Janik; Gary R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Janik; Gary R..The latest application filed is for "multi-technique thin film analysis tool".
- Janik; Gary R. - Palo Alto CA
- Janik; Gary R. - Santa Barbara CA
- Janik; Gary R. - Charlottesville VA
| Patent | Date |
|---|---|
| Scatterometry metrology using inelastic scattering Grant 7,903,260 - Janik March 8, 2 | 2011-03-08 |
| Scatterometry metrology using inelastic scattering Grant 7,688,454 - Janik March 30, 2 | 2010-03-30 |
| Dynamic measurement control Grant 7,606,677 - Janik , et al. October 20, 2 | 2009-10-20 |
| Electrical measurements on semiconductors using corona and microwave techniques Grant 7,521,946 - Janik April 21, 2 | 2009-04-21 |
| Scatterometry metrology using inelastic scattering Grant 7,433,056 - Janik October 7, 2 | 2008-10-07 |
| Large collection angle x-ray monochromators for electron probe microanalysis Grant 7,427,757 - Janik , et al. September 23, 2 | 2008-09-23 |
| Method and system for measuring deep trenches in silicon Grant 7,369,235 - Janik , et al. May 6, 2 | 2008-05-06 |
| Laser-based cleaning device for film analysis tool Grant 7,253,901 - Janik , et al. August 7, 2 | 2007-08-07 |
| Laser-based cleaning device for film analysis tool Grant 7,202,951 - Janik , et al. April 10, 2 | 2007-04-10 |
| Patterned substrate surface mapping Grant 7,196,801 - Janik , et al. March 27, 2 | 2007-03-27 |
| Methods and systems for preparing a sample for thin film analysis Grant 7,190,441 - McWhirter , et al. March 13, 2 | 2007-03-13 |
| X-ray imaging for patterned film measurement Grant 7,166,838 - Janik January 23, 2 | 2007-01-23 |
| X-ray reflectivity system with variable spot Grant 7,139,365 - Janik November 21, 2 | 2006-11-21 |
| Method for measuring gate dielectric properties for three dimensional transistors Grant 7,109,735 - Janik , et al. September 19, 2 | 2006-09-19 |
| Film measurement with interleaved laser cleaning Grant 7,110,113 - Janik , et al. September 19, 2 | 2006-09-19 |
| Angle resolved x-ray detection Grant 7,075,073 - Janik , et al. July 11, 2 | 2006-07-11 |
| X-ray metrology using a transmissive x-ray optical element Grant 7,072,442 - Janik July 4, 2 | 2006-07-04 |
| Multi-technique thin film analysis tool Grant 7,039,158 - Janik , et al. May 2, 2 | 2006-05-02 |
| Light element measurement Grant 7,006,596 - Janik February 28, 2 | 2006-02-28 |
| Optical film topography and thickness measurement Grant 6,999,180 - Janik , et al. February 14, 2 | 2006-02-14 |
| Multi-technique thin film analysis tool Grant 6,816,570 - Janik , et al. November 9, 2 | 2004-11-09 |
| X-ray reflectivity measurement Grant 6,711,232 - Janik March 23, 2 | 2004-03-23 |
| Multi-technique thin film analysis tool App 20030169846 - Janik, Gary R. ; et al. | 2003-09-11 |
| Laser-based cleaning device for film analysis tool App 20030137662 - Janik, Gary R. ; et al. | 2003-07-24 |
| Light scattering measurement cell for very small volumes Grant 5,530,540 - Wyatt , et al. June 25, 1 | 1996-06-25 |
| Laser liquid flow cell manifold system and method for assembly Grant 5,404,217 - Janik , et al. April 4, 1 | 1995-04-04 |
| Frequency modulation spectroscopy using dual frequency modulation and detection Grant 4,765,736 - Gallagher , et al. August 23, 1 | 1988-08-23 |
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