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Apparatus comprising staircase structures Grant 11,189,526 - Williamson , et al. November 30, 2 | 2021-11-30 |
Apparatus Comprising Staircase Structures App 20200194305 - Williamson; Lance ;   et al. | 2020-06-18 |
Methods of forming staircase structures Grant 10,600,681 - Williamson , et al. | 2020-03-24 |
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Methods Of Forming Staircase Structures App 20190206726 - Williamson; Lance ;   et al. | 2019-07-04 |
Semiconductor Device Structures App 20180366406 - Olson; Adam L. ;   et al. | 2018-12-20 |
Methods of forming staircase structures Grant 10,147,638 - Williamson , et al. De | 2018-12-04 |
Self-assembled Nanostructures Including Metal Oxides, Semiconductor Structures Comprised Thereof, And Methods Of Forming Same App 20180337035 - Hendricks; Nicholas ;   et al. | 2018-11-22 |
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Semiconductor Device Structures App 20170263552 - Olson; Adam L. ;   et al. | 2017-09-14 |
Semiconductor device structures Grant 9,666,531 - Olson , et al. May 30, 2 | 2017-05-30 |
Semiconductor Device Structures App 20160307839 - Olson; Adam L. ;   et al. | 2016-10-20 |
Methods of forming patterns with a mask formed utilizing a brush layer Grant 9,418,848 - Brown , et al. August 16, 2 | 2016-08-16 |
Methods of forming openings in semiconductor structures Grant 9,396,996 - Olson , et al. July 19, 2 | 2016-07-19 |
Methods for forming resist features and arrays of aligned, elongate resist features Grant 9,291,907 - Jain , et al. March 22, 2 | 2016-03-22 |
Self-assembled Nanostructures Including Metal Oxides, Semiconductor Structures Comprising Thereof, And Methods Of Forming Same App 20160042941 - Hendricks; Nicholas ;   et al. | 2016-02-11 |
Methods of Forming Patterns App 20160027638 - Brown; William R. ;   et al. | 2016-01-28 |
Lens heating compensation in photolithography Grant 9,235,134 - He , et al. January 12, 2 | 2016-01-12 |
Methods Of Forming Openings In Semiconductor Structures App 20150380307 - Olson; Adam L. ;   et al. | 2015-12-31 |
Methods of forming a reversed pattern in a substrate, and related semiconductor device structures Grant 9,209,039 - Jain , et al. December 8, 2 | 2015-12-08 |
Methods of forming patterns by using a brush layer and masks Grant 9,184,058 - Brown , et al. November 10, 2 | 2015-11-10 |
Methods of forming nanostructures including metal oxides Grant 9,177,795 - Hendricks , et al. November 3, 2 | 2015-11-03 |
Semiconductor device structures Grant 9,142,504 - Olson , et al. September 22, 2 | 2015-09-22 |
Methods of Forming Patterns App 20150179467 - Brown; William R. ;   et al. | 2015-06-25 |
Methods Of Forming Nanostructures Including Metal Oxides And Semiconductor Structures Including Same App 20150091137 - Hendricks; Nicholas ;   et al. | 2015-04-02 |
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Photolithography App 20150015860 - Light; Scott L. ;   et al. | 2015-01-15 |
Semiconductor Device Structures App 20140353803 - Olson; Adam L. ;   et al. | 2014-12-04 |
Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns Grant 8,883,372 - Light , et al. November 11, 2 | 2014-11-11 |
Methods Of Forming A Reversed Pattern In A Substrate, And Related Semiconductor Device Structures App 20140299971 - Jain; Kaveri ;   et al. | 2014-10-09 |
Reticles, and methods of mitigating asymmetric lens heating in photolithography Grant 8,845,908 - Light , et al. September 30, 2 | 2014-09-30 |
Lithography Wave-front Control System And Method App 20140247476 - He; Yuan ;   et al. | 2014-09-04 |
Semiconductor constructions and methods of forming patterns Grant 8,815,497 - Millward , et al. August 26, 2 | 2014-08-26 |
Methods of forming features in semiconductor device structures Grant 8,815,752 - Olson , et al. August 26, 2 | 2014-08-26 |
Methods of forming a reversed pattern in a substrate Grant 8,758,987 - Jain , et al. June 24, 2 | 2014-06-24 |
Methods Of Forming Features In Semiconductor Device Structures App 20140145311 - Olson; Adam L. ;   et al. | 2014-05-29 |
Lithography wave-front control system and method Grant 8,736,814 - He , et al. May 27, 2 | 2014-05-27 |
Methods of processing substrates Grant 8,728,721 - Light , et al. May 20, 2 | 2014-05-20 |
Illumination design for lens heating mitigation Grant 8,625,078 - Zhou , et al. January 7, 2 | 2014-01-07 |
Reticle With Composite Polarizer And Method Of Simultaneous Optimization Of Imaging Of A Set Of Different Patterns App 20130323628 - LIGHT; SCOTT ;   et al. | 2013-12-05 |
Methods For Forming Resist Features, Patterns In A Resist, And Arrays Of Aligned, Elongate Resist Features App 20130309605 - Jain; Kaveri ;   et al. | 2013-11-21 |
Semiconductor Constructions And Methods Of Forming Patterns App 20130302981 - Millward; Dan ;   et al. | 2013-11-14 |
Imaging Devices, Methods Of Forming Same, And Methods Of Forming Semiconductor Device Structures App 20130252142 - He; Yuan ;   et al. | 2013-09-26 |
Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the same Grant 8,507,191 - Millward , et al. August 13, 2 | 2013-08-13 |
Semiconductor constructions and methods of forming patterns Grant 8,486,611 - Millward , et al. July 16, 2 | 2013-07-16 |
Imaging devices, methods of forming same, and methods of forming semiconductor device structures Grant 8,440,371 - He , et al. May 14, 2 | 2013-05-14 |
Methods Of Processing Substrates App 20130040245 - Light; Scott L. ;   et al. | 2013-02-14 |
Lithography Wave-front Control System And Method App 20120314196 - He; Yuan ;   et al. | 2012-12-13 |
Illumination Design For Lens Heating Mitigation App 20120257177 - ZHOU; JIANMING ;   et al. | 2012-10-11 |
Methods Of Forming A Patterned, Silicon-enriched Developable Antireflective Material And Semiconductor Device Structures Including The Same App 20120177891 - Millward; Dan B. ;   et al. | 2012-07-12 |
Imaging Devices, Methods Of Forming Same, And Methods Of Forming Semiconductor Device Structures App 20120178026 - He; Yuan ;   et al. | 2012-07-12 |
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Photolithography App 20120052416 - Light; Scott L. ;   et al. | 2012-03-01 |
Lens Heating Compensation In Photolithography App 20120038895 - He; Yuan ;   et al. | 2012-02-16 |
Semiconductor Constructions And Methods Of Forming Patterns App 20120015486 - Millward; Dan ;   et al. | 2012-01-19 |
Methods Of Forming Reversed Patterns In A Substrate And Semiconductor Structures Formed During Same App 20110052883 - Jain; Kaveri ;   et al. | 2011-03-03 |
Method for producing polymers with controlled molecular weight and end group functionality using photopolymerization in microemulsions Grant 7,226,957 - Scranton , et al. June 5, 2 | 2007-06-05 |