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Method of minimizing beam bending of MEMS device by reducing the interfacial bonding strength between sacrificial layer and MEMS structure
Grant 8,541,854 - Cotte , et al. September 24, 2 | 2013-09-24 |
Method Of Minimizing Beam Bending Of Mems Device By Reducing The Interfacial Bonding Strength Between Sacrificial Layer And Mems Structure
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Method of minimizing beam bending of MEMS device by reducing the interfacial bonding strength between sacrificial layer and MEMS structure
Grant 8,163,584 - Lu , et al. April 24, 2 | 2012-04-24 |
CMOS compatible integrated dielectric optical waveguide coupler and fabrication
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Cmos Compatible Integrated Dielectric Optical Waveguide Coupler And Fabrication
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Method Of Minimizing Beam Bending Of Mems Device By Reducing The Interfacial Bonding Strength Between Sacrificial Layer And Mems Structure
App 20090258455 - Cotte; John M. ; et al. | 2009-10-15 |
Method of forming noble metal contacts
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Micro-electro-mechanical RF switch
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Noble metal contacts for micro-electromechanical switches
Grant 7,202,764 - Deligianni , et al. April 10, 2 | 2007-04-10 |
Noble metal contacts for micro-electromechanical switches
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Micro-electro-mechanical RF switch
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Micro-electro-mechanical RF switch
Grant 6,876,282 - Andricacos , et al. April 5, 2 | 2005-04-05 |
Noble Metal Contacts For Micro-electromechanical Switches
App 20050007217 - Deligianni, Hariklia ; et al. | 2005-01-13 |
Plasma RIE polymer removal
Grant 6,758,223 - Cowley , et al. July 6, 2 | 2004-07-06 |
Liquid crystal display cell having liquid crystal molecules in vertical or substantially vertical alignment
Grant 6,682,786 - Lien , et al. January 27, 2 | 2004-01-27 |
Micro-electro-mechanical RF switch
App 20030214373 - Andricacos, Panayotis Constantinou ; et al. | 2003-11-20 |
MEMS RF switch with low actuation voltage
Grant 6,639,488 - Deligianni , et al. October 28, 2 | 2003-10-28 |
MEMS RF switch with low actuation voltage
App 20030048149 - Deligianni, Hariklia ; et al. | 2003-03-13 |
Multiposition micro electromechanical switch
Grant 6,489,857 - Petrarca , et al. December 3, 2 | 2002-12-03 |
Plasma RIE polymer removal
App 20020088476 - Cowley, Andy ; et al. | 2002-07-11 |
Multiposition micro electromechanical switch
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Production of electroless Co(P) with designed coercivity
Grant 6,197,364 - Paunovic , et al. March 6, 2 | 2001-03-06 |
Identification tags using amorphous wire
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