loadpatents
Patent applications and USPTO patent grants for Jacobs; Loren R..The latest application filed is for "wafer support system".
Patent | Date |
---|---|
Wafer support system Grant 7,655,093 - Halpin , et al. February 2, 2 | 2010-02-02 |
Wafer Support System App 20070131173 - Halpin; Michael W. ;   et al. | 2007-06-14 |
Apparatus And Methods For Preventing Rotational Slippage Between A Vertical Shaft And A Support Structure For A Semiconductor Wafer Holder App 20070056150 - Weeks; Thomas M. ;   et al. | 2007-03-15 |
Wafer support system Grant 7,186,298 - Halpin , et al. March 6, 2 | 2007-03-06 |
Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder Grant 7,169,234 - Weeks , et al. January 30, 2 | 2007-01-30 |
Low-mass susceptor improvements App 20050183829 - Goodman, Matthew G. ;   et al. | 2005-08-25 |
Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder App 20050166849 - Weeks, Thomas M. ;   et al. | 2005-08-04 |
Self-centering wafer support system Grant 6,893,507 - Goodman , et al. May 17, 2 | 2005-05-17 |
Wafer support system App 20040198153 - Halpin, Michael W. ;   et al. | 2004-10-07 |
Wafer support system Grant 6,692,576 - Halpin , et al. February 17, 2 | 2004-02-17 |
Wafer support system App 20030075274 - Halpin, Michael W. ;   et al. | 2003-04-24 |
Self-centering wafer support system App 20030029571 - Goodman, Matthew G. ;   et al. | 2003-02-13 |
Wafer support system Grant 6,491,757 - Halpin , et al. December 10, 2 | 2002-12-10 |
Process chamber with rectangular temperature compensation ring App 20020179586 - Wengert, John F. ;   et al. | 2002-12-05 |
Process chamber with downstream getter plate Grant 6,464,792 - Wengert , et al. October 15, 2 | 2002-10-15 |
Low mass wafer support system Grant 6,454,865 - Goodman , et al. September 24, 2 | 2002-09-24 |
Low mass wafer support system App 20020043337 - Goodman, Matthew G. ;   et al. | 2002-04-18 |
Wafer support system Grant 6,343,183 - Halpin , et al. January 29, 2 | 2002-01-29 |
Wafer support system App 20010054390 - Halpin, Michael W. ;   et al. | 2001-12-27 |
Wafer support system Grant 6,203,622 - Halpin , et al. March 20, 2 | 2001-03-20 |
Wafer support system Grant 6,113,702 - Halpin , et al. September 5, 2 | 2000-09-05 |
Process chamber with inner support Grant 6,093,252 - Wengert , et al. July 25, 2 | 2000-07-25 |
Wafer support system Grant 6,053,982 - Halpin , et al. April 25, 2 | 2000-04-25 |
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