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Patent applications and USPTO patent grants for Jang; Sungkun.The latest application filed is for "photoresist dispensing module and photoresist coating system having the same".
Patent | Date |
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Method and system for managing liquid supply Grant 10,854,484 - Kim , et al. December 1, 2 | 2020-12-01 |
Photoresist Dispensing Module And Photoresist Coating System Having The Same App 20200218155 - LIM; JONG-KILL ;   et al. | 2020-07-09 |
Exhaust Module For Wafer Baking Apparatus And Wafer Processing System Having The Same App 20200197851 - KWON; BYUNG-IN ;   et al. | 2020-06-25 |
Method Of Heating Soc Film On Wafer And Heating Apparatus Using The Same App 20200203151 - YOO; JIYONG ;   et al. | 2020-06-25 |
Track System And Method Of Processing Semiconductor Wafers App 20200194297 - JANG; SUNGKUN ;   et al. | 2020-06-18 |
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