Patent | Date |
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Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film Grant 10,248,019 - Kataoka , et al. | 2019-04-02 |
Pattern forming method and resist composition Grant 10,126,653 - Iwato , et al. November 13, 2 | 2018-11-13 |
Pattern forming method, composition kit and resist film, and method for producing electronic device using them, and electronic device Grant 9,915,870 - Takizawa , et al. March 13, 2 | 2018-03-13 |
Method of forming pattern and developer for use in the method Grant 9,897,922 - Enomoto , et al. February 20, 2 | 2018-02-20 |
Pattern forming method and actinic-ray- or radiation-sensitive resin composition Grant 9,760,003 - Iwato , et al. September 12, 2 | 2017-09-12 |
Resin composition and pattern forming method using the same Grant 9,718,901 - Tsuruta , et al. August 1, 2 | 2017-08-01 |
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same Grant 9,709,892 - Kataoka , et al. July 18, 2 | 2017-07-18 |
Method Of Forming Pattern App 20170102618 - KATO; Keita ;   et al. | 2017-04-13 |
Pattern forming method and resist composition Grant 9,551,935 - Kato , et al. January 24, 2 | 2017-01-24 |
Method Of Forming Pattern And Developer For Use In The Method App 20160349620 - ENOMOTO; Yuichiro ;   et al. | 2016-12-01 |
Method of forming pattern and developer for use in the method Grant 9,482,958 - Enomoto , et al. November 1, 2 | 2016-11-01 |
Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern Grant 9,454,079 - Shibuya , et al. September 27, 2 | 2016-09-27 |
Pattern forming method, resist pattern formed by the method, method for manufacturing electronic device using the same, and electronic device Grant 9,448,482 - Iwato , et al. September 20, 2 | 2016-09-20 |
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device Grant 9,417,528 - Shirakawa , et al. August 16, 2 | 2016-08-16 |
Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, method for manufacturing electronic device using the same, and electronic device Grant 9,411,230 - Takizawa , et al. August 9, 2 | 2016-08-09 |
Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the composition Grant 9,291,892 - Shibuya , et al. March 22, 2 | 2016-03-22 |
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device Grant 9,250,532 - Kato , et al. February 2, 2 | 2016-02-02 |
Pattern Forming Method, Composition Kit And Resist Film, And Method For Producing Electronic Device Using Them, And Electronic Device App 20160018734 - TAKIZAWA; HIROO ;   et al. | 2016-01-21 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film Grant 9,223,219 - Enomoto , et al. December 29, 2 | 2015-12-29 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film And Pattern Forming Method App 20150355541 - IWATO; Kaoru | 2015-12-10 |
Pattern Forming Method, Method For Manufacturing Electronic Device Using Same, And Electronic Device App 20150338743 - IWATO; Kaoru | 2015-11-26 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Method For Manufacturing Electronic Device, And Electronic Device App 20150301451 - IWATO; Kaoru | 2015-10-22 |
Method Of Forming Pattern And Developer For Use In The Method App 20150293454 - ENOMOTO; Yuichiro ;   et al. | 2015-10-15 |
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition Grant 9,152,048 - Saegusa , et al. October 6, 2 | 2015-10-06 |
Pattern Forming Method, Resist Pattern Formed By The Method, Method For Manufacturing Electronic Device Using The Same, And Electronic Device App 20150253673 - IWATO; Kaoru ;   et al. | 2015-09-10 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Resist Composition, Method For Manufacturing Electronic Device, And Electronic Device App 20150248056 - SHIRAKAWA; Michihiro ;   et al. | 2015-09-03 |
Method of forming pattern and developer for use in the method Grant 9,097,973 - Enomoto , et al. August 4, 2 | 2015-08-04 |
Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device Grant 9,075,310 - Shirakawa , et al. July 7, 2 | 2015-07-07 |
Resin Composition And Pattern Forming Method Using The Same App 20150118623 - TSURUTA; Takuya ;   et al. | 2015-04-30 |
Method Of Forming Pattern And Actinic-ray- Or Radiation-sensitive Resin Composition For Use In The Method App 20150118621 - FUKUHARA; Toshiaki ;   et al. | 2015-04-30 |
Resist composition and method of forming pattern therewith Grant 9,017,917 - Iwato , et al. April 28, 2 | 2015-04-28 |
Pattern forming method, chemical amplification resist composition and resist film Grant 8,999,621 - Enomoto , et al. April 7, 2 | 2015-04-07 |
Pattern forming method, chemical amplification resist composition and resist film Grant 8,999,622 - Iwato , et al. April 7, 2 | 2015-04-07 |
Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the same Grant 8,993,211 - Iwato March 31, 2 | 2015-03-31 |
Pattern forming method, chemical amplification resist composition and resist film Grant 8,956,802 - Iwato February 17, 2 | 2015-02-17 |
Negative pattern forming method and resist pattern Grant 8,859,192 - Kato , et al. October 14, 2 | 2014-10-14 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And, Resist Film, Pattern Forming Method, Electronic Device Manufacturing Method, And Electronic Device, Each Using The Composition App 20140287363 - SHIBUYA; Akinori ;   et al. | 2014-09-25 |
Actinic Ray- Or Radiation-sensitive Resin Composition, Actinic Ray- Or Radiation-sensitive Film And Method Of Forming Pattern App 20140248562 - SHIBUYA; Akinori ;   et al. | 2014-09-04 |
Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, manufacturing method of electronic device, and electronic device Grant 8,822,129 - Iwato , et al. September 2, 2 | 2014-09-02 |
Actinic Ray- Or Radiation-sensitive Resin Composition, Actinic Ray- Or Radiation-sensitive Film And Method Of Forming Pattern App 20140234759 - KATAOKA; Shohei ;   et al. | 2014-08-21 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Resist Composition, Method For Manufacturing Electronic Device, And Electronic Device App 20140234761 - SHIRAKAWA; Michihiro ;   et al. | 2014-08-21 |
Pattern forming method, pattern, chemical amplification resist composition and resist film Grant 8,808,965 - Iwato , et al. August 19, 2 | 2014-08-19 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Manufacturing Method Of Electronic Device, And Electronic Device App 20140227637 - KATO; Keita ;   et al. | 2014-08-14 |
Actinic ray-sensitive or radiation-sensitive resin composition and resist film and pattern forming method using the composition Grant 8,802,349 - Yoshidome , et al. August 12, 2 | 2014-08-12 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the composition Grant 8,795,944 - Saegusa , et al. August 5, 2 | 2014-08-05 |
Pattern Forming Method, Electron Beam-sensitive Or Extreme Ultraviolet-sensitive Composition, Resist Film, Method For Manufacturing Electronic Device Using The Same, And Electronic Device App 20140212796 - TAKIZAWA; Hiroo ;   et al. | 2014-07-31 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film Therefrom, Method Of Forming Pattern Using The Composition, Process For Manufacturing Electronic Device And Electronic Device App 20140212814 - ITO; Junichi ;   et al. | 2014-07-31 |
Pattern Forming Method, Chemical Amplification Resist Composition And Resist Film App 20140205947 - IWATO; Kaoru ;   et al. | 2014-07-24 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same Grant 8,771,916 - Hirano , et al. July 8, 2 | 2014-07-08 |
Pattern forming method, chemical amplification resist composition and resist film Grant 8,753,802 - Kato , et al. June 17, 2 | 2014-06-17 |
Pattern forming method, chemical amplification resist composition and resist film Grant 8,722,319 - Iwato , et al. May 13, 2 | 2014-05-13 |
Method Of Forming Pattern App 20140127629 - KATO; Keita ;   et al. | 2014-05-08 |
Pattern Forming Method, Multi-layered Resist Pattern, Multi-layered Film For Organic Solvent Development, Resist Composition, Method For Manufacturing Electronic Device, And Electronic Device App 20140113223 - KATO; Keita ;   et al. | 2014-04-24 |
Method of forming pattern Grant 8,663,907 - Kato , et al. March 4, 2 | 2014-03-04 |
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition Grant 8,632,938 - Sugiyama , et al. January 21, 2 | 2014-01-21 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same Grant 8,617,788 - Kato , et al. December 31, 2 | 2013-12-31 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same Grant 08617788 - | 2013-12-31 |
Negative Pattern Forming Method And Resist Pattern App 20130266777 - KATO; Keita ;   et al. | 2013-10-10 |
Pattern Forming Method, Chemical Amplification Resist Composition And Resist Film App 20130202999 - IWATO; Kaoru | 2013-08-08 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film, Pattern Forming Method, Electronic Device Manufacturing Method, And Electronic Device, Each Using The Composition App 20130136900 - SHIBUYA; Akinori ;   et al. | 2013-05-30 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Resist Film App 20130122427 - KATAOKA; Shohei ;   et al. | 2013-05-16 |
Pattern Forming Method, Chemical Amplification Resist Composition And Resist Film App 20130115556 - IWATO; Kaoru ;   et al. | 2013-05-09 |
Pattern Forming Method, Electron Beam-sensitive Or Extreme Ultraviolet-sensitive Composition, Resist Film, Manufacturing Method Of Electronic Device, And Electronic Device App 20130084438 - IWATO; Kaoru ;   et al. | 2013-04-04 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film Using The Same, Pattern Forming Method, Electronic Device Manufacturing Method, And Electronic Device, Each Using The Same App 20130078433 - IWATO; Kaoru ;   et al. | 2013-03-28 |
Pattern Forming Method, Chemical Amplification Resist Composition And Resist Film App 20130045365 - KATO; Keita ;   et al. | 2013-02-21 |
Pattern Forming Method And Actinic-ray- Or Radiation-senstive Resin Composition App 20130040096 - Iwato; Kaoru ;   et al. | 2013-02-14 |
Polymerizable compound and polymer compound obtained by using the same Grant 8,362,170 - Hirano , et al. January 29, 2 | 2013-01-29 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Actinic Ray-sensitive Or Radiation-sensitive Film And Pattern Forming Method Using The Same App 20130020684 - IWATO; Kaoru | 2013-01-24 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Same App 20130017377 - Kataoka; Shohei ;   et al. | 2013-01-17 |
Pattern Forming Method And Resist Composition App 20130011785 - Kato; Keita ;   et al. | 2013-01-10 |
Pattern Forming Method And Resist Composition App 20120321855 - Iwato; Kaoru ;   et al. | 2012-12-20 |
Pattern Forming Method, Chemical Amplification Resist Composition And Resist Film App 20120322007 - Kato; Keita ;   et al. | 2012-12-20 |
Pattern Forming Method, Pattern, Chemical Amplification Resist Composition And Resist Film App 20120288691 - Iwato; Kaoru ;   et al. | 2012-11-15 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Resist Film App 20120282548 - Enomoto; Yuichiro ;   et al. | 2012-11-08 |
Polymerizable Compound And Polymer Compound Obtained By Using The Same App 20120271021 - HIRANO; Shuji ;   et al. | 2012-10-25 |
Polymerizable compound and polymer compound obtained by using the same Grant 8,252,877 - Hirano , et al. August 28, 2 | 2012-08-28 |
Pattern Forming Method, Chemical Amplification Resist Composition And Resist Film App 20120148957 - Enomoto; Yuichiro ;   et al. | 2012-06-14 |
Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition Grant 8,158,326 - Kodama , et al. April 17, 2 | 2012-04-17 |
Pattern Forming Method, Chemical Amplification Resist Composition And Resist Film App 20120077122 - IWATO; Kaoru ;   et al. | 2012-03-29 |
Method Of Forming Pattern App 20120052449 - KATO; Keita ;   et al. | 2012-03-01 |
Method Of Forming Pattern And Organic Processing Liquid For Use In The Method App 20120028196 - KAMIMURA; Sou ;   et al. | 2012-02-02 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Resist Film And Pattern Forming Method Using The Composition App 20120015301 - Yoshidome; Masahiro ;   et al. | 2012-01-19 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using The Same App 20120009522 - Kato; Takayuki ;   et al. | 2012-01-12 |
Method Of Forming Pattern And Developer For Use In The Method App 20120003591 - ENOMOTO; Yuichiro ;   et al. | 2012-01-05 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using The Composition App 20110318687 - Saegusa; Hiroshi ;   et al. | 2011-12-29 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using The Same App 20110236828 - Hirano; Shuji ;   et al. | 2011-09-29 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Composition App 20110091809 - Saegusa; Hiroshi ;   et al. | 2011-04-21 |
Positive resist composition and pattern forming method using the same Grant 7,887,988 - Mizutani , et al. February 15, 2 | 2011-02-15 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Composition App 20100248136 - SUGIYAMA; Shinichi ;   et al. | 2010-09-30 |
Polymerizable Compound And Polymer Compound Obtained By Using The Same App 20100152401 - HIRANO; Shuji ;   et al. | 2010-06-17 |
Polymerizable Compound, Lactone-containing Compound, Method For Manufacturing Lactone-containing Compound And Polymer Compound Obtained By Polymerizing The Polymerizable Compound App 20100152400 - IIZUKA; Yusuke ;   et al. | 2010-06-17 |
Positive photosensitive composition and a pattern-forming method using the same Grant 7,700,261 - Kodama , et al. April 20, 2 | 2010-04-20 |
Positive resist composition and pattern formation method using the positive resist composition Grant 7,687,219 - Iwato , et al. March 30, 2 | 2010-03-30 |
Resist Composition And Method Of Forming Pattern Therewith App 20100028804 - IWATO; Kaoru ;   et al. | 2010-02-04 |
Positive resist composition and pattern formation method using the positive resist composition Grant 7,632,623 - Iwato , et al. December 15, 2 | 2009-12-15 |
Positive resist composition and pattern forming method using the same Grant 7,625,690 - Mizutani , et al. December 1, 2 | 2009-12-01 |
Film Forming Composition, Insulating Film, And Electronic Device App 20090221779 - Kubo; Youhei ;   et al. | 2009-09-03 |
Positive Photosensitive Composition And A Pattern-forming Method Using The Same App 20090081581 - Kodama; Kunihiko ;   et al. | 2009-03-26 |
Photosensitive Composition, Compound For Use In The Photosensitive Composition, And Method Of Pattern Formation With The Photosensitive Composition App 20090075202 - KODAMA; Kunihiko ;   et al. | 2009-03-19 |
Film Forming Composition, Film, And Electronic Device App 20090048421 - Kubo; Youhei ;   et al. | 2009-02-19 |
Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition Grant 7,449,573 - Kodama , et al. November 11, 2 | 2008-11-11 |
Positive resist composition and pattern formation method using the positive resist composition Grant 7,442,490 - Iwato , et al. October 28, 2 | 2008-10-28 |
Composition For Forming Low-dielectric-constant Film, Insulating Film, And Electronic Device App 20080161532 - IWATO; Kaoru | 2008-07-03 |
Positive resist composition and pattern formation method using the positive resist composition App 20080044760 - Iwato; Kaoru ;   et al. | 2008-02-21 |
Positive resist composition and pattern forming method using the same App 20070218407 - Mizutani; Kazuyoshi ;   et al. | 2007-09-20 |
Positive resist composition and pattern formation method using the positive resist composition App 20070218405 - Iwato; Kaoru ;   et al. | 2007-09-20 |
Image Forming Material App 20070122738 - IWATO; Kaoru | 2007-05-31 |
Positive resist composition and pattern formation method using the positive resist composition App 20070105045 - Iwato; Kaoru ;   et al. | 2007-05-10 |
Image forming material Grant 7,160,667 - Iwato January 9, 2 | 2007-01-09 |
Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition App 20060040203 - Kodama; Kunihiko ;   et al. | 2006-02-23 |
Image forming material and ammonium compound Grant 6,958,205 - Iwato , et al. October 25, 2 | 2005-10-25 |
Planographic printing plate precursor Grant 6,841,330 - Miyake , et al. January 11, 2 | 2005-01-11 |
Image forming material App 20040152012 - Iwato, Kaoru | 2004-08-05 |
Planographic printing plate precursor App 20040146800 - Watanabe, Kotaro ;   et al. | 2004-07-29 |
Image forming material App 20040067435 - Iwato, Kaoru ;   et al. | 2004-04-08 |
Image forming material and ammonium compound App 20030143481 - Iwato, Kaoru ;   et al. | 2003-07-31 |
Planographic printing plate precursor App 20020136979 - Miyake, Hideo ;   et al. | 2002-09-26 |