Izawa; Masaru
Patent Applications and Registrations
Patent applications and USPTO patent grants for Izawa; Masaru.The latest application filed is for "substrate processing method and plasma processing apparatus".
Company Profile
15.76.116
- Izawa; Masaru - Tokyo JP
- - Tokyo JP
- Izawa; Masaru - Toyama JP
- Izawa; Masaru - Kudamatsu JP
- Izawa; Masaru - Toyama-shi JP
- Izawa; Masaru - Hino JP
- IZAWA; Masaru - Kudamatsu-shi JP
- Izawa; Masaru - Kobe JP
- IZAWA; Masaru - Kobe-shi JP
- IZAWA, MASARU - HINO-SHI JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma processing apparatus Grant 11,424,105 - Mori , et al. August 23, 2 | 2022-08-23 |
| Substrate processing method and plasma processing apparatus Grant 11,276,579 - Kobayashi , et al. March 15, 2 | 2022-03-15 |
| Plasma processing method and etching apparatus Grant 11,217,454 - Shinoda , et al. January 4, 2 | 2022-01-04 |
| Substrate Processing Method And Plasma Processing Apparatus App 20210366721 - KOBAYASHI; Hiroyuki ; et al. | 2021-11-25 |
| Plasma Etching Method And Plasma Processing Apparatus App 20210358760 - FUJISAKI; Sumiko ; et al. | 2021-11-18 |
| Plasma Processing Method And Etching Apparatus App 20210242030 - SHINODA; Kazunori ; et al. | 2021-08-05 |
| Detecting Method And Detecting Device Of Gas Components And Processing Apparatus Using Detecting Device Of Gas Components App 20210231571 - OGAWA; Yoshifumi ; et al. | 2021-07-29 |
| Plasma Processing Device App 20210159055 - ARAMAKI; Tooru ; et al. | 2021-05-27 |
| Vacuum Processing Apparatus App 20210151298 - KOBAYASHI; Hiroyuki ; et al. | 2021-05-20 |
| Plasma processing method and plasma processing apparatus Grant 10,971,369 - Matsui , et al. April 6, 2 | 2021-04-06 |
| Vacuum processing apparatus Grant 10,937,635 - Kobayashi , et al. March 2, 2 | 2021-03-02 |
| Plasma processing device Grant 10,930,476 - Aramaki , et al. February 23, 2 | 2021-02-23 |
| Plasma Processing Apparatus App 20210043424 - Mori; Isao ; et al. | 2021-02-11 |
| Plasma Processing Apparatus And Plasma Processing Method App 20200411291 - ARAMAKI; Tooru ; et al. | 2020-12-31 |
| Plasma etching method and plasma etching apparatus Grant 10,872,779 - Miyoshi , et al. December 22, 2 | 2020-12-22 |
| Plasma processing apparatus and plasma processing method Grant 10,811,231 - Aramaki , et al. October 20, 2 | 2020-10-20 |
| Plasma Processing Method App 20200328099 - KOBAYASHI; Hiroyuki ; et al. | 2020-10-15 |
| Etching method and plasma processing apparatus Grant 10,665,516 - Matsui , et al. | 2020-05-26 |
| Etching method and plasma processing apparatus Grant 10622269 - | 2020-04-14 |
| Plasma Etching Method And Plasma Etching Apparatus App 20200006079 - MIYOSHI; Nobuya ; et al. | 2020-01-02 |
| Etching method and etching apparatus Grant 10,418,254 - Shinoda , et al. Sept | 2019-09-17 |
| Plasma Processing Method And Plasma Processing Apparatus App 20190237337 - MATSUI; Miyako ; et al. | 2019-08-01 |
| Vacuum Processing Apparatus App 20190237302 - KOBAYASHI; Hiroyuki ; et al. | 2019-08-01 |
| Etching method and etching apparatus Grant 10,325,781 - Shinoda , et al. | 2019-06-18 |
| Vacuum processing apparatus Grant 10,290,472 - Kobayashi , et al. | 2019-05-14 |
| Plasma Processing Apparatus And Plasma Processing Method App 20190122864 - ARAMAKI; Tooru ; et al. | 2019-04-25 |
| Etching Method And Etching Apparatus App 20190067032 - SHINODA; Kazunori ; et al. | 2019-02-28 |
| Plasma processing apparatus and plasma processing method Grant 10,217,611 - Aramaki , et al. Feb | 2019-02-26 |
| Plasma processing apparatus Grant 10,192,720 - Kobayashi , et al. Ja | 2019-01-29 |
| Variable valve mechanism for internal combustion engine Grant 10,132,207 - Takehana , et al. November 20, 2 | 2018-11-20 |
| Plasma processing apparatus and plasma processing method Grant 10,128,141 - Tandou , et al. November 13, 2 | 2018-11-13 |
| Dry etching apparatus and method Grant 10,090,160 - Mori , et al. October 2, 2 | 2018-10-02 |
| Etching Method And Plasma Processing Apparatus App 20180269118 - MATSUI; Miyako ; et al. | 2018-09-20 |
| Plasma Processing Apparatus App 20180122665 - KOBAYASHI; Hiroyuki ; et al. | 2018-05-03 |
| Etching Method And Etching Apparatus App 20180076051 - SHINODA; Kazunori ; et al. | 2018-03-15 |
| Variable Valve Mechanism For Internal Combustion Engine App 20170362966 - Takehana; Kaori ; et al. | 2017-12-21 |
| Vacuum Processing Apparatus App 20170229290 - KOBAYASHI; Hiroyuki ; et al. | 2017-08-10 |
| Plasma processing apparatus and plasma processing method Grant 9,704,731 - Miya , et al. July 11, 2 | 2017-07-11 |
| Plasma Processing Apparatus App 20170018405 - KOBAYASHI; Hiroyuki ; et al. | 2017-01-19 |
| Plasma Processing Device App 20170011890 - ARAMAKI; Tooru ; et al. | 2017-01-12 |
| Plasma Processing Apparatus And Plasma Processing Method App 20160351404 - ARAMAKI; Tooru ; et al. | 2016-12-01 |
| Heat treatment apparatus Grant 9,490,104 - Yokogawa , et al. November 8, 2 | 2016-11-08 |
| Plasma processing apparatus Grant 9,368,377 - Tandou , et al. June 14, 2 | 2016-06-14 |
| Dry Etching Apparatus And Method App 20160141183 - MORI; Masahito ; et al. | 2016-05-19 |
| Vacuum processing apparatus Grant 9,150,964 - Kobayashi , et al. October 6, 2 | 2015-10-06 |
| Vacuum processing apparatus and plasma processing apparatus with temperature control function for wafer stage Grant 9,070,724 - Tandou , et al. June 30, 2 | 2015-06-30 |
| Plasma processing apparatus Grant 9,038,567 - Kobayashi , et al. May 26, 2 | 2015-05-26 |
| Plasma processing apparatus and plasma processing method Grant 8,955,579 - Tandou , et al. February 17, 2 | 2015-02-17 |
| Plasma Processing Apparatus And Plasma Processing Method App 20150031213 - MIYA; Go ; et al. | 2015-01-29 |
| Plasma Processing Apparatus And Plasma Processing Method App 20140283534 - Tandou; Takumi ; et al. | 2014-09-25 |
| Plasma processing apparatus and maintenance method therefor Grant 8,833,089 - Tandou , et al. September 16, 2 | 2014-09-16 |
| Plasma Processing Apparatus App 20140231015 - KOBAYASHI; Hiroyuki ; et al. | 2014-08-21 |
| Plasma processing apparatus Grant 8,733,282 - Kobayashi , et al. May 27, 2 | 2014-05-27 |
| Plasma processing apparatus and plasma processing method Grant 8,632,688 - Izawa , et al. January 21, 2 | 2014-01-21 |
| Plasma Processing Apparatus And Plasma Processing Method App 20140004706 - MIYA; Go ; et al. | 2014-01-02 |
| Method And Apparatus For Plasma Heat Treatment App 20130277354 - Miyake; Masatoshi ; et al. | 2013-10-24 |
| Dry Etching Apparatus And Method App 20130228550 - MORI; Masahito ; et al. | 2013-09-05 |
| Plasma Processing Apparatus App 20130199728 - KOBAYASHI; Hiroyuki ; et al. | 2013-08-08 |
| Plasma processing apparatus Grant 8,496,781 - Yokogawa , et al. July 30, 2 | 2013-07-30 |
| Plasma processing apparatus Grant 8,491,751 - Kobayashi , et al. July 23, 2 | 2013-07-23 |
| Heat Treatment Apparatus App 20130112669 - UEMURA; Takashi ; et al. | 2013-05-09 |
| Heat Treatment Apparatus App 20130112670 - YOKOGAWA; Ken'etsu ; et al. | 2013-05-09 |
| Plasma processing apparatus and plasma processing method Grant 8,426,764 - Tandou , et al. April 23, 2 | 2013-04-23 |
| Plasma processing apparatus Grant 8,397,668 - Kobayashi , et al. March 19, 2 | 2013-03-19 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130045604 - MAEDA; Kenji ; et al. | 2013-02-21 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130045547 - IZAWA; Masaru ; et al. | 2013-02-21 |
| Vacuum processing apparatus and plasma processing apparatus with temperature control function for wafer stage Grant 8,349,127 - Tandou , et al. January 8, 2 | 2013-01-08 |
| Chemical conversion treatment liquid Grant 8,333,847 - Izawa , et al. December 18, 2 | 2012-12-18 |
| Vacuum Processing Apparatus And Plasma Processing Apparatus With Temperature Control Function For Wafer Stage App 20120273132 - Tandou; Takumi ; et al. | 2012-11-01 |
| Plasma Processing Apparatus Including Etching Processing Apparatus And Ashing Processing Apparatus And Plasma Processing Method Using Plasma Processing Apparatus App 20120211163 - KOBAYASHI; Hiroyuki ; et al. | 2012-08-23 |
| Plasma Processing Apparatus App 20120186747 - OBAMA; Shinji ; et al. | 2012-07-26 |
| Plasma Processing Apparatus App 20120186745 - MIYA; Go ; et al. | 2012-07-26 |
| Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus Grant 8,197,635 - Kobayashi , et al. June 12, 2 | 2012-06-12 |
| Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus Grant 8,187,485 - Kobayashi , et al. May 29, 2 | 2012-05-29 |
| Vacuum processing apparatus Grant 8,142,567 - Kobayashi , et al. March 27, 2 | 2012-03-27 |
| Semiconductor Device Manufacturing Apparatus Capable Of Reducing Particle Contamination App 20120003837 - Kobayashi; Hiroyuki ; et al. | 2012-01-05 |
| Plasma processing apparatus Grant 8,034,181 - Tandou , et al. October 11, 2 | 2011-10-11 |
| Plasma processing apparatus and method for venting the same to atmosphere Grant 8,029,874 - Kobayashi , et al. October 4, 2 | 2011-10-04 |
| Plasma Processing Apparatus And Plasma Processing Method App 20110207243 - TANDOU; Takumi ; et al. | 2011-08-25 |
| Method For Transporting Object To Be Processed In Semiconductor Manufacturing Apparatus App 20110194924 - KOBAYASHI; Hiroyuki ; et al. | 2011-08-11 |
| Chemical Conversion Treatment Liquid App 20110146847 - IZAWA; Masaru ; et al. | 2011-06-23 |
| Vacuum Processing Apparatus And Plasma Processing Apparatus With Temperature Control Function For Wafer Stage App 20110132541 - TANDOU; Takumi ; et al. | 2011-06-09 |
| Plasma Processing Apparatus Including Etching Processing Apparatus And Ashing Processing Apparatus And Plasma Processing Method Using Plasma Processing Apparatus App 20110120647 - KOBAYASHI; Hiroyuki ; et al. | 2011-05-26 |
| Semiconductor Device Manufacturing Apparatus Capable Of Reducing Particle Contamination App 20110100555 - Kobayashi; Hiroyuki ; et al. | 2011-05-05 |
| Method for manufacturing surface treated steel material using a chemical conversion treatment liquid Grant 7,918,945 - Izawa , et al. April 5, 2 | 2011-04-05 |
| Manufacturing method of semiconductor device Grant 7,915,055 - Kurihara , et al. March 29, 2 | 2011-03-29 |
| Plasma Processing Apparatus Using Transmission Electrode App 20110030899 - SUZUKI; Keizo ; et al. | 2011-02-10 |
| Plasma Processing Apparatus And Maintenance Method Therefor App 20100326094 - TANDOU; Takumi ; et al. | 2010-12-30 |
| Plasma processing method Grant 7,842,619 - Miyake , et al. November 30, 2 | 2010-11-30 |
| Plasma Etching Method For Etching An Object App 20100297849 - Miyake; Masatoshi ; et al. | 2010-11-25 |
| Plasma processing apparatus capable of adjusting temperature of sample stand Grant 7,838,792 - Tandou , et al. November 23, 2 | 2010-11-23 |
| Plasma Processing Apparatus Including Etching Processing Apparatus And Ashing Processing Apparatus And Plasma Processing Method Using Plasma Processing Apparatus App 20100285670 - KOBAYASHI; Hiroyuki ; et al. | 2010-11-11 |
| Plasma Processing System App 20100258246 - Iwakoshi; Takehisa ; et al. | 2010-10-14 |
| Vacuum Processing Apparatus App 20100192857 - Kobayashi; Hiroyuki ; et al. | 2010-08-05 |
| Plasma processing apparatus Grant 7,767,054 - Kobayashi , et al. August 3, 2 | 2010-08-03 |
| Vacuum Processing Apparatus App 20100163181 - KOBAYASHI; Hiroyuki ; et al. | 2010-07-01 |
| Plasma Processing Apparatus App 20100126666 - TANDOU; Takumi ; et al. | 2010-05-27 |
| Method for smoothing a resist pattern prior to etching a layer using the resist pattern Grant 7,723,235 - Kurihara , et al. May 25, 2 | 2010-05-25 |
| Dimension measuring apparatus and dimension measuring method for semiconductor device Grant 7,720,632 - Kurihara , et al. May 18, 2 | 2010-05-18 |
| Surface conditioning prior to chemical conversion treatment of a steel member Grant 7,666,266 - Izawa , et al. February 23, 2 | 2010-02-23 |
| Plasma processing apparatus Grant 7,662,232 - Kobayashi , et al. February 16, 2 | 2010-02-16 |
| Plasma Processing Method App 20100029024 - Miyake; Masatoshi ; et al. | 2010-02-04 |
| Plasma Processing Apparatus And Plasma Processing Method App 20100025369 - NEGISHI; Nobuyuki ; et al. | 2010-02-04 |
| Plasma processing apparatus App 20100006225 - Yokogawa; Kanetsu ; et al. | 2010-01-14 |
| Vacuum Processing Apparatus App 20090301392 - Kobayashi; Hiroyuki ; et al. | 2009-12-10 |
| Semiconductor Device Manufacturing Apparatus Capable Of Reducing Particle Contamination App 20090294060 - Kobayashi; Hiroyuki ; et al. | 2009-12-03 |
| Semiconductor Manufacturing System And Method App 20090299512 - TANAKA; Junichi ; et al. | 2009-12-03 |
| Plasma Processing Apparatus And Plasma Processing Method App 20090277883 - Tandou; Takumi ; et al. | 2009-11-12 |
| Vacuum Processing Apparatus App 20090250000 - Kobayashi; Hiroyuki ; et al. | 2009-10-08 |
| Plasma Processing Apparatus App 20090194235 - Kobayashi; Hiroyuki ; et al. | 2009-08-06 |
| Plasma Processing Apparatus and Method for Venting the Same to Atmosphere App 20090183683 - Kobayashi; Hiroyuki ; et al. | 2009-07-23 |
| Dry-etching Method And Apparatus App 20090181545 - Negishi; Nobuyuki ; et al. | 2009-07-16 |
| Method For Transporting Object To Be Processed In Semiconductor Manufacturing Apparatus App 20090060702 - Kobayashi; Hiroyuki ; et al. | 2009-03-05 |
| Dimension Measuring Apparatus And Dimension Measuring Method For Semiconductor Device App 20080319709 - KURIHARA; Masaru ; et al. | 2008-12-25 |
| Substrate Processing Apparatus App 20080308134 - Maeda; Kenji ; et al. | 2008-12-18 |
| Plasma Processing Apparatus App 20080289767 - TANDOU; TAKUMI ; et al. | 2008-11-27 |
| Wafer Edge Cleaner App 20080277061 - Kobayashi; Hiroyuki ; et al. | 2008-11-13 |
| Plasma Processing Apparatus App 20080236748 - KOBAYASHI; HIROYUKI ; et al. | 2008-10-02 |
| Plasma Processing Apparatus App 20080223522 - Kobayashi; Hiroyuki ; et al. | 2008-09-18 |
| Plasma Processing Apparatus App 20080216959 - KOBAYASHI; HIROYUKI ; et al. | 2008-09-11 |
| Plasma Processing Apparatus App 20080203925 - Tandou; Takumi ; et al. | 2008-08-28 |
| Plasma Processing Apparatus And Plasma Processing Method App 20080178608 - Tandou; Takumi ; et al. | 2008-07-31 |
| Substrate-Holder, Etching Method of the Substrate, and the Fabrication Method of a Magnetic Recording Media App 20080149590 - Maeda; Kenji ; et al. | 2008-06-26 |
| Dry etching method and apparatus Grant 7,371,690 - Negishi , et al. May 13, 2 | 2008-05-13 |
| Method for fabrication semiconductor device Grant 7,372,582 - Negishi , et al. May 13, 2 | 2008-05-13 |
| Semiconductor Device Manufacturing Method App 20080045022 - Kurihara; Masaru ; et al. | 2008-02-21 |
| Plasma processing apparatus capable of adjusting temperature of sample stand App 20080023448 - Tandou; Takumi ; et al. | 2008-01-31 |
| Semiconductor Device Manufacturing Apparatus Capable Of Reducing Particle Contamination App 20080017318 - Kobayashi; Hiroyuki ; et al. | 2008-01-24 |
| Manufacturing Method of Semiconductor Device App 20070238204 - KURIHARA; MASARU ; et al. | 2007-10-11 |
| Plasma processing apparatus App 20070186972 - Kobayashi; Hiroyuki ; et al. | 2007-08-16 |
| Surface conditioning prior to chemical conversion treatment of a steel member App 20070056656 - Izawa; Masaru ; et al. | 2007-03-15 |
| Plasma processing apparatus including etching processing apparatus and ashing processing apparatus and plasma processing method using plasma processing apparatus App 20070023143 - Kobayashi; Hiroyuki ; et al. | 2007-02-01 |
| Plasma processing apparatus App 20070023398 - Kobayashi; Hiroyuki ; et al. | 2007-02-01 |
| Micro-spectroscopic measuring device and micro-chemical system Grant 7,145,146 - Ogawa , et al. December 5, 2 | 2006-12-05 |
| Plasma processing apparatus App 20060254717 - Kobayashi; Hiroyuki ; et al. | 2006-11-16 |
| Plasma processing apparatus App 20060236932 - Yokogawa; Kenetsu ; et al. | 2006-10-26 |
| Semiconductor manufacturing apparatus capable of preventing adhesion of particles App 20060169207 - Kobayashi; Hiroyuki ; et al. | 2006-08-03 |
| Method for fabrication semiconductor device App 20060141795 - Negishi; Nobuyuki ; et al. | 2006-06-29 |
| Surface processing method of a specimen and surface processing apparatus of the specimen Grant 7,049,243 - Ono , et al. May 23, 2 | 2006-05-23 |
| Plasma processing apparatus App 20060016559 - Kobayashi; Hiroyuki ; et al. | 2006-01-26 |
| Plasma processing apparatus App 20060016560 - Yokogawa; Kenetsu ; et al. | 2006-01-26 |
| Dry-etching method and apparatus App 20050284571 - Negishi, Nobuyuki ; et al. | 2005-12-29 |
| Manufacturing method for semiconductor devices Grant 6,977,229 - Yokogawa , et al. December 20, 2 | 2005-12-20 |
| Dry etching method and apparatus App 20050048787 - Negishi, Nobuyuki ; et al. | 2005-03-03 |
| Micro-spectroscopic measuring device and micro-chemical system App 20050017178 - Ogawa, Taro ; et al. | 2005-01-27 |
| Method of manufacturing a semiconductor device and manufacturing system Grant 6,842,658 - Izawa , et al. January 11, 2 | 2005-01-11 |
| Surface processing method of a specimen and surface processing apparatus of the specimen App 20040259361 - Ono, Tetsuo ; et al. | 2004-12-23 |
| Microreactor, its production method, and sample screening device App 20040228774 - Ogawa, Taro ; et al. | 2004-11-18 |
| Method for fabricating semiconductor devices including wiring forming with a porous low-k film and copper Grant 6,784,109 - Kofuji , et al. August 31, 2 | 2004-08-31 |
| Surface treated steel material, a method for its manufacture, and a chemical conversion treatment liquid App 20040154700 - Izawa, Masaru ; et al. | 2004-08-12 |
| Surface treated steel material, a method for its manufacture, and a chemical conversion treatment liquid Grant 6,756,092 - Izawa , et al. June 29, 2 | 2004-06-29 |
| Dry etching method App 20040058554 - Izawa, Masaru ; et al. | 2004-03-25 |
| Method of manufacturing a semiconductor integrated circuit device App 20040038436 - Mori, Masahito ; et al. | 2004-02-26 |
| Manufacturing method for semiconductor devices App 20040018727 - Yokogawa, Kenetsu ; et al. | 2004-01-29 |
| Specimen surface processing method Grant 6,677,244 - Ono , et al. January 13, 2 | 2004-01-13 |
| Method of manufacturing semiconductor devices Grant 6,673,685 - Mori , et al. January 6, 2 | 2004-01-06 |
| Process for fabricating semiconductor device Grant 6,645,870 - Negishi , et al. November 11, 2 | 2003-11-11 |
| Apparatus for cleaning semiconductor wafers in a vacuum environment Grant 6,643,893 - Momonoi , et al. November 11, 2 | 2003-11-11 |
| Method for cleaning semiconductor wafers in a vacuum environment Grant 6,629,538 - Yokogawa , et al. October 7, 2 | 2003-10-07 |
| Manufacturing method of semiconductor integrated circuit device Grant 6,607,988 - Yunogami , et al. August 19, 2 | 2003-08-19 |
| Surface treated steel material, a method for its manufacture, and a chemical conversion treatment liquid App 20030096124 - Izawa, Masaru ; et al. | 2003-05-22 |
| Plasma processing system and method for manufacturing a semiconductor device by using the same Grant 6,551,445 - Yokogawa , et al. April 22, 2 | 2003-04-22 |
| Method of manufacturing semiconductor devices App 20030049876 - Mori, Masahito ; et al. | 2003-03-13 |
| Process for fabricating semiconductor device App 20030013313 - Negishi, Nobuyuki ; et al. | 2003-01-16 |
| Method of manufacturing a semiconductor integrated circuit device Grant 6,506,674 - Ikeda , et al. January 14, 2 | 2003-01-14 |
| Method and apparatus for fabricating semiconductor devices App 20030008509 - Kofuji, Naoyuki ; et al. | 2003-01-09 |
| Plasma treatment apparatus and plasma treatment method Grant 6,475,918 - Izawa , et al. November 5, 2 | 2002-11-05 |
| Plasma processing method App 20020123229 - Ono, Tetsuo ; et al. | 2002-09-05 |
| Method of manufacturing a semiconductor device and manufacturing system App 20020103563 - Izawa, Masaru ; et al. | 2002-08-01 |
| Dry cleaning apparatus App 20020092121 - Momonoi, Yoshinori ; et al. | 2002-07-18 |
| Dry cleaning method App 20020092541 - Yokogawa, Kenetsu ; et al. | 2002-07-18 |
| Method of manufacturing a semiconductor integrated circuit device App 20020039843 - Ikeda, Takenobu ; et al. | 2002-04-04 |
| Plasma Processing System And Method App 20020020494 - YOKOGAWA, KEN?apos;ETSU ; et al. | 2002-02-21 |
| Manufacturing method of semiconductor integrated circuit device App 20010006245 - Yunogami, Takashi ; et al. | 2001-07-05 |
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