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Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20140061816 - Horsky; Thomas N. ;   et al. | 2014-03-06 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 8,618,514 - Horsky , et al. December 31, 2 | 2013-12-31 |
Ion beam apparatus and method employing magnetic scanning Grant 8,436,326 - Glavish , et al. May 7, 2 | 2013-05-07 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 8,410,459 - Horsky , et al. April 2, 2 | 2013-04-02 |
Semiconductor device and method of fabricating a semiconductor device Grant 8,236,675 - Krull , et al. August 7, 2 | 2012-08-07 |
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20120076475 - Horsky; Thomas N. ;   et al. | 2012-03-29 |
Ion beam apparatus and method for ion implantation Grant 8,110,820 - Glavish , et al. February 7, 2 | 2012-02-07 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 8,071,958 - Horsky , et al. December 6, 2 | 2011-12-06 |
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20110226969 - Horsky; Thomas N. ;   et al. | 2011-09-22 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 7,960,709 - Horsky , et al. June 14, 2 | 2011-06-14 |
Ion Beam Apparatus And Method Employing Magnetic Scanning App 20110089321 - Glavish; Hilton F. ;   et al. | 2011-04-21 |
Cluster ion implantation for defect engineering Grant 7,919,402 - Jacobson , et al. April 5, 2 | 2011-04-05 |
Ion beam apparatus and method employing magnetic scanning Grant 7,851,773 - Glavish , et al. December 14, 2 | 2010-12-14 |
Method and apparatus for extending equipment uptime in ion implantation Grant 7,820,981 - Horsky , et al. October 26, 2 | 2010-10-26 |
Semiconductor device and method of fabricating a semiconductor device Grant 7,723,233 - Krull , et al. May 25, 2 | 2010-05-25 |
Semiconductor Device And Method Of Fabricating A Semiconductor Device App 20100022077 - Krull; Wade A. ;   et al. | 2010-01-28 |
Method and apparatus for extending equipment uptime in ion implantation Grant 7,629,590 - Horsky , et al. December 8, 2 | 2009-12-08 |
Ion Beam Apparatus And Method Employing Magnetic Scanning App 20090261248 - Glavish; Hilton F. ;   et al. | 2009-10-22 |
Ion Beam Apparatus And Method For Ion Implantation App 20090206270 - Glayish; Hilton F. ;   et al. | 2009-08-20 |
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20090090872 - Horsky; Thomas N. ;   et al. | 2009-04-09 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 7,491,953 - Horsky , et al. February 17, 2 | 2009-02-17 |
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Ions Derived From Carborane Molecular Species App 20080305598 - Horsky; Thomas N. ;   et al. | 2008-12-11 |
Cluster Ion Implantation For Defect Engineering App 20080299749 - Jacobson; Dale C. ;   et al. | 2008-12-04 |
Method Of Manufacturing Semiconductor App 20080242066 - Jacobson; Dale C. ;   et al. | 2008-10-02 |
Semiconductor device and method of fabricating a semiconductor device App 20080200020 - Krull; Wade A. ;   et al. | 2008-08-21 |
Method and apparatus for extending equipment uptime in ion implantation App 20080121811 - Horsky; Thomas N. ;   et al. | 2008-05-29 |
Method and apparatus for extending equipment uptime in ion implantation App 20070241689 - Horsky; Thomas N. ;   et al. | 2007-10-18 |
Method And Apparatus For Extending Equipment Uptime In Ion Implantation App 20070210260 - Horsky; Thomas N. ;   et al. | 2007-09-13 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions App 20070194252 - Horsky; Thomas N. ;   et al. | 2007-08-23 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions App 20070181830 - Horsky; Thomas N. ;   et al. | 2007-08-09 |
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