Jager; Remco
Patent Applications and Registrations
Patent applications and USPTO patent grants for Jager; Remco.The latest application filed is for "charged particle multi-beamlet lithography system with modulation device".
- Jager; Remco - Rotterdam NL
- - Rotterdam NL
- Jager; Remco - Delft N/A NL
- Jager; Remco - Utrecht NL
- Jager; Remco - PG Utrecht NL
- Jager; Remco - CJ Delft NL
| Patent | Date |
|---|---|
| Lithography system and projection method Grant RE45,552 - Kruit , et al. June 9, 2 | 2015-06-09 |
| Modulation device and charged particle multi-beamlet lithography system using the same Grant 08921758 - | 2014-12-30 |
| Modulation device and charged particle multi-beamlet lithography system using the same Grant 8,921,758 - Wieland , et al. December 30, 2 | 2014-12-30 |
| Modulation device and charged particle multi-beamlet lithography system using the same Grant 8,841,636 - Wieland , et al. September 23, 2 | 2014-09-23 |
| Charged particle multi-beamlet lithography system with modulation device Grant 8,759,787 - Wieland , et al. June 24, 2 | 2014-06-24 |
| Charged particle multi-beamlet lithography system with modulation device App 20140014850 - WIELAND; Marco Jan-Jaco ; et al. | 2014-01-16 |
| Charged particle beam modulator Grant 8,604,411 - Wieland , et al. December 10, 2 | 2013-12-10 |
| Lithography system Grant 8,525,134 - Wieland , et al. September 3, 2 | 2013-09-03 |
| Charged particle multi-beamlet lithography system with modulation device Grant 8,492,731 - Wieland , et al. July 23, 2 | 2013-07-23 |
| Charged Particle Beam Modulator App 20120292491 - Wieland; Marco Jan-Jaco ; et al. | 2012-11-22 |
| Modulation Device And Charged Particle Multi-beamlet Lithography System Using The Same App 20120273658 - Wieland; Marco Jan-Jaco ; et al. | 2012-11-01 |
| Optical switching in a lithography system Grant 8,242,470 - Wieland , et al. August 14, 2 | 2012-08-14 |
| Lithography system and projection method Grant 8,242,467 - Jager , et al. August 14, 2 | 2012-08-14 |
| Optical Switching In A Lithography System App 20120043457 - Wieland; Jan-Jaco Marco ; et al. | 2012-02-23 |
| Modulation device and charged particle multi-beamlet lithography system using the same App 20110261340 - Wieland; Marco Jan-Jaco ; et al. | 2011-10-27 |
| Charged particle multi-beamlet lithography system with modulation device App 20110260040 - Wieland; Marco Jan-Jaco ; et al. | 2011-10-27 |
| Charged Particle Lithography Apparatus And Method Of Generating Vacuum In A Vacuum Chamber App 20110042579 - DE BOER; Guido ; et al. | 2011-02-24 |
| Lithography system and projection method Grant 7,842,936 - Kruit , et al. November 30, 2 | 2010-11-30 |
| Lithography System And Projection Method App 20100171046 - Jager; Remco ; et al. | 2010-07-08 |
| Lithography system and projection method Grant 7,709,815 - Jager , et al. May 4, 2 | 2010-05-04 |
| Lithography System App 20100045958 - Wieland; Jan-Jaco Marco ; et al. | 2010-02-25 |
| Lithography system Grant 7,612,866 - Wieland , et al. November 3, 2 | 2009-11-03 |
| Optical Switching In Lithography System App 20080158537 - Wieland; Jan-Jaco Marco ; et al. | 2008-07-03 |
| Optical Switching In Lithography System App 20080158536 - Wieland; Jan-Jaco Marco ; et al. | 2008-07-03 |
| Lithography system and projection method App 20080073588 - Kruit; Pieter ; et al. | 2008-03-27 |
| Lithography system App 20080061247 - Wieland; Jan-Jaco Marco ; et al. | 2008-03-13 |
| Lithography system App 20070187625 - Wieland; Jan-Jaco Marco ; et al. | 2007-08-16 |
| Lithography system and projection method App 20070064213 - Jager; Remco ; et al. | 2007-03-22 |
| Optical switching in lithography system Grant 7,173,263 - Wieland , et al. February 6, 2 | 2007-02-06 |
| Optical switching in lithography system App 20060006349 - Wieland; Jan-Jaco Marco ; et al. | 2006-01-12 |
| Lithography system Grant 6,958,804 - Wieland , et al. October 25, 2 | 2005-10-25 |
| Lithography system App 20040135983 - Wieland, Jan-Jaco Marco ; et al. | 2004-07-15 |
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