Patent | Date |
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Metrology method, target and substrate Grant 11,428,521 - Bhattacharyya , et al. August 30, 2 | 2022-08-30 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 11,385,552 - Jak , et al. July 12, 2 | 2022-07-12 |
Method to determine a patterning process parameter Grant 11,300,883 - Jak , et al. April 12, 2 | 2022-04-12 |
Metrology Method, Target And Substrate App 20220057192 - BHATTACHARYYA; Kaustuve ;   et al. | 2022-02-24 |
Metrology method, target and substrate Grant 11,204,239 - Bhattacharyya , et al. December 21, 2 | 2021-12-21 |
Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate App 20210325174 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2021-10-21 |
Metrology recipe selection Grant 11,106,142 - Bhattacharyya , et al. August 31, 2 | 2021-08-31 |
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate Grant 11,009,343 - Tinnemans , et al. May 18, 2 | 2021-05-18 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20210026256 - JAK; Martin Jacobus Johan ;   et al. | 2021-01-28 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 10,831,109 - Jak , et al. November 10, 2 | 2020-11-10 |
Metrology Method, Target And Substrate App 20200348125 - BHATTACHARYYA; Kaustuve ;   et al. | 2020-11-05 |
Metrology method, target and substrate Grant 10,718,604 - Bhattacharyya , et al. | 2020-07-21 |
Metrology Recipe Selection App 20200218166 - Bhattacharyya; Kaustuve ;   et al. | 2020-07-09 |
Method of measuring, device manufacturing method, metrology apparatus, and lithographic system Grant 10,656,534 - Pandey , et al. | 2020-05-19 |
Metrology in lithographic processes Grant 10,656,533 - Mathijssen , et al. | 2020-05-19 |
Determining edge roughness parameters Grant 10,634,490 - Jak , et al. | 2020-04-28 |
Correction using stack difference Grant 10,635,004 - Jiang , et al. | 2020-04-28 |
Metrology method and apparatus Grant 10,620,550 - Jak , et al. | 2020-04-14 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20200050114 - Bozkurt; Murat ;   et al. | 2020-02-13 |
Focus control arrangement and method Grant 10,551,308 - Jak , et al. Fe | 2020-02-04 |
Metrology recipe selection Grant 10,527,953 - Bhattacharyya , et al. J | 2020-01-07 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Grant 10,481,506 - Bozkurt , et al. Nov | 2019-11-19 |
Metrology Method, Target And Substrate App 20190346256 - BHATTACHARYYA; Kaustuve ;   et al. | 2019-11-14 |
Method Of Measuring, Device Manufacturing Method, Metrology Apparatus, And Lithographic System App 20190285993 - PANDEY; Nitesh ;   et al. | 2019-09-19 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate App 20190265028 - TINNEMANS; Patricius Aloysius Jacobus ;   et al. | 2019-08-29 |
Metrology method, target and substrate Grant 10,386,176 - Bhattacharyya , et al. A | 2019-08-20 |
Metrology method, target and substrate Grant 10,379,445 - Jak , et al. A | 2019-08-13 |
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method Grant 10,338,401 - Van Der Zouw , et al. | 2019-07-02 |
Method of measuring, device manufacturing method, metrology apparatus, and lithographic system Grant 10,310,389 - Pandey , et al. | 2019-06-04 |
Eye-safe Laser-based Lighting App 20190165543 - KRIJN; MARCELLINUS PETRUS CAROLUS MICHAEL ;   et al. | 2019-05-30 |
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus Grant 10,289,008 - Jak | 2019-05-14 |
Method to Determine a Patterning Process Parameter App 20190094703 - JAK; Martin Jacobus Johan ;   et al. | 2019-03-28 |
Metrology in Lithographic Processes App 20190079413 - MATHIJSSEN; Simon Gijsbert Josephus ;   et al. | 2019-03-14 |
Metrology Method And Apparatus App 20190072859 - JAK; Martin Jacobus Johan ;   et al. | 2019-03-07 |
Metrology Method, Target And Substrate App 20190064677 - Jak; Martin Jacobus Johan ;   et al. | 2019-02-28 |
Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method Grant 10,162,272 - Jak , et al. Dec | 2018-12-25 |
Determining Edge Roughness Parameters App 20180364036 - JAK; Martin Jacobus Johan ;   et al. | 2018-12-20 |
Metrology method, target and substrate Grant 10,133,188 - Jak , et al. November 20, 2 | 2018-11-20 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20180321599 - BOZKURT; Murat ;   et al. | 2018-11-08 |
Method, apparatus and substrates for lithographic metrology Grant 10,042,268 - Smilde , et al. August 7, 2 | 2018-08-07 |
Methods and Apparatus for Predicting Performance of a Measurement Method, Measurement Method and Apparatus App 20180203367 - JAK; Martin Jacobus Johan | 2018-07-19 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20180173112 - JAK; Martin Jacobus Johan ;   et al. | 2018-06-21 |
Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method Grant 9,940,703 - Bozkurt , et al. April 10, 2 | 2018-04-10 |
Metrology Recipe Selection App 20180088470 - BHATTACHARYYA; Kaustuve ;   et al. | 2018-03-29 |
Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method App 20180088347 - Van Der Zouw; Gerbrand ;   et al. | 2018-03-29 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,811,003 - Jak , et al. November 7, 2 | 2017-11-07 |
Liquid crystal display system and method Grant 9,805,666 - Hoppenbrouwers , et al. October 31, 2 | 2017-10-31 |
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method Grant 9,753,296 - Van Der Zouw , et al. September 5, 2 | 2017-09-05 |
Spectral purity filter Grant 9,726,989 - Soer , et al. August 8, 2 | 2017-08-08 |
Method of Measuring a Property of a Target Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20170206649 - BOZKURT; Murat ;   et al. | 2017-07-20 |
Metrology Method, Target And Substrate App 20170184977 - JAK; Martin Jacobus Johan ;   et al. | 2017-06-29 |
Focus Control Arrangement And Method App 20170176328 - JAK; Martin Jacobus Johan ;   et al. | 2017-06-22 |
Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method Grant 9,633,427 - Bozkurt , et al. April 25, 2 | 2017-04-25 |
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20170068173 - JAK; Martin Jacobus Johan ;   et al. | 2017-03-09 |
Metrology Method And Apparatus, Substrates For Use In Such Methods, Lithographic System And Device Manufacturing Method App 20170052454 - JAK; Martin Jacobus Johan ;   et al. | 2017-02-23 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,535,338 - Jak , et al. January 3, 2 | 2017-01-03 |
Method, Apparatus and Substrates for Lithographic Metrology App 20160291481 - SMILDE; Hendrik Jan Hidde ;   et al. | 2016-10-06 |
Method of Measuring a Property of a Target Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20160086324 - BOZKURT; Murat ;   et al. | 2016-03-24 |
Metrology Method, Target And Substrate App 20160061589 - BHATTACHARYYA; Kaustuve ;   et al. | 2016-03-03 |
Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method App 20160025992 - VAN DER ZOUW; Gerbrand ;   et al. | 2016-01-28 |
Eye-safe Laser-based Lighting App 20150380899 - KRIJN; Marcellinus Petrus Carolus Michael ;   et al. | 2015-12-31 |
Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method Grant 9,195,144 - Jak , et al. November 24, 2 | 2015-11-24 |
Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter Grant 9,195,152 - Soer , et al. November 24, 2 | 2015-11-24 |
Device manufacturing method and associated lithographic apparatus, inspection apparatus, and lithographic processing cell Grant 9,163,935 - Den Boef , et al. October 20, 2 | 2015-10-20 |
Spectral purity filters for use in a lithographic apparatus Grant 9,041,912 - Soer , et al. May 26, 2 | 2015-05-26 |
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20150138523 - Jak; Martin Jacobus Johan ;   et al. | 2015-05-21 |
Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter Grant 8,817,237 - Soer , et al. August 26, 2 | 2014-08-26 |
Radiation source with cleaning apparatus Grant 8,742,381 - Banine , et al. June 3, 2 | 2014-06-03 |
Radiation Source With Cleaning Apparatus App 20130161542 - BANINE; Vadim Yevgenyevich ;   et al. | 2013-06-27 |
Device Manufacturing Method and Associated Lithographic Apparatus, Inspection Apparatus, and Lithographic Processing Cell App 20130148121 - DEN BOEF; Arie Jeffrey ;   et al. | 2013-06-13 |
Light output device with partly transparent mirror Grant 8,459,830 - Van Gorkom , et al. June 11, 2 | 2013-06-11 |
Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components App 20130114059 - Jak; Martin Jacobus Johan ;   et al. | 2013-05-09 |
Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,405,051 - Banine , et al. March 26, 2 | 2013-03-26 |
Photo-detector and method of measuring light Grant 8,400,627 - Jak , et al. March 19, 2 | 2013-03-19 |
Spectral purity filters for use in a lithographic apparatus Grant 8,390,788 - Soer , et al. March 5, 2 | 2013-03-05 |
Spectral Purity Filter App 20130038926 - Soer; Wouter Anthon ;   et al. | 2013-02-14 |
Spectral Purity Filters for Use in a Lithographic Apparatus App 20130010363 - Soer; Wouter Anthon ;   et al. | 2013-01-10 |
Radiation source Grant 8,263,950 - Soer , et al. September 11, 2 | 2012-09-11 |
Spectrum sequential display having reduced cross talk Grant 8,248,393 - Hekstra , et al. August 21, 2 | 2012-08-21 |
Spectral Purity Filter, Lithographic Apparatus, And Device Manufacturing Method App 20120182537 - Yakunin; Andrei Mikhailovich ;   et al. | 2012-07-19 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter App 20120154778 - Soer; Wouter Anthon ;   et al. | 2012-06-21 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter App 20120154779 - Soer; Wouter Anthon ;   et al. | 2012-06-21 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter App 20120147351 - Jak; Martin Jacobus Johan ;   et al. | 2012-06-14 |
System and method for controlling lighting systems Grant 8,189,011 - Van de Sluis , et al. May 29, 2 | 2012-05-29 |
Anti-blur Apparatus For E.g. Backlight Of Liquid Crystal Display App 20120127368 - Jak; Martin Jacobus Johan ;   et al. | 2012-05-24 |
Lighting Device App 20110228555 - Van Gorkom; Ramon Pascal ;   et al. | 2011-09-22 |
Spectral Purity Filter, Radiation Source, Lithographic Apparatus, and Device Manufacturing Method App 20110211185 - Jak; Martin Jacobus Johan ;   et al. | 2011-09-01 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter App 20110164237 - Soer; Wouter Anthon ;   et al. | 2011-07-07 |
Spectral Purity Filter, Lithographic Apparatus Including Such A Spectral Purity Filter And Device Manufacturing Method App 20110157573 - Soer; Wouter Anthon ;   et al. | 2011-06-30 |
Radiation Source App 20110128519 - SOER; Wouter Anthon ;   et al. | 2011-06-02 |
Radiation source and lithographic apparatus Grant 7,952,084 - Soer , et al. May 31, 2 | 2011-05-31 |
Eye-safe Laser-based Lighting App 20110116520 - Krijn; Marcellinus Petrus Carolus Michael ;   et al. | 2011-05-19 |
Method For Removing A Deposition On An Uncapped Multilayer Mirror Of A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20110117504 - Banine; Vadim Yevgenyevich ;   et al. | 2011-05-19 |
Light Output Device And Method App 20110075420 - Van Gorkom; Ramon Pascal ;   et al. | 2011-03-31 |
Spectral Purity Filters For Use In A Lithographic Apparatus App 20110043782 - Soer; Wouter Anthon ;   et al. | 2011-02-24 |
Spectral Purity Filters For Use In A Lithographic Apparatus App 20110044425 - Jak; Martin Jacobus Johan ;   et al. | 2011-02-24 |
Photo-detector And Method Of Measuring Light App 20110007306 - Jak; Martin Jacobus Johan ;   et al. | 2011-01-13 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter App 20100328639 - Jak; Martin Jacobus Johan ;   et al. | 2010-12-30 |
Lithographic Radiation Source, Collector, Apparatus And Method App 20100271610 - SOER; Wouter Anthon ;   et al. | 2010-10-28 |
Liquid Crystal Display System And Method App 20100060672 - Hoppenbrouwers; Jurgen Jean Louis ;   et al. | 2010-03-11 |
Illumination System And Display Device App 20100053992 - Krijn; Marcellinus Petrus Carolus Michael ;   et al. | 2010-03-04 |
Spectral Purity Filters for Use in a Lithographic Apparatus App 20100020304 - Soer; Wouter Anthon ;   et al. | 2010-01-28 |
Display Device And Method App 20100002027 - Krijn; Marcellinus Petrus Carolus Michael ;   et al. | 2010-01-07 |
Radiation Source And Lithographic Apparatus App 20090272916 - SOER; Wouter Anthon ;   et al. | 2009-11-05 |
System and Method for Controlling Lighting Systems App 20080265802 - Van de Sluis; Bartel Marinus ;   et al. | 2008-10-30 |
Image Display Apparatus App 20080252822 - De Koning; Hendrik ;   et al. | 2008-10-16 |
Color display device Grant 7,430,022 - Hekstra , et al. September 30, 2 | 2008-09-30 |
Spectrum Sequential Display Having Reduced Cross Talk App 20080211973 - Hekstra; Gerben Johan ;   et al. | 2008-09-04 |
Method for Photo-Embossing a Monomer-Containing Layer App 20070254208 - Kurt; Ralph ;   et al. | 2007-11-01 |
Color display device App 20070146509 - Hekstra; Gerben Johan ;   et al. | 2007-06-28 |
Device with light-guiding layer App 20060290683 - Pasquariello; Donato ;   et al. | 2006-12-28 |
Coordinate detection system for a display monitor App 20060290684 - Giraldo; Andrea ;   et al. | 2006-12-28 |
Front light for diffusely reflecting displays App 20060262568 - Blom; Saskia Maria Petrouchka ;   et al. | 2006-11-23 |
Display device and an illumination system therefor App 20060256244 - Jak; Martin Jacobus Johan ;   et al. | 2006-11-16 |
Collimated scanning backlight device App 20060215074 - Jak; Martin Jacobus Johan ;   et al. | 2006-09-28 |
Active matrix display with a scanning backlight App 20060170645 - Fisekovic; Nebojsa ;   et al. | 2006-08-03 |
Electrophoretic display panel App 20050231460 - Zhou, Guofu ;   et al. | 2005-10-20 |