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Patent applications and USPTO patent grants for Jacobs; Fransiscus Mathijs.The latest application filed is for "vibration isolator, lithographic apparatus and device manufacturing method".
Patent | Date |
---|---|
Vibration isolator, lithographic apparatus and device manufacturing method Grant 10,816,910 - Butler , et al. October 27, 2 | 2020-10-27 |
Lithographic apparatus and device manufacturing method Grant 10,503,086 - Butler , et al. Dec | 2019-12-10 |
Vibration Isolator, Lithographic Apparatus And Device Manufacturing Method App 20190049852 - Butler; Hans ;   et al. | 2019-02-14 |
Lithographic apparatus, and device manufacturing method Grant 10,191,393 - Westerlaken , et al. Ja | 2019-01-29 |
Lithographic Apparatus And Device Manufacturing Method App 20190011838 - BUTLER; Hans ;   et al. | 2019-01-10 |
Lithographic Apparatus, And Device Manufacturing Method App 20180059555 - WESTERLAKEN; Jan Steven Christiaan ;   et al. | 2018-03-01 |
Lithographic apparatus, device manufacturing method and displacement measurement system Grant 9,575,416 - Van Der Pasch , et al. February 21, 2 | 2017-02-21 |
Lithographic Apparatus, Device Manufacturing Method And Displacement Measurement System App 20150212428 - Van Der Pasch; Engelbertus Antonius Fransiscus ;   et al. | 2015-07-30 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless Grant 8,368,868 - Vermeulen , et al. February 5, 2 | 2013-02-05 |
Lithographic apparatus and device manufacturing method Grant 8,334,983 - Beerens , et al. December 18, 2 | 2012-12-18 |
Lithographic apparatus provided with a swap bridge Grant 8,189,174 - Kruizinga , et al. May 29, 2 | 2012-05-29 |
Lithographic Apparatus And Device Manufacturing Method App 20100297561 - BEERENS; Ruud Antonius Catharina Maria ;   et al. | 2010-11-25 |
Lithographic Apparatus With Gas Pressure Means For Controlling A Planar Position Of A Patterning Device Contactless App 20100159399 - VERMEULEN; Johannes Petrus Martinus Bernardus ;   et al. | 2010-06-24 |
Lithographic Apparatus Provided With A Swap Bridge App 20100128241 - KRUIZINGA; Matthias ;   et al. | 2010-05-27 |
Lithographic apparatus and device manufacturing method App 20090168037 - Kroonen; Roger Johannes Maria Hubertus ;   et al. | 2009-07-02 |
Lithographic apparatus and device manufacturing method App 20090168042 - Kroonen; Roger Johannes Maria Hubertus ;   et al. | 2009-07-02 |
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