant 8,115,899 - Jansen , et al. February 14, 2
2012-02-14
Lithographic Apparatus And Device Manufacturing Method
App 20120013874 - DIERICHS; Marcel Mathijs Theodore Marie ;   et al.
2012-01-19
Lithographic Apparatus And Device Manufacturing Method
App 20120013867 - KOLESNYCHENKO; Aleksey Yurievich ;   et al.
2012-01-19
Lithographic Apparatus And Device Manufacturing Method
App 20120013870 - DIERICHS; Marcel Mathijs Theodore Marie ;   et al.
2012-01-19
Lithographic Apparatus And Device Manufacturing Method
App 20120008119 - JANSEN; Hans ;   et al.
2012-01-12
Lithographic Apparatus And Device Manufacturing Method
App 20120008115 - Verhagen; Martinus Cornelis Maria ;   et al.
2012-01-12
Lithographic Apparatus And Device Manufacturing Method
App 20110292358 - STAVENGA; Marco Koert ;   et al.
2011-12-01
Cleaning Device And A Lithographic Apparatus Cleaning Method
App 20110292359 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al.
2011-12-01
Lithographic Apparatus And Device Manufacturing Method
App 20110273677 - STREEFKERK; Bob ;   et al.
2011-11-10
Lithographic apparatus and device manufacturing method
Grant 8,054,445 - Jansen , et al. November 8, 2
2011-11-08
Lithographic apparatus and device manufacturing method
Grant 8,045,137 - Verhagen , et al. October 25, 2
2011-10-25
Lithographic Apparatus And Lithographic Apparatus Cleaning Method
App 20110222034 - STAVENGA; Marco Koert ;   et al.
2011-09-15
Lithographic apparatus and device manufacturing method
Grant 8,018,573 - Stavenga , et al. September 13, 2
2011-09-13
Cleaning device and a lithographic apparatus cleaning method
Grant 8,011,377 - De Jong , et al. September 6, 2
2011-09-06
Method for preventing deposit forming on guide rollers
Grant 8,003,029 - Jansen , et al. August 23, 2
2011-08-23
Lithographic Apparatus And Contamination Removal Or Prevention Method
App 20110188013 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al.
2011-08-04
Lithographic Apparatus And Device Manufacturing Method
App 20110188015 - DE GRAAF; Roelof Frederik ;   et al.
2011-08-04
Lithographic Apparatus And Device Manufacturing Method
App 20110183257 - JANSEN; Hans ;   et al.
2011-07-28
Lithographic apparatus and lithographic apparatus cleaning method
Grant 7,969,548 - Stavenga , et al. June 28, 2
2011-06-28
Fluid Filtration Method, Fluid Filtered Thereby, Lithographic Apparatus And Device Manufacutring Method
App 20110136064 - Verhagen; Martinus Cornelis Maria ;   et al.
2011-06-09
Lithographic Apparatus And Device Manufacturing Method
App 20110122376 - Derksen; Antonius Theodorus Anna Maria ;   et al.
2011-05-26
Lithographic Apparatus And Device Manufacturing Method
App 20110116061 - KOLESNYCHENKO; Aleksey Yurievich ;   et al.
2011-05-19
Lithographic Apparatus And Device Manufacturing Method
App 20110109887 - Jansen; Hans ;   et al.
2011-05-12
Lithographic apparatus and device manufacturing method
Grant 7,932,999 - Hoogendam , et al. April 26, 2
2011-04-26
Lithographic Apparatus And Device Manufacturing Method
App 20110090474 - JANSEN; Hans ;   et al.
2011-04-21
Lithographic apparatus and device manufacturing method
Grant 7,929,112 - De Graaf , et al. April 19, 2
2011-04-19
Lithographic apparatus and device manufacturing method
Grant 7,928,407 - Jansen , et al. April 19, 2
2011-04-19
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20110080567 - HOEKERD; Kornelis Tijmen ;   et al.
2011-04-07
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
Grant 7,914,687 - Verhagen , et al. March 29, 2
2011-03-29
Lithographic apparatus and contamination removal or prevention method
Grant 7,916,269 - De Jong , et al. March 29, 2
2011-03-29
Lithographic Apparatus And Device Manufacturing Method
App 20110058148 - BASELMANS; Johannes Jacobus Matheus ;   et al.
2011-03-10
Cleaning device and a lithographic apparatus cleaning method
Grant 7,900,641 - De Jong , et al. March 8, 2
2011-03-08
Lithographic apparatus and device manufacturing method
Grant 7,898,642 - Kolesnychenko , et al. March 1, 2
2011-03-01
Lithographic apparatus and device manufacturing method
Grant 7,880,860 - Jansen , et al. February 1, 2
2011-02-01
Lithographic Apparatus And Device Manufacturing Method
App 20110007287 - JACOBS; Johannes Henricus Wilhelmus ;   et al.
2011-01-13
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20100328634 - Jansen; Bauke ;   et al.
2010-12-30
Lithographic apparatus and device manufacturing method
Grant 7,834,977 - Baselmans , et al. November 16, 2
2010-11-16
Lithographic Apparatus And Device Manufacturing Method
App 20100270709 - MERTENS; Jeroen Johannes Sophia Maria ;   et al.
2010-10-28
Lithographic Apparatus And Device Manufacturing Method
App 20100265476 - Dierichs; Marcel Mathijs Theodore Marie ;   et al.
2010-10-21
Lithographic apparatus and device manufacturing method
Grant 7,779,781 - Mertens , et al. August 24, 2
2010-08-24
Lithographic Apparatus And Device Manufacturing Method
App 20100177292 - VERSPAY; Jacobus Johannus Leonardus Hendricus ;   et al.
2010-07-15
Lithographic apparatus and device manufacturing method
Grant 7,751,032 - Jansen , et al. July 6, 2
2010-07-06
Lithographic Apparatus And Device Manufacturing Method
App 20100165319 - Jacobs; Hernes ;   et al.
2010-07-01
Lithographic apparatus and device manufacturing method
Grant 7,733,459 - Dierichs , et al. June 8, 2
2010-06-08
Lithographic apparatus and device manufacturing method
Grant 7,710,537 - Verspay , et al. May 4, 2
2010-05-04
Lithographic Apparatus And A Method Of Removing Contamination
App 20100097587 - Petrus De Jong; Anthonius Martinus Cornelis ;   et al.
2010-04-22
Method For Preventing Deposit Forming On Guide Rollers
App 20100089018 - Jansen; Hans ;   et al.
2010-04-15
Lithographic Apparatus And Method Of Generating The Apparatus
App 20100066988 - Bruijstens; Jeroen Peter Johannes ;   et al.
2010-03-18
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20100066987 - BRUIJSTENS; Jeroen Peter Johannes ;   et al.
2010-03-18
Lithographic Apparatus And Device Manufacturing Method
App 20100044593 - JANSEN; Hans ;   et al.
2010-02-25
Lithographic apparatus and device manufacturing method
Grant 7,656,502 - Van Der Schoot , et al. February 2, 2
2010-02-02
Lithographic apparatus and device manufacturing method
Grant 7,652,751 - Baselmans , et al. January 26, 2
2010-01-26
Lithographic apparatus and device manufacturing method
Grant 7,633,073 - Jansen , et al. December 15, 2
2009-12-15
Lithographic Apparatus And Methods
App 20090296052 - KIVITS; Koen ;   et al.
2009-12-03
Antitracking Aramid Yarn
App 20090285537 - Willemsen; Stephanus ;   et al.
2009-11-19
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20090284715 - Watso; Robert Douglas ;   et al.
2009-11-19
Lithographic Apparatus And Device Manufacturing Method
App 20090251674 - Sengers; Timotheus Franciscus ;   et al.
2009-10-08
Lithographic Apparatus And Device Manufacturing Method
App 20090207397 - Streefkerk; Bob ;   et al.
2009-08-20
Lithographic apparatus and in-line cleaning apparatus
App 20090195761 - De Graaf; Roelof Frederik ;   et al.
2009-08-06
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus
App 20090174871 - Petrus De Jong; Anthonius Martinus Cornelis ;   et al.
2009-07-09
Cleaning apparatus and immersion lithographic apparatus
App 20090174870 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al.
2009-07-09
Lithographic apparatus and device manufacturing method
Grant 7,557,901 - Sengers , et al. July 7, 2
2009-07-07
Immersion Liquid, Exposure Apparatus, and Exposure Process
App 20090134488 - Jansen; Hans ;   et al.
2009-05-28
Lithographic Apparatus And Device Manufacturing Method
App 20090115984 - JANSEN; HANS ;   et al.
2009-05-07
Immersion lithography apparatus
App 20090115983 - Stavenga; Marco Koert ;   et al.
2009-05-07
Lithographic apparatus and device manufacturing method
Grant 7,528,929 - Streefkerk , et al. May 5, 2
2009-05-05
Lithographic apparatus and device manufacturing method
App 20090073408 - De Graaf; Roelof Frederik ;   et al.
2009-03-19
Lithographic Apparatus And Contamination Removal Or Prevention Method
App 20090025753 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al.
2009-01-29
Lithographic Apparatus and Contamination Removal or Prevention Method
App 20090027635 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al.
2009-01-29
Lithographic Apparatus, Reflective Member And A Method of Irradiating The Underside Of A Liquid Supply System
App 20090027636 - LEENDERS; Martinus Hendrikus Antonius ;   et al.
2009-01-29
Cleaning device and a lithographic apparatus cleaning method
App 20090015804 - De Jong; Anthonius Martinus ;   et al.
2009-01-15
Substrates and methods of using those substrates
App 20090014030 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al.
2009-01-15
Lithographic apparatus and device manufacturing method
Grant 7,468,779 - De Graaf , et al. December 23, 2
2008-12-23
Lithographic apparatus and device manufacturing method
App 20080291407 - Verhagen; Martinus Cornelis Maria ;   et al.
2008-11-27
Cleaning device, a lithographic apparatus and a lithographic cleaning method
App 20080284990 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al.
2008-11-20
Cleaning device and a lithographic apparatus cleaning method
App 20080271747 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al.
2008-11-06
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
App 20080273181 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al.
2008-11-06
Lithographic apparatus and device manufacturing method
App 20080259294 - Verspay; Jacobus Johannus Leonardus Hendricus ;   et al.
2008-10-23
Lithographic apparatus and device manufacturing method
App 20080252866 - Jansen; Hans ;   et al.
2008-10-16
Lithographic apparatus and device manufacturing method
App 20080218711 - Baselmans; Johannes Jacobus Matheus ;   et al.
2008-09-11
Lithographic apparatus and device manufacturing method
Grant 7,423,720 - Verspay , et al. September 9, 2
2008-09-09
Lithographic apparatus and device manufacturing method
App 20080192219 - Baselmans; Johannes Jacobus Matheus ;   et al.
2008-08-14
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
App 20080187874 - Verhagen; Martinus Cornelis Maria ;   et al.
2008-08-07
Lithographic apparatus and device manufacturing method
Grant 7,403,261 - Jansen , et al. July 22, 2
2008-07-22
Lithographic apparatus and device manufacturing method
Grant 7,397,533 - Verhagen , et al. July 8, 2
2008-07-08
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
Grant 7,378,025 - Verhagen , et al. May 27, 2
2008-05-27
Lithographic apparatus and device manufacturing method
Grant 7,379,159 - Baselmans , et al. May 27, 2
2008-05-27
Lithographic apparatus and device manufacturing method
Grant 7,375,796 - Baselmans , et al. May 20, 2
2008-05-20
Lithographic apparatus and device manufacturing method
App 20080073602 - Jacobs; Hernes ;   et al.
2008-03-27
Lithographic apparatus and lithographic apparatus cleaning method
App 20080049201 - Stavenga; Marco Koert ;   et al.
2008-02-28
Lithographic apparatus and device manufacturing method
App 20080002162 - Jansen; Hans ;   et al.
2008-01-03
Lithographic apparatus and lithographic apparatus cleaning method
App 20070285631 - Stavenga; Marco Koert ;   et al.
2007-12-13
Sensor shield
Grant 7,248,334 - Baselmans , et al. July 24, 2
2007-07-24
Lithographic apparatus and device manufacturing method
App 20070114451 - Jansen; Hans ;   et al.
2007-05-24
Lithographic apparatus and device manufacturing method
App 20070114452 - Jansen; Hans ;   et al.
2007-05-24
Lithographic apparatus and device manufacturing method
App 20070097343 - Sengers; Thimotheus Franciscus ;   et al.
2007-05-03
Apparatus with compartment for high vacuum and use of construction element for constructing a compartment for high vacuum
Grant 7,196,767 - Ritzen , et al. March 27, 2
2007-03-27
Lithographic apparatus and device manufacturing method
App 20070041001 - Jansen; Hans ;   et al.
2007-02-22
Lithographic apparatus and device manufacturing method
App 20060290908 - De Graaf; Roelof Frederik ;   et al.
2006-12-28
Lithographic apparatus and device manufacturing method
App 20060268250 - Maria Derksen; Antonius Theodorus Anna ;   et al.
2006-11-30
Lithographic apparatus and device manufacturing method
App 20060250601 - Streefkerk; Bob ;   et al.
2006-11-09
Lithographic apparatus and device manufacturing method
Grant 7,110,081 - Hoogendam , et al. September 19, 2
2006-09-19
Lithographic apparatus and device manufacturing method
App 20060187427 - Stavenga; Marco Koert ;   et al.
2006-08-24
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
App 20060186057 - Verhagen; Martinus Cornelis Maria ;   et al.
2006-08-24
Lithographic apparatus and device manufacturing method
App 20060132731 - Jansen; Hans ;   et al.
2006-06-22
Lithographic apparatus and device manufacturing method
App 20060126037 - Jansen; Hans ;   et al.
2006-06-15
Sensor shield
App 20060119816 - Baselmans; Johannes Jacobus Matheus ;   et al.
2006-06-08
Lithographic apparatus and device manufacturing method
App 20060119809 - Verhagen; Martinus Cornelis Maria ;   et al.
2006-06-08
Lithographic apparatus and device manufacturing method
App 20060103821 - Hendricus Verspay; Jacobus Johannus Leonardus ;   et al.
2006-05-18
Lithographic apparatus, device manufacturing method and device manufactured thereby
Grant 7,034,917 - Baselmans , et al. April 25, 2
2006-04-25
Apparatus with compartment for high vacuum and use of construction element for constructing a compartment for high vacuum
App 20060055901 - Ritzen; Raymond Johannes Elisabeth ;   et al.
2006-03-16
Lithographic apparatus and device manufacturing method
App 20050243292 - Baselmans, Johannes Jacobus Matheus ;   et al.
2005-11-03
Lithographic apparatus and device manufacturing method
App 20050231694 - Kolesnychenko, Aleksey Yurievich ;   et al.
2005-10-20
Lithographic apparatus, device manufacturing method and device manufactured thereby
App 20050219482 - Baselmans, Johannes Jacobus Matheus ;   et al.
2005-10-06
Lithographic apparatus and device manufacturing method
App 20050219483 - Baselmans, Johannes Jacobus Matheus ;   et al.
2005-10-06
Lithographic apparatus and device manufacturing method
App 20050175776 - Streefkerk, Bod ;   et al.
2005-08-11
Lithographic apparatus and device manufacturing method
App 20050078286 - Dierichs, Marcel Mathijs Theodore Marie ;   et al.
2005-04-14
Lithographic apparatus and device manufacturing method
App 20050048220 - Mertens, Jeroen Johannes Sophia Maria ;   et al.
2005-03-03
Lithographic apparatus and device manufacturing method
App 20050041225 - Sengers, Thimotheus Franciscus ;   et al.
2005-02-24
Lithographic apparatus and device manufacturing method
App 20050036121 - Hoogendam, Christiaan Alexander ;   et al.
2005-02-17

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