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Patent applications and USPTO patent grants for Jan; Chin-Tsan.The latest application filed is for "chuck rollers and pins for substrate cleaning and drying system".
Patent | Date |
---|---|
Wafer protection system Grant 7,139,641 - Jan November 21, 2 | 2006-11-21 |
CMP apparatus polishing head with concentric pressure zones Grant 6,998,013 - Jan , et al. February 14, 2 | 2006-02-14 |
Chuck rollers and pins for substrate cleaning and drying system Grant 6,964,419 - Jan November 15, 2 | 2005-11-15 |
Chuck rollers and pins for substrate cleaning and drying system App 20040195785 - Jan, Chin-Tsan | 2004-10-07 |
Wafer protection system App 20040188018 - Jan, Chin-Tsan | 2004-09-30 |
Online tension monitor system for robot x-belt of mirra CMP Grant 6,758,724 - Jan July 6, 2 | 2004-07-06 |
CMP apparatus polishing head with concentric pressure zones App 20040069406 - Jan, Chin-Tsan ;   et al. | 2004-04-15 |
Online tension monitor system for robot X-belt of mirra CMP App 20030128127 - Jan, Chin-Tsan | 2003-07-10 |
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