Patent | Date |
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Method for producing single crystal SiC substrate and single crystal SiC substrate produced by the same Grant 8,906,786 - Izumi , et al. December 9, 2 | 2014-12-09 |
Method For Producing Single Crystal Sic Substrate And Single Crystal Sic Substrate Produced By The Same App 20140051235 - Izumi; Katsutoshi ;   et al. | 2014-02-20 |
Method for producing single crystal SiC substrate and single crystal SiC substrate produced by the same Grant 8,603,901 - Izumi , et al. December 10, 2 | 2013-12-10 |
Method for manufacturing nitrogen compound semiconductor substrate and nitrogen compound semiconductor substrate, and method for manufacturing single crystal SiC substrate and single crystal SiC substrate Grant 8,563,442 - Kawamura , et al. October 22, 2 | 2013-10-22 |
Method For Manufacturing Nitrogen Compound Semiconductor Substrate And Nitrogen Compound Semiconductor Substrate, And Method For Manufacturing Single Crystal Sic Substrate And Single Crystal Sic Substrate App 20110089433 - Kawamura; Keisuke ;   et al. | 2011-04-21 |
METHOD FOR PRODUCING SINGLE CRYSTAL SiC SUBSTRATE AND SINGLE CRYSTAL SiC SUBSTRATE PRODUCED BY THE SAME App 20100252837 - Izumi; Katsutoshi ;   et al. | 2010-10-07 |
Manufacturing method of monocrystalline gallium nitride localized substrate Grant 7,393,763 - Izumi , et al. July 1, 2 | 2008-07-01 |
Manufacturing apparatus for buried insulating layer-type semiconductor silicon carbide substrate Grant 7,128,788 - Izumi , et al. October 31, 2 | 2006-10-31 |
Manufacturing method for buried insulating layer-type semiconductor silicon carbide substrate Grant 7,084,049 - Izumi , et al. August 1, 2 | 2006-08-01 |
Manufacturing device for buried insulating layer type single crystal silicon carbide substrate Grant 7,077,875 - Izumi , et al. July 18, 2 | 2006-07-18 |
Method for manufacturing buried insulating layer type single crystal silicon carbide substrate Grant 6,927,144 - Izumi , et al. August 9, 2 | 2005-08-09 |
Manufacturing method of monocrystalline gallium nitride localized substrate App 20050148108 - Izumi, Katsutoshi ;   et al. | 2005-07-07 |
Manufacturing device for buried insulating layer type single crystal silicon carbide substrate App 20050136611 - Izumi, Katsutoshi ;   et al. | 2005-06-23 |
Method for Manufacturing Buried Insulating Layer Type Single Crystal Silicon Carbide Substrate and Manufacturing Device for the Same App 20040191966 - IZUMI, Katsutoshi ;   et al. | 2004-09-30 |
Manufacturing apparatus for buried insulating layer-type semiconductor silicon carbide substrate App 20040173154 - Izumi, Katsutoshi ;   et al. | 2004-09-09 |
Single crystal silicon carbide thin film fabrication method and fabrication apparatus of the same Grant 6,773,508 - Izumi , et al. August 10, 2 | 2004-08-10 |
Etching method and etching apparatus of carbon thin film Grant 6,743,729 - Izumi , et al. June 1, 2 | 2004-06-01 |
Monocrystalline gallium nitride localized substrate and manufacturing method thereof App 20040099871 - Izumi, Katsutoshi ;   et al. | 2004-05-27 |
Manufacturing method for buried insulating layer-type semiconductor silicon carbide substrate and manufacturing apparatus thereof App 20030148586 - Izumi, Katsutoshi ;   et al. | 2003-08-07 |
Single crystal silicon carbide thin film fabrication method and fabrication apparatus of the same App 20020185058 - Izumi, Katsutoshi ;   et al. | 2002-12-12 |
Etching method and etching apparatus of carbon thin film App 20020130107 - Izumi, Katsutoshi ;   et al. | 2002-09-19 |
Method of making semiconductor device having SIMOX structure Grant 5,665,613 - Nakashima , et al. September 9, 1 | 1997-09-09 |
SOI substrate and method of producing the same Grant 5,658,809 - Nakashima , et al. August 19, 1 | 1997-08-19 |
Method of making field-effect semiconductor device on SOI Grant 5,459,347 - Omura , et al. October 17, 1 | 1995-10-17 |
Method of manufacturing SOI semiconductor element Grant 5,188,973 - Omura , et al. February 23, 1 | 1993-02-23 |
Semiconductor device having buried insulating layer Grant 4,241,359 - Izumi , et al. December 23, 1 | 1980-12-23 |