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Position adjusting unit of optical element and maskless exposure apparatus including the same Grant 10,241,420 - Kim , et al. | 2019-03-26 |
Position Adjusting Unit Of Optical Element And Maskless Exposure Apparatus Including The Same App 20180164687 - KIM; Tae-Hyun ;   et al. | 2018-06-14 |
Defect Inspection System, Method Of Inspecting Defects, And Method Of Fabricating Semiconductor Device Using The Method App 20180073979 - CHO; Seongkeun ;   et al. | 2018-03-15 |
Fixing module for fixing an optical system to an optical apparatus and an optical apparatus including the same Grant 9,897,772 - Hong , et al. February 20, 2 | 2018-02-20 |
Maskless lithographic apparatus measuring accumulated amount of light Grant 9,891,537 - Chu , et al. February 13, 2 | 2018-02-13 |
Maskless Lithographic Apparatus Measuring Accumulated Amount Of Light App 20170261862 - CHU; Ji Young ;   et al. | 2017-09-14 |
Maskless exposure device and method for compensating cumulative illumination using the same Grant 9,726,982 - Lee , et al. August 8, 2 | 2017-08-08 |
Apparatus and method of controlling chuck, and exposure apparatus and control method thereof Grant 9,507,272 - Kim , et al. November 29, 2 | 2016-11-29 |
Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method Grant 9,436,098 - Heo , et al. September 6, 2 | 2016-09-06 |
Stage transferring device and position measuring method thereof Grant 9,366,975 - Lee , et al. June 14, 2 | 2016-06-14 |
Apparatus And Method Of Controlling Chuck, And Exposure Apparatus And Control Method Thereof App 20160154320 - KIM; Ja Yul ;   et al. | 2016-06-02 |
Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film Grant 9,329,504 - Park , et al. May 3, 2 | 2016-05-03 |
Maskless Exposure Device And Method For Compensating Cumulative Illumination Using The Same App 20160109809 - Lee; Hi-Kuk ;   et al. | 2016-04-21 |
Maskless Exposure Device, Maskless Exposure Method And Display Substrate Manufactured By The Maskless Exposure Device And The Maskless Exposure Method App 20160077449 - HEO; Jung-Chul ;   et al. | 2016-03-17 |
Apparatus and method of controlling chuck, and exposure apparatus and control method thereof Grant 9,287,155 - Kim , et al. March 15, 2 | 2016-03-15 |
Reflector structure of illumination optic system Grant 9,255,694 - Joo , et al. February 9, 2 | 2016-02-09 |
Fixing Module For Fixing An Optical System To An Optical Apparatus And An Optical Apparatus Including The Same App 20150260211 - HONG; Sang-Joon ;   et al. | 2015-09-17 |
Stage device and driving method thereof Grant 9,086,352 - Jang , et al. July 21, 2 | 2015-07-21 |
Maskless exposure apparatus and method Grant 9,052,599 - Ahn , et al. June 9, 2 | 2015-06-09 |
Maskless exposure apparatus and stitching exposure method using the same Grant 9,019,471 - Kim , et al. April 28, 2 | 2015-04-28 |
Exposure apparatus including the exposure head and control method thereof Grant 9,013,674 - Park , et al. April 21, 2 | 2015-04-21 |
Stage Device And Semiconductor Fabrication Apparatus Including The Same App 20150091231 - PARK; SANG-WOOK ;   et al. | 2015-04-02 |
Lens barrel support device and maskless exposure apparatus having the same Grant 8,994,922 - Park , et al. March 31, 2 | 2015-03-31 |
Stage Device And Driving Method Thereof App 20140268171 - Jang; Sang-Don ;   et al. | 2014-09-18 |
Workpiece alignment device Grant 8,836,943 - Ahn , et al. September 16, 2 | 2014-09-16 |
Maskless exposure apparatus having measurement optical unit to measure depths of focus of a plurality of beams and control method thereof Grant 8,804,098 - Baek , et al. August 12, 2 | 2014-08-12 |
Stage Transferring Device And Position Measuring Method Thereof App 20140204392 - LEE; Hi Kuk ;   et al. | 2014-07-24 |
Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography Grant 8,755,034 - Ahn , et al. June 17, 2 | 2014-06-17 |
Maskless exposure apparatus and method of alignment for overlay in maskless exposure Grant 8,675,180 - Ahn , et al. March 18, 2 | 2014-03-18 |
Actuator, stage device, and exposure apparatus Grant 8,593,616 - Hong , et al. November 26, 2 | 2013-11-26 |
System And Method For Providing Light App 20130214180 - JOO; Won Don ;   et al. | 2013-08-22 |
Ultra-precision Position Control Device And Method For Determining Position And Attitude Information Associated With A 6-degree-of-freedom Stage Thereof App 20130218304 - KIM; Ja Yul ;   et al. | 2013-08-22 |
Reflector Structure Of Illumination Optic System App 20130208486 - JOO; Won-Don ;   et al. | 2013-08-15 |
Exposure apparatuses and methods to compress exposure data Grant 8,427,712 - Choi , et al. April 23, 2 | 2013-04-23 |
Method Of Aligning An Exposure Apparatus, Method Of Exposing A Photoresist Film Using The Same And Exposure Apparatus For Performing The Method Of Exposing A Photoresist Film App 20130077075 - PARK; Sang-Hyun ;   et al. | 2013-03-28 |
Z-axis Stage Driving Apparatus, Stage Driving Apparatus, And Method For Manipulating Stage Driving Apparatus App 20130047758 - KIM; Ul Tae ;   et al. | 2013-02-28 |
Stage Apparatus App 20130016361 - Park; Sang Wook ;   et al. | 2013-01-17 |
Apparatus And Method Of Controlling Chuck, And Exposure Apparatus And Control Method Thereof App 20130001898 - KIM; Ja Yul ;   et al. | 2013-01-03 |
Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film Grant 8,314,920 - Park , et al. November 20, 2 | 2012-11-20 |
Maskless Exposure Apparatus App 20120140194 - Bae; Sang Woo ;   et al. | 2012-06-07 |
Workpiece Alignment Device App 20120099107 - Ahn; Sung Min ;   et al. | 2012-04-26 |
Maskless Exposure Apparatus And Method To Determine Exposure Start Position And Orientation In Maskless Lithography App 20120081682 - AHN; Sung Min ;   et al. | 2012-04-05 |
Exposure Apparatus And Alignment Error Compensation Method Using The Same App 20120038899 - Ahn; Sung Min ;   et al. | 2012-02-16 |
Measurement System Using Alignment Unit And Position Measuring Method App 20120038936 - Ahn; Sung Min ;   et al. | 2012-02-16 |
Exposure Apparatus Including The Exposure Head And Control Method Thereof App 20120019793 - Park; Sang Hyun ;   et al. | 2012-01-26 |
Substrate Processing Apparatus And Method App 20110286818 - Kim; Ul Tae ;   et al. | 2011-11-24 |
Maskless exposure apparatus and method of alignment for overlay in maskless exposure App 20110273690 - Ahn; Sung Min ;   et al. | 2011-11-10 |
Maskless exposure apparatus and stitching exposure method using the same App 20110267594 - Kim; Jeong Min ;   et al. | 2011-11-03 |
Auto-focusing device and method for maskless exposure apparatus App 20110181856 - Lee; Sang Min ;   et al. | 2011-07-28 |
Maskless exposure apparatus and control method thereof App 20110157569 - Baek; Dong Seok ;   et al. | 2011-06-30 |
Maskless exposure apparatus and multi-head alignment method thereof App 20110149297 - Park; Sang Hyun ;   et al. | 2011-06-23 |
Actuator, stage device, and exposure apparatus App 20110134409 - Hong; Sang Joon ;   et al. | 2011-06-09 |
Maskless exposure apparatus and method App 20110116064 - Ahn; Sung Min ;   et al. | 2011-05-19 |
Lens barrel support device and maskless exposure apparatus having the same App 20110090478 - Park; Sang Hyun ;   et al. | 2011-04-21 |
Exposure apparatus and method to measure beam position and assign address using the same App 20100208222 - Kim; Ul Tae ;   et al. | 2010-08-19 |
Exposure apparatuses and methods to compress exposure data App 20100110214 - Choi; Ho Seok ;   et al. | 2010-05-06 |
Exposure apparatuses and methods App 20100097591 - Kim; Eul Tae ;   et al. | 2010-04-22 |
Method Of Measuring Position Error Of Beam Of Exposure Apparatus And Exposure Apparatus Using The Same App 20090296062 - PARK; Sang-Hyun ;   et al. | 2009-12-03 |
Method Of Aligning An Exposure Apparatus, Method Of Exposing A Photoresist Film Using The Same And Exposure Apparatus For Performing The Method Of Exposing A Photoresist Film App 20090268179 - Park; Sang-Hyun ;   et al. | 2009-10-29 |
LCD glass cassette Grant 7,232,037 - Jang June 19, 2 | 2007-06-19 |
Non-contact feeder system Grant 7,138,614 - Youm , et al. November 21, 2 | 2006-11-21 |
Non-contact feeder system App 20050127066 - Youm, Jang-hyoun ;   et al. | 2005-06-16 |
LCD glass cassette App 20040164035 - Jang, Sang-Don | 2004-08-26 |