| Patent | Date |
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High-power radio-frequency spiral-coil filter
Grant 10,812,033 - O'Brien , et al. October 20, 2 | 2020-10-20 |
Identifying components associated with a fault in a plasma system
Grant 10,690,727 - Jafarian-Tehrani | 2020-06-23 |
Control Of Etch Rate Using Modeling, Feedback And Impedance Match
App 20190318919 - Lyndaker; Bradford J. ; et al. | 2019-10-17 |
Control of etch rate using modeling, feedback and impedance match
Grant 10,381,201 - Lyndaker , et al. A | 2019-08-13 |
High-power Radio-frequency Spiral-coil Filter
App 20190207579 - O'Brien; Sean Kelly ; et al. | 2019-07-04 |
High Power Cable For Heated Components In Rf Environment
App 20190035608 - JAFARIAN-TEHRANI; Seyed Jafar ; et al. | 2019-01-31 |
Identifying Components Associated With A Fault In A Plasma System
App 20180100885 - Jafarian-Tehrani; Seyed Jafar | 2018-04-12 |
Identifying components associated with a fault in a plasma system
Grant 9,851,389 - Jafarian-Tehrani December 26, 2 | 2017-12-26 |
Systems and methods for providing characteristics of an impedance matching model for use with matching networks
Grant 9,720,022 - Howald , et al. August 1, 2 | 2017-08-01 |
Control Of Etch Rate Using Modeling, Feedback And Impedance Match
App 20170194130 - Lyndaker; Bradford J. ; et al. | 2017-07-06 |
Control of etch rate using modeling, feedback and impedance match
Grant 9,620,334 - Lyndaker , et al. April 11, 2 | 2017-04-11 |
Systems And Methods For Providing Characteristics Of An Impedance Matching Model For Use With Matching Networks
App 20160343548 - Howald; Arthur M. ; et al. | 2016-11-24 |
Identifying Components Associated With A Fault In A Plasma System
App 20160109498 - Jafarian-Tehrani; Seyed Jafar | 2016-04-21 |
High power filter with single adjust for multiple channels
Grant 9,312,832 - Jafarian-Tehrani April 12, 2 | 2016-04-12 |
Adjusting current ratios in inductively coupled plasma processing systems
Grant 9,305,750 - Long , et al. April 5, 2 | 2016-04-05 |
High Power Filter With Single Adjust For Multiple Channels
App 20160028362 - JAFARIAN-TEHRANI; Seyed Jafar | 2016-01-28 |
Systems for detecting unconfined-plasma events
Grant 9,074,285 - Pease , et al. July 7, 2 | 2015-07-07 |
Plasma unconfinement sensor and methods thereof
Grant 8,894,804 - Booth , et al. November 25, 2 | 2014-11-25 |
Control of Etch Rate Using Modeling, Feedback and Impedance Match
App 20140195033 - Lyndaker; Bradford J. ; et al. | 2014-07-10 |
Radio frequency (RF) power filters and plasma processing systems including RF power filters
Grant 8,742,666 - Long , et al. June 3, 2 | 2014-06-03 |
Current control in plasma processing systems
Grant 8,736,175 - Long , et al. May 27, 2 | 2014-05-27 |
Arrangements for detecting discontinuity of flexible connections for current flow and methods thereof
Grant 8,466,697 - Jafarian-Tehrani June 18, 2 | 2013-06-18 |
ESC high voltage control and methods thereof
Grant 8,315,029 - Jafarian-Tehrani , et al. November 20, 2 | 2012-11-20 |
Radio Frequency (rf) Power Filters And Plasma Processing Systems Including Rf Power Filters
App 20120032756 - LONG; Maolin ; et al. | 2012-02-09 |
Esc High Voltage Control And Methods Thereof
App 20120018095 - Jafarian-Tehrani; Seyed Jafar ; et al. | 2012-01-26 |
Plasma processing system ESC high voltage control and methods thereof
Grant 7,983,018 - Jafarian-Tehrani , et al. July 19, 2 | 2011-07-19 |
Plasma Unconfinement Sensor And Methods Thereof
App 20110128017 - Booth; Jean-Paul ; et al. | 2011-06-02 |
Current Control In Plasma Processing Systems
App 20110115379 - Long; Maolin ; et al. | 2011-05-19 |
Plasma Processing System Esc High Voltage Control And Methods Thereof
App 20110051307 - Jafarian-Tehrani; Seyed Jafar ; et al. | 2011-03-03 |
Adjusting Current Ratios In Inductively Coupled Plasma Processing Systems
App 20100314048 - Long; Maolin ; et al. | 2010-12-16 |
Arrangements For Detecting Discontinuity Of Flexible Connections For Current Flow And Methods Thereof
App 20100271040 - JAFARIAN-TEHRANI; SEYED JAFAR | 2010-10-28 |
Plasma processing system ESC high voltage control
Grant 7,768,766 - Jafarian-Tehrani , et al. August 3, 2 | 2010-08-03 |
Plasma Processing System Esc High Voltage Control
App 20080297971 - Jafarian-Tehrani; Seyed Jafar ; et al. | 2008-12-04 |
Methods and array for creating a mathematical model of a plasma processing system
Grant 7,435,926 - Jafarian-Tehrani October 14, 2 | 2008-10-14 |
Methods and array for creating a mathematical model of a plasma processing system
App 20050217797 - Jafarian-Tehrani, Seyed Jafar | 2005-10-06 |
Method for toolmatching and troubleshooting a plasma processing system
Grant 6,919,689 - Jafarian-Tehrani , et al. July 19, 2 | 2005-07-19 |
Method for toolmatching and troubleshooting a plasma processing system
App 20050151479 - Avoyan, Armen ; et al. | 2005-07-14 |
Method for toolmatching and troubleshooting a plasma processing system
Grant 6,873,114 - Avoyan , et al. March 29, 2 | 2005-03-29 |
Method for toolmatching and troubleshooting a plasma processing system
App 20040104734 - Jafarian-Tehrani, Seyed Jafar ; et al. | 2004-06-03 |
Method for toolmatching and troubleshooting a plasma processing system
App 20040061448 - Avoyan, Armen ; et al. | 2004-04-01 |
Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor
Grant 6,563,076 - Benjamin , et al. May 13, 2 | 2003-05-13 |
Voltage control sensor and control interface for radio frequency power regulation in a plasma reactor
Grant 6,509,542 - Benjamin , et al. January 21, 2 | 2003-01-21 |
Methods and apparatuses for controlling phase difference in plasma processing systems
Grant 5,824,606 - Dible , et al. October 20, 1 | 1998-10-20 |
Dynamic feedback electrostatic wafer chuck
Grant 5,812,361 - Jones , et al. September 22, 1 | 1998-09-22 |
Voltage controller for electrostatic chuck of vacuum plasma processors
Grant 5,708,250 - Benjamin , et al. January 13, 1 | 1998-01-13 |
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