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Patent applications and USPTO patent grants for Jang; Soo Ouk.The latest application filed is for "point etching module using annular surface dielectric barrier discharge apparatus and method for control etching profile of point etching module".
Patent | Date |
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Atomic layer polishing method and device therefor Grant 11,268,191 - Choi , et al. March 8, 2 | 2022-03-08 |
Point Etching Module Using Annular Surface Dielectric Barrier Discharge Apparatus And Method For Control Etching Profile Of Point Etching Module App 20200402810 - SEOK; Dong Chan ;   et al. | 2020-12-24 |
Atomic Layer Polishing Method And Device Therefor App 20200216954 - CHOI; Yong Sup ;   et al. | 2020-07-09 |
Microwave antenna for generating plasma Grant 8,648,534 - You , et al. February 11, 2 | 2014-02-11 |
Microwave Antenna For Generating Plasma App 20120153825 - You; Hyun Jong ;   et al. | 2012-06-21 |
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